Magnetostrictive thin films can be applied in transmission system for the enhancement of energy efficiency. In this study, four kinds of substrates (Si, glass, Fe, polyimide) with the magnetostrictive thin film layers are prepared and investigated to characterize the magnetic and mechanical behaviors due to the substrates effects. The fabricated substrates have thicknesses of 50, 150 and 500um with cantilever shape. TbDyFe films are deposited by DC magnetron sputtering with 1～10m thick. The deposited film thicknesses are verified using X-ray diffraction. The magnetization of each sample is examined using VSM(Vibrating Sample Magnetometer) and magnetostriction is also measured using capacitance method to characterize magneto-mechanical behaviors. The magnetostriction results as deflections are compared and the results are discussed for micro actuator applications.

asically, a current sensor is consisted of ferromagnetic core, coil and magnetic sensor. To measure alternative current, 2 methods are existed. The first method is measurement of the induced elect개motive force of coil, which is wired in ferromagnetic core. The second measurement method is utilized with the magnetic sensor, such as hall effect sensor. However, those methods have some problem. This paper introduces the development of direct current sensor using magnetostriction. Principally, magnetostriction is the phenomenon of expansion of contraction when ferromagnetic core is placed in an alternating magnetic field. This induced electromagnetic induction and the direct current can be measured such as measurement of alternating current.