The transparent organic-inorganic hybrid films were prepared by the Sol-Gel process. PVP(polyvinylpyrrolidone) was used in organic component and TEOS(tetraethoxysilane) was used in inorganic component. HCI, CH3COOH, and NH4OH were used as the Sol-Gel catalyst. The characteristics according to not only the variation of organic and inorganic contents but also the variation of catalyst species and contents were investigated. On the whole, the compatibility was remained between organic and inorganic components, and also as the TEOS contents were increased, mostly the transparency and the mechanical, thermal properties were improved. In addition, as content of catalysts was increased, the films showed characteristics that were closer to PVP than silica. Although the transparency of films was preserved in HCI and CH3COOH, only the film containing more than 40wt% TEOS in NH4OH showed different phenomena.

LaMnO3, and gel films were deposited by spin-coating technique on scandium-doped zirconia (YSZ) substrate using the precursor solution prepared from , or ,2-methoxyethanol, and polyethylene glycol. By heat-treating the gel films, the electrochemical cells, were fabricated. The effect of polyethylene glycol on the microstructure evolution of and thin films was investigated, and NOx decomposition characteristics of the electrochemical cells were investigated at to . By applying a direct current to the electrochemical cell, good NOx conversion rate could be obtained relatively at low current value even if excess oxygen is included in the reaction gas mixture.

본 연구에서는 sol-gel법으로 제조된 PbTiO3 (PT) 단층박막내의 실시간 응력과 두께 수축거동, 그리고 다층박막의 미세경도를 온도의 함수로 측정하여 열처리에 따른 PT박막내의 물리화학적 변화를 설명하였다. 단층박막은 상온에서 220˚C까지 급격한 수축을 보였으며 총수축량의 83%가 이 온도구간에서 일어났다. as-spun된 박막 내에는 이미 75MPa의 인장응력이 존재하였으며 130˚C부터 뚜렷이 증가하여 250˚C에서 147MPa의 최대 인장응력을 나타냈다. 인장응력의 급격한 감소가 일어나는 370˚C부터는 본격적으로 치밀화된 PT박막과 Si 기판과의 열팽창계수 차이가 주로 박막내의 응력을 결정하며, 이것은 다층박막의 미세경도가 300˚C 이후에서 급격히 증가하는 사실로도 뒷받침된다. 한편 다층박막에서 단층박막과 달리 550˚C까지 열처리후 Perovskite 상이 많이 생성되었으며 이는 박막 두께의 증가에 따른 homogenous 핵생성 site의 증가 때문이라고 생각된다