In the environment of 450mm wafers production known as the next-generation semiconductor production process, one of the most significant features is the full automation over the whole manufacturing processes involved. The full automation system for 450mm

In 450mm wafers production environment for next-generation semiconductor production, one of the most significant features is the adoption of full automation to the whole manufacturing processes involved. The full automation system applied to the whole manufacturing processes will prevent the workers from intervening the manufacturing processes as much as possible and increase the importance of each individual wafer noticeably, and thus require a more robust scheduling system for entire semiconductor manufacturing processes. The scheduling system for 450mm wafers production also should be capable of monitoring the status of each individual wafer and collecting useful fab data in real time. Based on data (or information) gathered in each process, the real-time scheduling system function efficiently to control the whole semiconductor manufacturing processes. In this study, we first carry out preliminary survey on the system requirements and the necessary functions for constructing the real time scheduling system with considering the changes from 300mm wafer production environment to 450mm wafer production environment, and then propose the scheduler system architectures for the cluster-type production processes which are the general in 450mm wafer production environment for the efficient production scheduling. The system architectures proposed in this study involve the modules for real-time scheduling, the modules for supporting the cluster-type production, the modules for finding optimal schedules, and so on. Also, we provide the specifications of the key required functions and capabilities of the modules and the relationship among the modules proposed.　

본 논문은 교행이 불가능한 두 대의 자동화 크레인을 운영하는 자동화 컨테이너 터미널의 장치장을 대상으로 국지적 탐색 알고리즘을 이용해 실시간 작업계획을 수립하는 방안을 제안한다. 제안방안은 실시간 제약조건을 만족시키기 위해 현재 이후 일정 시간의 작업만을 작업 계획의 대상으로 삼으며, 장치장의 동적인 작업 특성을 고려하여 새로운 작업이 요청될 때마다 작업 계획을 다시 수립한다. 또한, 교행이 불가능한 두 대의 크레인을 운영할 때 발생할 수 있는 크레인 간의 작업 부하 불균형을 해소하기 위해 작업 계획 과정에서 상대 크레인에 의한 사전 재취급과 사전 이적을 통한 두 크레인 간의 협업을 가능하게 하였다. 시뮬레이션을 이용한 실험 결과 제안 방안이 휴리스틱 방안에 비해 우수하며, 크레인 간의 협업이 작업 효율 향상에 도움이 됨을 확인하였다.