In order to overcome the recrystallization embrittlement and irradiation embrittlement of Mo, which are major problems for its fusion applications, internally nitrided Mo alloys were prepared by a novel multi-step internal nitriding. Neutron irradiation was performed in the Japan Material Testing Reactor (JMTR). After irradiation, nitrided Mo alloys exhibited ower ductile-brittle transition temperature than irradiated TZM. These results suggested that multi-step internal nitriding was effective to the improvement in the embrittlement by irradiation. Transmission electron microscope observation revealed that TiN particles precipitated by nitriding acted as a sink for irradiation-induced defects.