Homogeneous liquid crystal (LC) alignment on hafnium strontium oxide (HfSrO) films prepared by sol-gel process via ion-beam (IB) bombardment was investigated. Uniform LC alignment was achieved on the IB-irradiated HfSrO films at IB intensity of 1.8 keV. We confirmed the effect of surface morphology on LC alignment using field-emission scanning electron microscope (FE-SEM). In addition, we observed electro-optical characteristics of the twisted-nematic (TN)-LC cells based on HfSrO films to verify the possibility of LC display (LCD) application.