To observe the formation of defects at the interface between an oxide semiconductor and SiO2, ZnO was preparedon SiO2 with various oxygen gas flow rates by RF magnetron sputtering deposition. The crystallinity of ZnO depends on thecharacteristic of the surface of the substrate. The crystallinity of ZnO on a Si wafer increased due to the activation of ionicinteractions after an annealing process, whereas that of ZnO on SiO2 changed due to the various types of defects which hadformed as a result of the deposition conditions and the annealing process. To observe the chemical shift to understand of defectdeformations at the interface between the ZnO and SiO2, the O 1s electron spectra were convoluted into three sub-peaks bya Gaussian fitting. The O 1s electron spectra consisted of three peaks as metal oxygen (at 530.5eV), O2− ions in an oxygen-deficient region (at 531.66eV) and OH bonding (at 532.5eV). In view of the crystallinity from the peak (103) in the XRDpattern, the metal oxygen increased with a decrease in the crystallinity. However, the low FWHM (full width at half maximum)at the (103) plane caused by the high crystallinity depended on the increment of the oxygen vacancies at 531.66eV due tothe generation of O2− ions in the oxygen-deficient region formed by thermal activation energy.

LaFeO3 powders were synthesized using a method involving solution combustion, and the surfaceproperties of these powders were examined by x-ray photoelectron spectroscopy. As the amount of fuelincreased during the synthesis, the LaFeO3 powders became amorphous with a large plate-like shape. It wasfound that the O 1s spectra were composed of two types of photoelectrons by deconvolutioning the spectra.Photoelectrons with higher binding energy come from adsorbed oxygen (O−) whereas those with lower energycome from lattice oxygen (O2−). The ratio of adsorbed and lattice oxygen increased as the ratio of the fuel andnitrate (Φ) increased. The binding energy of both types of oxygen increased as Φ increased due to the formationof carbonates.

In order to investigate functional groups on the surface of Multi-walled Carbon Nanotubes (MWCNTs) induced by oxyfluorination, XPS (X-ray photoelectron spectroscopy) analysis was carried out. All core level spectra of MWCNTs were deconvoluted to several Pseudo-Voigt functions (sum of Gaussian-Lorentzian functions). Both O1s and F1s binding energy of oxyfluorinated MWCNTs shifted high value as increment of fluorine mixing ratio. The carbon-fluorine covalent bonding concentration increased as increment of fluorine mixing ratio. The shape and intensity of OF10-MWCNTs are similar with those of as-received MWCNTs. However, the intensity and binding energies of main peak position of OF20-MWCNTs and OF30-MWCNTs were dramatically increased by oxyfluorination.

The effects of particle size on the surface properties of hydro-thermally synthesized barium titanate powders were investigated by means of particle size analysis, specific surface area, SEM, zeta potential and XPS. Particle sizes were measured by laser light scattering and are in the range of 150 to 1100nm. Zeta potential increased with increasing particle size and it was large minus value in the range of particle size from 500 to 900nm, which seems to be related with the dissolution of ion in these particle sizes from the analysis of surface properties by XPS.