We propose the development and test result of new optical axis alignment system for the interchangeable F/8 secondary mirror of the BOAO 1.8m telescope system. Since the original system was not equipped with a suitable optical alignment facility, the whole alignment process was performed by hand. It was necessary at least three persons working more than 2 nights and the altitude of the telescope could not exceed 10 degrees, in such altitude the alignment quality was not so good by atmospheric effect. The new system adopts position readable motorized system and remote control operation by the computer installed in observation room, which reduces the number of workers to only one and eliminates the altitude restriction. The defocused CCD image pair obtained at higher altitude makes the aberration estimates more accurately and the number of required alignment loops is reduced from 10 to 4. The system has been installed on September 1, and performed alignment three times. The test results show that the system is stable and accurate, gives better optical performance of the telescope under F/8 focus. We hope to emphasize the fact that the new system will increase observation time of the telescope by about 20 nights per year assuming one alignment in every month.

MOS 소자의 얇은산화막(thin oxide)불량을 화학적으로 식각하지 않고 불량부위를 광전자방사(photon emission)반응을 이용하여 위치를 확인하고, 이곳을 FIB로 절단하여 불량부위의 단면을 관찰했다. 20nm 두께의 SiO2불량은 셀(cell)영역의 위치에 따른 의존성은 없고, 불량은 저전계의 입자(particle)성 불량과 중간전계의 Si 기판 핏(pit)과 관련된 불량이 주였다. 고전계에서는 전형적인 SiO2 산화막의 절연파괴가 일어난 것이 관찰된다.