In this study is a study to measure the section by voltage through the high integration of the circuit of the inspection equipment for the power supply circuit of semiconductor equipment. The experiment was conducted by increasing the -1.5∼4 voltage section by 0.5V. At this time, the tolerance was applied to ±0.1%+5mA. Although the voltage increased through the experiment, the accuracy of the measurement data did not change, and it was confirmed through this experiment that the null hypothesis(H0) was adopted in each section through the hypothesis test.

In order to secure competitiveness of companies in the semiconductor industry, state management of equipment is one of the most important key factors. Particularly, after carrying out preventive maintenance (PM) work to maintain the best equipment condition, process reliability inspection is carried out. This work must be performed manually by the intervention of the operator. This inspection work is becoming more and more difficult due to the difficulty of the manufacturing worker, the increase of the simple repetitive workload, and the increase of the inspection items for the engineer, as the condition and the procedure continuously change as the semiconductor scaling down. Therefore, we would like to carry out an empirical study on the construction of an automatic inspection system in order to carry out the more reliable and efficient inspection procedure by eliminating the problems and unreasonableness of the past based on the investigation and analysis of the work procedures and conditions of the existing manual method.

Electric of using in daily life is always exposed to risk of electrical fire and electric shock. Only degree of risk is different, there is no risk free electrical product. Generally, the higher voltage, the risk of electric shock is high. The much electric current, the risk of electrical fire is high. But, we can’t help using electric because of risk and we effort to reduce the risk of electrical fire and electric shock. This study deal with the fire prevention generated on heating equipment using SSR for current

Cooling towers have been widely applied to control the indoor temperature in the residential area and the living space. At operating the cooling towers, motor, fan and dropping water produce noise and vibration, which diffuse through the air or the solid object, polluting the environment. The standards can be used at estimating noise and vibration emission by showing remarkable economic or social benefits. The purpose of this study is to show the vibration and noise measurement and influence evaluation between cooling towers and semiconductor equipment.

Semiconductor industry is based on equipment industry and timing industry. In particular, semiconductor process is very complex and as semiconductor-chip width tails and is becoming equipment gradually more as a high technology. Equipment operation is primarily engaged in semiconductor manufacturing (engineers and operator) of being conducted by, equipment errors have also been raised. Equipment operational data related to the error of korea occupational safety and health agency were based on data and production engineers involved in the operator's questionnaire was drawn through the error factor. Equipment operating in the error factor of 9 big item and 36 detail item detailed argument based on the errors down, and 9 big item the equipment during operation of the correlation error factor was conducted. Each of the significance level was correlated with the tabulation and analysis. Using the maximum correlation coefficient, the correlation between the error factors to derive the relationship between factors were analyzed. Facility operating with the analysis of error factors (big and detail item) derive a relationship between the model saw. The end of the operation of the facility in operation on the part of the two factors appeared as prevention. Safety aspects and ergonomics aspects of the approach should be guided to the conclusion.