In this study is a study to measure the section by voltage through the high integration of the circuit of the inspection equipment for the power supply circuit of semiconductor equipment. The experiment was conducted by increasing the -1.5∼4 voltage section by 0.5V. At this time, the tolerance was applied to ±0.1%+5mA. Although the voltage increased through the experiment, the accuracy of the measurement data did not change, and it was confirmed through this experiment that the null hypothesis(H0) was adopted in each section through the hypothesis test.

Monitoring autocorrelated processes is prevalent in recent manufacturing environments. As a proactive control for manufacturing processes is emphasized especially in the semiconductor industry, it is natural to monitor real-time status of equipment throug

A heat pipe heat sink which is possible to frozen start up at the lower than -20℃ by using a VCHP was designed, manufactured and tested. The VCHP uses water and nitrogen gas as the working fluid and non-condensable gas. The test results showed that the VCHP heat sink started up successfully at the range of -20 to -30℃ of the ambient temperature and 1000 to 2600W of the heat flow rate. The thermal resistance of the VCHP heat sink decreased as increased the heat flow rate and the ambient temperature since the active zone of VCHP increased.

논문에서는 전력용반도체 소자의 수명예측으로 기초적인 동작환경과 구동시간들을 기록하였다. 전력변환기의 제어기에 의하여 전력소자의 구동시간과 방렬기의 온도 등 동작환경을 누적하여 기록하고 이를 확인할 수 있도록 하므로써전력용 반도체소자는 그 구조에서 수명은 반도체 칩의 온도변화의 크기와 반복회수로 사용기간을 보증하고 있으므로이에 의한 수명의 예측으로 유지보수 또는 교체가 적절한 시점에서 이루어질 수 있다고 판단된다.