RF스퍼터링법으로 제작한 비정질(Fe1-x Cox)89Zr11자성박막의 자기특성을 Co농도 X에 따라 조사하였다. 130 Oe의 인가자기중 150˚C에서 90분간 열처리하였을 때 X=0.4, 0.5부근의 박막은 높은 자왜를 나타냄에도 불구하고 양호한 연자기 특성을나타내었다. 특히 X=0.4의 박막에서는 0.25 Oe의 낮은 보자력이 나타났으며, 1MHz, 50mOe의 여기자기장에서 측정된 교류투자율은 900정도였다. 본 연구의 박막에서 얻어진 우수한 자기특성은 외부자기장의 인가에 의해 특성의 변화가 가능한 표면탄성파(surface acoustic wave)소자에 응용될 수 있을 것으로 기대된다.된다..된다.

본 연구는 RF 마그네트론 스퍼터링법으로 제작한 1μm 두께의 Fe79Tb21 및 Fe62Co15Tb23 아몰퍼스합금 박막을 결정화함으로써 석출되는 결정상의 구조와 아몰퍼스합금의 구조와의 대응관계에 관한 기초정보를 도출하기 위하여 자화측정, DSC열분석 및 X선 회절측정 등을 행하였다. 소둔온도가 400˚C이상 증가하면 Fe79Tb21 및 Fe62Co15Tb23 아몰퍼스합금 박막의 용이자화방향이 시료면의 수직방향에서 면내방향으로 이행하였으며 열분석 측정결과, Fe79Tb21 박막의 결정화온도는 500-600˚C범위인 반면 Fe62Co15Tb23박막의 경우는 650˚C로 평가되었다. 또한, 이들 박막에 대한 열처리후의 X선 회절프로화일로부터 양시료 공히 Fe23Tb6 금속간 화합물 이외의 어떠한 금속간화합물도 석출되지 않음을 알 수 있었다.

Adsorption process is largely influenced by pore structures of adsorbents and physical properties of adsorbates and adsorbents. The previous studies of this laboratory was focused on the role of pore structures of adsorbents. And we found some pores of adsorbates which have larger pore diameters than the diameter of adsorbate are filled with easily. In this study the effects of physical and chemical properties of adsorbates and adsorbents, such as pore size distribution, vapor pressure on adsorption were investigated more thoroughly at the concentration of adsorbate of 1000 ppm. The adsorption in the pore ranges of 2～4 times of adsorbates's diameter could be explained by space filling concept. But there was some condensation phenomena at larger pore ranges. The errors between the adsorbed amount of non-polar adsorbates and the calculated amounts by considering factors were found to be 44.46%, positively, and -142%, negatively. When vapor pressure is considered, the errors between the adsorbed amount of non-polar adsorbates and the calculated amounts were in the range of 1.69%～32.25% positively, and negatively -1.08%～-63.10%.

In this study, the relationship between the pore size distribution and the adsorption amount of adsorbates is investigated in detail. Adsorption amounts of non-polar adsorbates were greater than those of polar adsorbates because of slight negative charge on surfaces of adsorbents. The adsorption of benzene on the surface of absorbents was largely influenced by the specific pore size of 2～4 times of benzene diameter. But in case of toluene, the adsorption of toluene was affected by pore sizes of 2～4 times as well as 4～6 times of the diameter of toluene. Both acetone and MEK were examined by the same method. The adsorption of acetone was influenced by pore sizes of 2～4 times of the diameter of acetone. But acetone does not look to be built up multi-layer on those pore sizes. Since acetone molecule is small and its mobility is so fast, it is assumed that the adsorption and desorption of acetone is simultaneously occurred at the same time even at room temperature. In case of MEK, MEK was effected by pore sizes of 2～4 times of the diameter of MEK.