A porous α-alumina tube of 2.5 ㎜ O.D. and 1.9 ㎜ I.D. was used as the support of an inorganic membrane. Macropores of the tube, about 150 nm in size, were plugged with silica formed by thermal decomposition of tetraethylorthosillcate at 600℃. The forced cross-flow CVD method that reactant was evacuated through the porous wall of the support was very effective in plugging macropores. The H_2 permeance of the prepared membrane was of the order of 10^-8 mol s^-1 m^-2 . Pa^-1, while the N_2 permeance was below 10^-11 mol. s^-1 . m^-2 . Pa^-1 at 600℃. This was comparable to that of silica-modified Vycor glass whose size was 4 nm.