A spin coating process for RRAM, which is a TiN/TiO2/FTO structure based on a PTC sol solution, was developed in this laboratory, a method which enables low-temperature and eco-friendly manufacturing. The RRAM corresponds to an OxRAM that operates through the formation and extinction of conductive filaments. Heat treatment was selected as a method of controlling oxygen vacancy (VO), a major factor of the conductive filament. It was carried out at 100 oC under moisture removal conditions and at 300 oC and 500 oC for excellent phase stability. XRD analysis confirmed the anatase phase in the thin film increased as the heat treatment increased, and the Ti3+ and OH- groups were observed to decrease in the XPS analysis. In the I-V analysis, the device at 100 oC showed a low primary SET voltage of 5.1 V and a high ON/OFF ratio of 104. The double-logarithmic plot of the I-V curve confirmed the device at 100 oC required a low operating voltage. As a result, the 100 oC heat treatment conditions were suitable for the low voltage driving and high ON/OFF ratio of TiN/TiO2/FTO RRAM devices and these results suggest that the operating voltage and ON/OFF ratio required for OxRAM devices used in various fields under specific heat treatment conditions can be compromised.

Titanium dioxide was prepared by Polymer Complex Solution Method(PCSM) according to the mole ratio of Titanium (IV) isopropoxide(TTIP)/solvent and polymer(Poly Ethylene Glycol). Polymer electrolytes were usually made by dispersing preproduced ceramic nanoparticles in a polymer matrix. Using this method, pure and nano-sized powder was synthesized through a simple procedure and polymer entrapment route. At the optimum amount of the polymer, the titanium ions are dispersed in solution and a homogeneous polymeric network is formed. The maximum intensity of anatase phase of was achieved by calcining at for 2h. The synthesized powders were nano-sized and the average size was about 50nm. Anatase/Rutile ratio of the synthesized was 70%/30%

자외선 차단기능과 제균 기능을 갖는 합성 TiO2-복합체에 대해 압력의 영향을 체크하기 위해 고압실험을 시행하였다. 복합체 분말시료는 아나타제와 루틸 및 염화은으로 구성되어 있으며, 입자크 기는 34 nm 정도로 결정되었다. 아나타제와 루틸 모두 약 14~16 GPa 구간에서 ZrO2 (배델레이트)-형 태의 결정구조로 상변이하며, 본 실험의 최고압력인 22.7 GPa까지 상변이는 계속된다. 압력을 모두 제거하여 상압 상태가 되면, 루틸은 α-PbO2 구조로 상변이하며 아나타제는 고압의 ZrO2-결정구조가 유지되는 것으로 판단된다. 염화은의 회절피크는 낮은 압력에서 사라지는 것이 관찰되었다.