고온에서 수소 분리 회수를 목적으로 silica/alumina 복합 막을 합성하였다. 막의 선택 투과 성능을 향상시키기 위해, sol-gel법에 의한 silica 및 alumina층을 중간층으로 도입하고, 그 위에 강제유동 CVD법에 의한 silica를 합성하였다. Sol-gel법에 의해 alpha-alumina tube에 합성한 gamma-alumina 및 silica 막은 Knudsen 확산 영역의 많은 mesopore를 포함하고 있어서 수소 선택 분리 막으로는 적합하지 못했다. 하지만, sol-gel법에 의해 합성한 silica/gamma-alumina층에 강제유동 CVD법으로 silica를 합성한 결과, 질소 투과 영역의 세공이 완전히 제거되어, 높은 수소 선택성을 가지는 복합 막이 형성되었다. 그 막은 온도에 따라 수소 투과 속도가 증가하여 450℃에서 5.57times10-8molm2sLPa1의 수소 투과 속도와, 9.52 kJ/mol의 활성화 에너지를 나타냈다. 분자체 효과에 의해 질소 투과가 완전히 배제되고, 수소만 선택적으로 투과되는 silica/alumina 복합막이 성공적으로 합성된다.

For effective CO2 separation using pore size controlled membrane, silica was deposited in the mesopores of a γ-alumina film by chemical vapor deposition of tetraethoxysilane (TEOS) and phenyl-substituted ethoxysilanes at 773-873K. The membranes prepared with phenyl-substituted ethoxysilanes were calcined to remove the phenyl group and control the pore size. The gas permselectivity of prepared membranes was evaluated by using H2, CO2, N2, CH4 and C3H8 single component and a mixture of CO2 and N2. The membranes produced using TEOS contained micropores having permselectivity only to hydrogen, but the phenyl-substituted ethoxysilane derived membranes possessed micropores which are recognizable molecules of CO2, N2 and CH4. In the diphenyldiethoxysilane-derived membrane, the CO2 permeance and selectivity of CO2/CH4 were 10-6 ㎥(STP)·m-2·s-1·kPa-1 and 11, respectively. Therefore, the use of phenyl-substituted ethoxysilane was effective in controlling micropore size for CO2 separation.

A porous α-alumina tube of 2.5 ㎜ O.D. and 1.9 ㎜ I.D. was used as the support of an inorganic membrane. Macropores of the tube, about 150 nm in size, were plugged with silica formed by thermal decomposition of tetraethylorthosillcate at 600℃. The forced cross-flow CVD method that reactant was evacuated through the porous wall of the support was very effective in plugging macropores. The H_2 permeance of the prepared membrane was of the order of 10^-8 mol s^-1 m^-2 . Pa^-1, while the N_2 permeance was below 10^-11 mol. s^-1 . m^-2 . Pa^-1 at 600℃. This was comparable to that of silica-modified Vycor glass whose size was 4 nm.