Scanning probe microscopy (SPM) has become an indispensable tool in efforts to develop the next generation of nanoelectronic devices, given its achievable nanometer spatial resolution and highly versatile ability to measure a variety of properties. Recently a new scanning probe microscope was developed to overcome the tip degradation problem of the classic SPM. The main advantage of this new method, called Reverse tip sample (RTS) SPM, is that a single tip can be replaced by a chip containing hundreds to thousands of tips. Generally for use in RTS SPM, pyramid-shaped diamond tips are made by molding on a silicon substrate. Combining RTS SPM with Scanning spreading resistance microscopy (SSRM) using the diamond tip offers the potential to perform 3D profiling of semiconductor materials. However, damage frequently occurs to the completed tips because of the complex manufacturing process. In this work, we design, fabricate, and evaluate an RTS tip chip prototype to simplify the complex manufacturing process, prevent tip damage, and shorten manufacturing time.

Atomic Force Microscopes(AFM) is used to scan surfaces of a sample by measuring the interaction between atoms on the sample and the extremely sharp probe tip, which is produced by micromachining. AFM can be used as an inspection equipment for microelectronics industry and also requires a vibration-free environment to provide its proper functions. However, all of machine foundations including the wafer fab floor show the great amount of floor vibrations which can cause bad effects on the AFMs. This paper deals with the permissible floor vibration level for AFM at a given resolution.