The effect of silver nanoparticles (NPs) incorporation on the electronic properties of poly (3, 4-ethylenedioxythiphene) : poly(styrenesulfonate) (PEDOT : PSS) films was investigated. The surface of silver NPs was stabilized with trisodium citrate to control the size of silver NPs and prevent their aggregation. We obtained ca. 5 nm sized silver NPs and dispersed NPs in PEDOT : PSS solution. Sheet resistance, surface morphology, bonding state, and work function values of the PEDOT : PSS films were modified by silver NPs incorporation as well as annealing temperature. Sodium in silver NPs solution could lead to a decrease of work function of PEDOT : PSS; however, large content of silver NPs have an effect on the increase in work function, resulting from charge localization on the silver NPs and a decrease in the number of charge-trapping-related defects by chemical bond formation.

실릴콘 산화막을 CHF3/C2F6 혼합가스를 사용하여 반응성이온 건식식각을 행할 때 실리콘 표면에 형성되는 잔류막과 손상충의 열적 거동을 X-선 광전자 분광기(XPS)와 이차이온 질량 분석기 (SIMS)를 사용, 연구하였다. 저항가열을 통한 in-situ 분석에 의해 폴리머 잔류막은 200˚C부터 분해가 시작되고 400˚C 이상의 가열에서는 graphite 형태의 탄소 결합체를 형성하며 분해됨을 알았다. 질소 분위기하의 급속 열처리를 통해 잔류막의 열분해는 800˚C 이상에서 완료되고 손상층을 형성하는 침투 불순원소의 기판 외부로의 확산이 관찰되었다.