Magnetostrictive actuator is fabricated with powder nano bonding method instead of sputtering method. Fabrication process and experimental measurement method for magneto-mechanical characteristics is proposed. For the design of highly flexible magnetostrictive actuator, TbDyFe nano powder bonding with Teflon substrate is adopted. The fabrication process for Teflon substrate and nano powder bonding is suggested and magnetostrictive behaviors are investigated. Variable magnetic field is applied to measure the magnetostrictive characteristics and magnetostriction is measured with different waves and different magnitude of magnetic field.

In this study, TbDyFe thin films with the thickness of 1000 Å are fabricated by DC magnetron sputtering. TbDyFe thin films are prepared by DC magnetron sputtering method. The pressure of Ar gas below 1.33 kPa and DC input power of 200 W are used for the sputtering conditions. During sputtering process the substrate holder is heated up to 150 ℃. The thin films are deposited to a thickness of 1000 Å on polyimide substrate with a thickness of 2 μm. The fabricated microstructures are observed by X-ray diffraction (XRD) and the film thickness is measured. Magnetostrictions are determined from the curvature of the thin films which are measured by the optical cantilever method. The experimental results are discussed with numerical data.

Pneumatic cylinder actuators are significantly utilized for industry automatic systems in the fields of mechanical applications. We propose a novel control method for pneumatic cylinder actuator systems including stochastic friction dynamics. The proposed control mechanism is linearly composed of nominal control and auxiliary control variables. The former is designed from linear system model without friction terms by using a previous linear system theory and the latter is constructed as a function of friction estimation which is carried out by a well-known least square algorithm for reducing the control error due to random friction dynamics. We accomplish numerical simulation to demonstrate reliability of the proposed control method and conduct a comparative study to improve its superiority.

Numerical analysis of a Ni-PZT stacked piezoelectric micro actuator is investigated for the prediction of mechanical behavior as a preceding research for the manufacturing of three dimensional micro structures. Finite element method is adopted to examine the simulation of a piezoelectric actuator according to applied direction of voltage, by researching displacement characterization of piezoelectric material through piezoelectric theory. PZT-4 is selected as a piezoelectric material. And bimorph finite element modeling is employed to study the response of Ni-PZT bi-layered micro actuator under the various input voltages. The results are presented as maximum displacement values under each applied voltages. Maximum displacement of 0.71μm at 60V is obtained

Magnetostrictive actuator is fabricated with epoxy bonding method instead of sputtering method in this study. Fabrication process and experimental measurement method for magneto-mechanical characteristics is proposed. For the design of highly flexible magnetostrictive actuator, TbDyFe epoxy bonding with SU-8 substrate is adopted. The fabrication process for SU-8 substrate and the epoxy bonding is suggested and magnetostrictive behavior is investigated. Variable magnetic field is applied to measure the various magnetostrictive characteristics and magnetostriction is measured with different waves and different magnitude of magnetic field.

본 연구에서는 판형태의 압전감지기와 압전작동기가 접착되어 있는 보형태의 스마트구조물의 자유진동제어에 대한 유한요소모형화 방법을 제안한다. 압전재료의 직접압전효과와 역압전효과에 대한 구성방정식을 고려하고 변분원리를 이용하여 스마트보유한요소의 운동방정식을 유도한다. 이러한 2절점 보 유한요소근 등매개변수요소로서 Timoshenko 보이론을 기초로 한다. 따라서, 보형태의 스마트구조물을 제안하는 스마트보 유한요소에 의하여 해석함으로써 전압이 작용되는 압전작동기에 의한 구조물의 제어와 전압을 측정하는 압전감지기에 의한 구조물의 모니터링에 대한 수치적인 시뮬레이션이 가능해진다 이러한 스마트보유한요소와 Constant-gain feed back control 기법을 이용하여 압전감지기와 압전작동기를 이용한 보구조물의 자유진동제어에 대한 유한요소 모델을 제안한다