Organic-inorganic hybrid coating films have been used to increase the transmittance and enhance the physical properties of plastic substrates. Sol-gel organic-inorganic thin films were fabricated on polymethylmethacrylate (PMMA) substrates using a dip coater. Metal alkoxide precursor tetraethylsilicate (TEOS) and alkoxy silanes including decyltrimethoxysilane (DTMS), 3-glycidoxypropyltrimethoxysilane (GPTMS), phenyltrimethoxysilane (PTMS), 3-(trimethoxysilyl)propyl methacrylate (TMSPM) and vinyltrimethoxysilane (VTMS) were used to synthesize sol-gel hybrid coating solutions. Sol-gel synthesis was confirmed by the results of FT-IR. Cross-linking of the Si-O-Si network during synthesis of the sol-gel reaction was confirmed. The effects of each alkoxy silane on the coating film properties were investigated. All of the organicinorganic hybrid coatings showed improved transmittance of over 90 %. The surface hardness of all coating films on the PMMA substrate was measured to be 4H or higher and the average thickness of the coating films was measured to be about 500 nm. Notably, the TEOS/DTMS coating film showed excellent hydrophobic properties, of about 97°.

휘어지며 투명한 전자기기의 개발을 위해서 최근 유기반도체, 탄소기반 나노소재, 금속산화물 반도체등의 다양한 신소재 반도체 개발에 대한 연구가 관심을 받으며 지속적으로 발전하고 있다. 그러나, 이러한 신소재 반도체 기술의 꾸준하고 지속적인 발전에도 불구하고 트랜지스터를 구성하는 주요 소재중 하나인 유전체에 대한 연구는 반도체의 개발속도에 크게 미치지 못하여, 기계적인 휘어짐의 특성을 갖추고, 높은 캐패시턴스와 좋은 누전전류 특성을 갖는 새로운 유전체 개발에 대한 요구가 지속적으로 커지고 있다. 이에 본 연구는 저전압에서 구동 가능한 박막트랜지스터를 위한 유기-무기 하이브리드소재 박막을 개발하며 이를 저전압 구동이 가능한 유기박막트랜지스터에 적용하였다. 상대적으로 높은 유전상수를 갖는 염화하프늄 (HfO2)과 소수성기를 갖고 있으며 금속산화물과 공유결합이 가능한 실란산 기반의 유기물 (octadecyltrimethoxysilane)을 혼합한 전구체 용액을 합성하며 상대적으로 낮은 온도에서 열처리를 통해 얻을 수 있었다. 제조된 하이브리드 게이트 유전체 박막은 우수한 절연 및 유전체 특성과 함께 소수성 표면 특성을 가질 수 있었고 펜타센 유기박막트랜지스터로 응용하여 저전압에서 구동이 되며 우수한 트랜지스터 성능을 갖는 소자를 개발하였다.

Using UV nanoimprint lithography(UV-NIL), 1-dimensional(1-D) pattern structures were fabricated on a hybrid mixture thin film of lanthanum oxide and a UV-curable resin. 1-D pattern on a wafer fabricated by the laser interference lithography was transferred to polydimethylsiloxane and this is used as a mold of UV-NIL process. Conducting an X-ray photoelectron spectroscopy, C 1s and La 3d spectra were analyzed, and it was confirmed that hybrid thin film was successfully deposited on glass substrate. Also, transferred pattern structure was observed by using an atomic force microscopy. Through this, it was revealed that agglomerations between 1-D pattern were increased as UV irradiation time increased and this phenomenon disrupted the quality of NIL process. Additionally, liquid crystal(LC) cells with patterned hybrid thin films were fabricated and LC alignment performances were investigated. Using the polarizing optical microscopy and the crystal rotation method, LC alignment state and pretilt angles were observed. Consequently, the uniform homogeneous LC alignment was achieved at UV irradiation time of 1min and 3min where high resolution pattern transfer was observed.

UV-Curable hybrid coatings were synthesized to improve the surface properties of plastic film. Organic-inorganic coating solutions were prepared by the sol-gel method using urethane-acrylate oligomer, acrylate monomer, photo initiator and tetraethoxysilane (TEOS). Methacryloyloxypropyltrimethoxysilane(MPTMS) was used as a silane coupling agent to improve chemical interaction between inorganic phases and UV curable acrylate. In this study, the surface hardness and adhesive properties were improved with the use of inorganic component. The experimental results showed that UV-Curable hybrid films containing aliphatic urethane oligomer, hexanedioldiacrylate, trimethylolpropanetriacrylate, hydroxy dimethyl acetophenone exhibited good surface properties. Also, the optimum curing conditions were investigated.