Internally nitrided dilute W-Ti alloy specimens having a heavily deformed surface microstructure were prepared by a multi-step internal nitriding at 1573-2073 K. Primary nitriding below their recrystallization temperature induced a precipitation of ultrafine TiN particles. After secondary and tertiary nitriding, those precipitates grew into rod-like TiN with a length of 20-60 nm. The recrystallization temperature after nitriding was elevated above 2073 K. The yield strength at 1773 K obtained from nitrided W-0.5 mass% Ti alloy was about 5 times as large as that of the recrystallized specimen. DBTT of the nitrided alloys was about 373 K.