FIB와 나노메니퓰레이터를 이용한 다양한 nano manufacturing을 통해 단일 나노선 소자제작 및 평가가 가능하였으며 또한 나노물질 자체의 전기적, 기계적 특성 평가를 수행할 수 있었다. 나노메니퓰레이터를 나노선에 직접 접촉시켜 전기적 특성을 평가하는 기술은 STA 등과 함께 사용될 때 높은 신뢰도를 갖는 신호를 얻을 수 있었다. 특히, 이를 이용한 나노 소재 특성 평가기술은 소자제작 시간을 단축시킬 수 있고 패턴닝으로부터 화학적 오염을 줄일
The combination of focused ion beam (FIB) and 4 point probe nanomanipulator could make various nano manufacturing and electrical measurements possible. In this study, we manufactured individual ZnO nanowire devices and measured those electrical properties. In addition, tensile experiments of metallic Au and Pd nanowires was performed by the same directional alignment of two nanomanipulators and a nanowire. It was confirmed from I-V curves that Ohmic contact is formed between electrodes and nanomanipulators, which is able to directly measure the electrical properties of a nanowire itself. In the mechanical tensile test, Au and Pd nanowires showed a totally different fracture behavior except the realignment from <110> to <002>. The deformation until the fracture was governed by twin for Au and by slip for Pd nanowires, respectively. The crystallographic relationship and fracture mechanism was discussed by TEM observations.