AlN thin film is highly valued for use as a high-temperature material because of its excellent heat resistance, thermal conductivity and high mechanical strength. In addition, it is known as a replacement material for ZnO, because it can be applied to surface acoustic wave elements and high-frequency filters using piezoelectric properties or sound velocity. In this study, an alternating sputtering method was used to fabricate an AlN thin film with excellent film quality. The c-axis orientation and residual stress of the fabricated AlN thin film were measured using an X-ray diffraction method. Nitrogen gas pressure and target electrode conversion time are important deposition conditions when producing a thin film using the alternating sputtering method. The AlN thin film fabricated on the glass substrate using the alternating planar magnetron sputtering method exhibited a crystal structure in which the c-axis was preferentially oriented in the normal direction of the substrate surface. The c-axis orientation was better when the target electrode switching time was short under the condition of low nitrogen gas pressure. Residual stress is tensile stress in the very low nitrogen gas pressure range (PN ≤ 0.3 Pa), compressive stress in the low nitrogen gas pressure range (0.3 < PN < 0.9 Pa), and in the high nitrogen gas pressure range (PN ≥ 0.9 Pa), it becomes tensile stress. Residual stress shows tensile stress when the switching time is short, tensile stress decreases as the switching time increases, and becomes compressive stress when the switching time is sufficiently long (300 to 600 s). Compared to the simultaneous sputtering of two targets, the use of the alternating sputtering method can produce a high-quality thin film with excellent c-axis orientation and low residual stress.

본 논문은 록의 보컬 기법 중 가성의 표현 방법에 대한 분석연구를 기술하였다. 1990년대 얼터너티브 록 밴드인 라디오헤드의 보컬 표현 기법 중 가성을 중심으로 연구 하였다. 얼터너티브 록은 클래식 록과 인스트림 록의 대안으로 기존의 헤비메탈 음악으로부터 영향 받지 않는 록을 지칭하는 용어로 쓰이고 있다. 얼터너티브 록의 장르적 특성을 가진 밴드 중 고음부의 강렬한 스크리밍, 그로울링 표현 대신 가성을 사용한 라디오헤드를 분석하여 연구하였다. 라디오헤드의 아홉 개 앨범 중 가성이 들어간 곡과 진성만 있는 곡을 분류하여 특정 음역 및 주제어의 가성 표현을 살펴보았다. 확인 결과 특정 음역 및 주제어의 가성 표현을 확인 할 수 있었으며, 이러한 표현 기법을 진성만 들어가 있는 곡에 적용하여 개성 있는 표현을 연출 할 수 있었다. 결과적으로 강렬한 사운드를 기반으로 하는 록에서 가성이라는 보컬 표현 기법을 적절하게 적용한다면 다양한 표현을 확장할 수 있다는 결론을 제시하였다.

The research in this paper was carried out to examine the BTEX(Benzene, Toluene, Ethylbenzene, Xylene) concentrations in Seongseo Industrial Complex. These compounds are the major constituents, more than 60% in composition of total VOCs, mainly charging in ambient air. BTEX samples were collected from the 38 sites, 10 for the source points and 18 for the boundary sites, and were analyzed by canister-GC/MS. The mean concentrations of BTEX were 33 ppbv for benzene, 214 ppbv for toluene, 89 ppbv for ethylbenzene, 77 ppbv for xylene. Among the BTEX, toluene had the highest concentration in the source points and boundary sites. In the source points, BTEX concentration of incineration facility for hazardous wastewater appeared highly in the range of 220～350 ppbv. BTEX concentrations in source boundary sites appeared in the order of toluene＞ethylbenzene＞xylene＞benzene. As a result of the correlation analysis, the concentration of the source points was related to those of the boundary sites. Correlation of ethylbenzene and xylene was presented to 0.7991(P＜0.01), 0.6329(P＜0.05) as the correlation coefficient, respectively.