W-10 wt% Ti alloys that have a homogeneous microstructure are prepared by thermal decomposition of WO3-TiH2 powder mixtures and spark plasma sintering. The reduction and dehydrogenation behavior of WO3 and TiH2 are analyzed by temperature programmed reduction and a thermogravimetric method, respectively. The X-ray diffraction analysis of the powder mixture, heat-treated in an argon atmosphere, shows W- oxides and TiO2 peaks. Conversely, the powder mixtures heated in a hydrogen atmosphere are composed of W, WO2 and TiO2 phases at 600 ℃ and W and W-rich β phases at 800 ℃. The densified specimen by spark plasma sintering at 1500 ℃ in a vacuum using hydrogen-reduced WO3-TiH2 powder mixtures shows a Vickers hardness value of 4.6 GPa and a homogeneous microstructure with pure W, β and Ti phases. The phase evolution dependent on the atmosphere and temperature is explained by the thermal decomposition and reaction behavior of WO3 and TiH2.

Porous W-10 wt% Ti alloys are prepared by freeze-drying a WO3-TiH2/camphene slurry, using a sintering process. X-ray diffraction analysis of the heat-treated powder in an argon atmosphere shows the WO3 peak of the starting powder and reaction-phase peaks such as WO2.9, WO2, and TiO2 peaks. In contrast, a powder mixture heated in a hydrogen atmosphere is composed of the W and TiW phases. The formation of reaction phases that are dependent on the atmosphere is explained by a thermodynamic consideration of the reduction behavior of WO3 and the dehydrogenation reaction of TiH2. To fabricate a porous W-Ti alloy, the camphene slurry is frozen at -30℃, and pores are generated in the frozen specimens by the sublimation of camphene while drying in air. The green body is hydrogen-reduced and sintered at 1000℃ for 1 h. The sintered sample prepared by freeze-drying the camphene slurry shows large and aligned parallel pores in the camphene growth direction, and small pores in the internal walls of the large pores. The strut between large pores consists of very fine particles with partial necking between them.

W에 소량의 Ti를 첨가하여 그 함량 변화에 따른 X-선 마스크 흡수체용 W-Ti 박막의 물성을 연구하였다. W-Ti 박막은 DC magnetron sputtering system을 이용하여 증착하였다. Sputtering 증착시 증착압력의 증가에 따라 박막의 밀도는 감소하였으며 박막의 응력은 압축응력으로 바뀌었다. Ti 함량이 증가함에 따라 천이 압력 근방에서의 응력곡선의 기울기가 감소하였으며 천이 압력도 점차 낮아지는 경향을 보였다. Pure-W 시편의 경우 천이 압력이 약 6.5mTorr로 비교적 높았으며, 이 때 박막의 밀도는 17.8g/cm3이었고 함량 6.5%에서 가장 낮은 천이 압력(4.3mTorr)을 보였으며, 이때의 박막 밀도는 17.7g/cm3로 pure-W과 거의 차이가 없음을 알 수 있었다. SEM을 이용한 미세구조 분석결과 pure-W 박막은 원형의 주상정 조직을 보이고 있으며, Ti가 첨가된 W-Ti 박막의 경우에는 가늘고 긴 침상 모양을 가지는 주상정 조직을 형성하고 있다. 또한 이러한 침상조직은 Ti함량이 증가할수록 더욱 발달하고 있으며, AFM 분석결과 Ti 첨가 시편 모두 18Å이하의 우수한 평균 표면 평활도를 나타내었다. 나타내었다.