Physicochemical properties of potato chip treated with superheated steam (SHS) at various temperatures (120, 150, 180, and 220oC) and durations (2, 5, 8, and 10 min) were measured to assess the potential application of SHS in the production of unfried chips. A faster drying rate was obtained at a higher SHS temperature due to a lower degree of water condensation on the surface of the potato chip. A higher temperature of SHS resulted in higher volume shrinkage, indicating the dependency of shrinkage on the volume of water loss. SHS treatment did not cause any significant defects in the appearance of potato chips although pillowing and burnt spots were observed on the surface of the sample processed at 220oC for 10 min. Damaged starch content and Rapid Visco Analyzer profiles showed that partial gelatinization occurred during SHS treatment. Potato chips treated with SHS showed the shrinkage of parenchyma cells, resulting to compressed cell layers at the surface and inside. As treatment proceeded, air cells were formed internally. These results suggested that SHS combined with post drying process would be appropriate in the production of unfried potato chips by reducing drying time without causing any deterioration in quality.