Ar 및 Ar과 N2 분위기하에서 rf 마그네트론 스퍼터링방법으로 Ta-AI과 Ta-AI-N합금막을 제조하였다. Ta-7.9at.% AI계열, Ta-26.7 at% AI게열과 Ta-45.4at.%AI계열에 Ar에 대한 질서유량비로 26%까지 질소를 첨가하여 Ta-AI-N박막을 증착한후, 300-600˚C온도 구산에서 열처리 전후의 구조 및 전기적 특성과 열적안정성을 통하여 레지스터의 적용가능성을 조사하였다. 구조 및 조성 분석은 X-선 회절과 Rutherford Backscattering Spectrometry(RBS)로 관찰하였고 열적안정성은 4단자법(four point probe method)을 이용한 저항변화를 통하여 측정하였다. 순수 Ta에 AI을 첨가하면 확장된 β(β-Ta)N 합금박막에서 가장 열적안정성이 우수하게 나타났던 질소첨가 범위는 Ta Nhcp또는 TaN/ sub fcc/또는 Ta Nfcc와 비정질과의 혼합상순으로 상천이를 나타내었다. Ta-AI-N 합금박막에서 가장 열적안정성이 우수하게 나타났던 질서첨가 범위는 Ta-26.7at. % AI계열의 경우 19-36at.% N2구간이었고, Ta-45.5at.% AI계열의 경우는 30-45at.%구간이었다. Ta-AI합금박막은 질소가 첨가되지 않아도 열처리 온도 및 시간에 따라 약 10% 이내의 비교적 작은 저항변화를 보여 열적안정성이 우수하지만 질소를 첨가하여 Ta-AI-N합금박막을 형성시킬경우, 증착된 상태에서 이미 큰 비저항을 나타내었고 열처리 동안 3%이내의 매우 작은 저항변화를 나타내었기 때문에 레지스터용 재료로써 열적안정성에 대한 잠재력이 크다. 크다.

To compare the effects of two external forcing on track of typhoon, TWRF(Typhoon WRF) based ensemble experiments are carried out in the case of Typhoon Morako which is the 8th typhoon at Northwest Pacific region in 2009. The two forcing are tropical SST and topography induced thermal and mechanical forcing, respectively. According to the result of numerical experiment for five-day forecast, the effect of mechanical forcing is about two times stronger than thermal forcing on the track error of the typhoon. More case study for other typhoon will be done as a next paper.

Based on the X-ray powder diffraction (XRD) and M ssbauer spectroscopy, the thermal behavior and phase transformations of two clays are investigated for raw and fired conditions, which are collected from Kwangryeongli and Ildo district in Cheju Island. M ssbauer spectra at room temperature and 20for two clays show that paramagnetic Fe3- is the structural iron of the layer silicate and ferrihydrite, and superparamagnetic goethite has about 50% of total iron contents. The XRD peaks of hematite for the fired clays appear from 800℃ in Kwangryeongli clay and from 600℃ in Ildo district clay, respectively. The structural Fe2+ was completely oxidized into Fe3- at 400℃ for Kwangryeongli clay and 500℃~600℃ for Ildo district clay, respectively. The structural Fe2+ was completely oxidized into Fe3- at 400℃. For the temperature ranging from 400℃ to 700℃~800℃, two fired clays exhibit the dehydroxylation of the clay mineral. A disintegration of the clay mineral structure is observed from 700℃~800℃ to 1100℃, followed by the onset and spread of vitrification process. It is also shown that well-crystallized hematite phase is formed at the temperature higher than 1100℃ and the relative absorption area decreases, which might be related to the recrystallization of alluminosilicate matrix.