Fluorine heteroatoms were introduced to increase the limited specific capacitances of electric double-layer capacitors (EDLCs), and the effects of the fluorine atoms were analyzed. To introduce the fluorine, a CF4 plasma treatment was used that introduced the fluorine atoms quickly. Among the fluorine functional groups in the F6-ACA framework, the semi-ionic C–F bonds induced rapid charge transfer and imparted pseudocapacitance. Consequently, we achieved a specific capacitance of 325.68 F/g for the F6-CA sample at 0.5 A/g. By analyzing the contributions of the electric double-layer capacitance and the pseudocapacitance, we determined that the contribution from the pseudocapacitance was 37.57%. A remarkable specific capacitance retention rate of 95.87% was obtained over 1000 charge/discharge cycles with a high current density of 3 A/g. Additionally, the semi-ionic C–F bonds reduced the charge transfer resistance ( Rct) by 36.8%. Therefore, the specific capacitance was improved by the fluorine heteroatoms, and the semi-ionic C–F bonds played a pivotal role in this improvement.

PFC (perfluorocompound) gases have an extremely high global warming potential (GWP). A study of the destruction of NF3, CF4 and SF6 gases emitted from the semiconductor industry was attempted by plasma power at 4.4 kW, 5.5 kW, 6.0 kW, 6.6 kW, 7.6 kW, 8.1 kW and 9.1 kW. As electric power increased, DRE (destruction and removal efficiency) of NF3, CF4 and SF6 was also increased. It was confirmed through experiment that the DRE of NF3 is 99% at 7.6 kW, 97% for CF4 at 9.14 kW and 100% for SF6 at 7.6 kW of plasma power. By-products formed by PFC destruction were mainly F2, SO2F2, NOx and CO gases. In addition, particulate matter was formed, and particle were proven to be AlF3.