Surface plasmon resonance is the resonant oscillation of conduction electrons at the interface between negative and positive permittivity material stimulated by incident light. In particular, when light transmits through the metallic microhole structures, it shows an increased intensity of light. Thus, it is used to increase the efficiency of devices such as LEDs, solar cells, and sensors. There are various methods to make micro-hole structures. In this experiment, micro holes are formed using a wet chemical etching method, which is inexpensive and can be mass processed. The shape of the holes depends on crystal facets, temperature, the concentration of the etchant solution, and etching time. We select a GaAs(100) single crystal wafer in this experiment and satisfactory results are obtained under the ratio of etchant solution with H2SO4:H2O2:H2O = 1:5:5. The morphology of micro holes according to the temperature and time is observed using field emission - scanning electron microscopy (FE-SEM). The etching mechanism at the corners and sidewalls is explained through the configuration of atoms.

In this study, i machined micro hole to PCB(Printed circuit board) with ultra precision spindle system for mechanical micro drilling. For this i utilized 0.4∼0.6 ㎜ micro drill and observed cutting edge and hole. Results are as follows; in case of drilling with 0.4∼0.6 ㎜ micro drill, micro hole was made specific range of diameter up to 300 times drilling and micro drilled diameter was bigger than micro drill’s diameter at 300 times over. Error ratio of drilled diameter and damaged hole diameter was within 5 % and 17 %. I observed 0.4 ㎜and 0.6 ㎜micro drill’s cutting edge after 500 times drilling and confirm cutting edge width variation and damage, same result found 1000 times drilling with 0.5 ㎜ micro drill.

Recently, the automatic laser-piercing has become a subject of growing research area in the hydroforming of car body and robotic fields. Generally, the laser-cutting with 6-DOF robot system has 3D error due to a gear backlash and inaccurate calibration method between sensor and cutting-tool. The objective of this article is to study the automatic laser-cutting for the micro-hole piercing of engine cradles. The development of redundant micro-control module and laser vision sensor contributes to the implementation of precise laser cutting. To obtain higher a performance of control module, the calibration algorithm between cutting-tool and laser sensor is required. The implementation of this methodology will be describe. The optimal path generation for a good quality of cutting section is also explained in detail. The experimental results demonstrate the successful operation in the automatic micro-hole piercing. It shows a validity of the micro-motion mechanism and robot‘s calibration algorithm in laser sensor.

Recently micro deep hole drilling is required in the whole industry. However, micro deep hole drilling has still much difficulty because of the lack of drill rigidity and the interruption of chip. We treated a micro deep hole(diameter 0.35mm, depth 3mm) used in a connector jack pin. Therefore, a surface roughness is very important. In this paper, we studied on the variation of the surface roughness for cutting conditions during micro deep hole drilling of Be-Cu material. Most of all, we tried to drill on CNC for the realization of automatization.