Multilayer ceramic capacitor (MLCC) miniaturization has increased the demand for superfine powder due to its thin dielectric layer. Hydrothermally synthesized powder a pseudo-cubic phase resulting in poor dielectric properties due to size effect and hydroxyl ion inclusion in the lattice. We attempted a superfine (lower than 100 nm) highly tetragonal powder via a solvothermal method without precipitating agent. The lattice parameters and the relative amounts of tetragonal and cubic phases were determined using Rietveld refinement.