논문 상세보기
pp.149-160
This research was conducted to configure an optimal membrane module system that would selectively separatehazardous gases which are emitted during the processes in the semiconductor industry. In order to identify the most integralcharacteristic results, a numerical analysis formula which incorporates the dimensions of pipe diameter and gas flow ratewas utilized. Based on the results of the numerical analysis formula, a prototype designed with the main pipe being 100Awith gas outlets made with identical diameter thickness to the main pipe, set at equal intervals, was built. When the gasflow rate is set at 100L/min, although the processing outlets 1, 2, and 3 showed 0.03m/sec deviations in the rate ofspeed, when considering the variables of the average flow rate, the same emission rates are noted. However, in the instanceof when the overall prototype pipe dimensions was enlarged to 200A and the gas flow rate was increased to 500L/min,there was better stabilization. Therefore concluding that as the pressure rates flowing in the main pipe increases, morestable characteristics at the gas outlets can be found.
