Ru films were successfully prepared by plasma-enhanced atomic layer deposition (PEALD) using and plasma. To optimize Ru PEALD process, the effect of growth temperature, plasma power and plasma time on the growth rate and preferred orientation of the deposited film was systemically investigated. At a growth temperature of and plasma power of 100W, the saturated growth rate of 0.038 nm/cycle was obtained on the flat /Si substrate when the and plasma time was 7 and 10 sec, respectively. When the growth temperature was decreased, however, an increased plasma time was required to obtain a saturated growth rate of 0.038 nm/cycle. Also, plasma power higher than 40 W was required to obtain a saturated growth rate of 0.038 nm/cycle even at a growth temperature of . However, (002) preferred orientation of Ru film was only observed at higher plasma power than 100W. Moreover, the saturation condition obtained on the flat /Si substrate resulted in poor step coverage of Ru on the trench pattern with an aspect ratio of 8:1, and longer plasma time improved the step coverage.

The hybrid structured photo-electrode for dye-sensitized solar cells was fabricated based on the composites of nanoparticles and nanowires. Three samples with different hybrid structures were prepared with 17 vol%, 43 vol%, and 100 vol% nanowires. The energy conversion efficiency was enhanced from 5.54% for pure nanoparticle cells to 6.01% for the hybrid structure with 17 vol% nanowires. For the hybrid structured layers with high nanowires concentration (43 vol% and 100 vol%), the efficiency decreased with the nanowire concentration, because of the decrease of specific surface area, and of thus decreased current density. The random orientations of nanowires can be preserved by the doctor blade process, resulted in the enhanced efficiency. The hybrid structured layer can possess the advantages of the high surface area of nanoparticles and the rapid electron transport rate and the light scattering effect of nanowires.

In this paper, the effect of electrical characteristics and electrode shape on the alignment and attachment of multi-walled carbon nanotubes (MWNTs) has been studied. The attraction and alignment of MWNTs between the gaps has been investigated by applying electric field which is called electrophoresis and dielectrophoresis. According to the frequency of electric field, positive or negative dielectrophoretic force can be determined. The concentration of MWNTs solution was , and a droplet of was dropped between two electrodes. Through the repeated experiments, the optimal electrical conditions for aligning and attaching MWNTs in the desired places were obtained. Since the frequency range of 100 kHz~10 MHz generated positive dielectrophoretic force, MWNTs were attracted and aligned between the gaps with this frequency range. For generating enough force to attract MWNTs, the appropriate voltage range was . Furthermore, the effect of electrode shape on the alignment of MWNTs was investigated. A single MWNT attachment was accomplished on the round shaped with 70% yield.

Electrical discharge machining (EDM) is an attractive machining technique but it requires electrically conductive ceramic materials. In this study, Alumina matrix composites reinforced with CNTs were fabricated through CNT purification, mixing, compaction and spark plasma sintering (SPS) processes. nanocomposites with the different CNT concentrations were synthesized. The mechanical and electrical characteristics of /CNTs composites were examined in order to apply the materials to the EDM process. In addition, micro-EDM using wire electrical discharge grinding (WEDG) was conducted under the various EDM parameters to investigate the machining characteristics of machined hole by Field Emission Scanning Electron Microscope (FE-SEM). The results show that /CNTs 10%Vol. was more suitable than the other materials because high conductivity and large discharge energy caused violent sparks resulting in bad machining accuracy and surface quality.

To satisfy the demand of higher cutting performance, mechanical properties with tungsten carbide (WC-Co) tool materials were investigated. Hardness and transverse rupture strength with WC grain size, Co content and density were measured. Compared to H, K, and S manufacture maker as tungsten carbide (WC-Co) tool materials were used for high-speed machining of end-milling operation. The three tungsten carbide (WC-Co) tool materials were evaluated by cutting of STD 11 cold-worked die steel (HRC25) under high-speed cutting condition. Also, tool life was obtained from measuring flank wear by CCD wear measuring system. Tool dynamometer was used to measure cutting force. The cutting force and tool wear are discussed along with tool material characteristics. Consequently, the end-mill of K, H manufacture maker showed higher wear-resistance due to its higher hardness, while the S maker endmill tool showed better performance for high metal removal.

Titanium dioxide was prepared by Polymer Complex Solution Method(PCSM) according to the mole ratio of Titanium (IV) isopropoxide(TTIP)/solvent and polymer(Poly Ethylene Glycol). Polymer electrolytes were usually made by dispersing preproduced ceramic nanoparticles in a polymer matrix. Using this method, pure and nano-sized powder was synthesized through a simple procedure and polymer entrapment route. At the optimum amount of the polymer, the titanium ions are dispersed in solution and a homogeneous polymeric network is formed. The maximum intensity of anatase phase of was achieved by calcining at for 2h. The synthesized powders were nano-sized and the average size was about 50nm. Anatase/Rutile ratio of the synthesized was 70%/30%

Ag doped Hydroxyapatite powder in nano-scale was successfully synthesized either by co-precipitation or by ion exchange route. The fabricated powder was successfully dispersed through freeze drying due to the prevention of secondary particles. The antimicrobial effects of nano-HAp against E.coli was superior to micron ones not only in its strength but also in duration.