The development of high-performance metal filters is essential for maintaining ultra-clean environments in semiconductor manufacturing. In this study, cross-sealed honeycomb filters were fabricated using STS316L powder via material extrusion additive manufacturing (MEAM) for semiconductor gas filtration. The effects of filter geometry (4 or 9 channels) and sintering temperature (850°C, 950°C, or 1,050°C) on performance were examined. First, 4-channel and 9-channel filters sintered at the same temperature (950°C) exhibited similar porosities of 50.08% and 50.57%, but the 9-channel filter showed a higher pressure-drop (0.26 bar) and better filtration-efficiency (3.55 LRV) than the 4-channel filter (0.19 bar and 3.25 LRV, respectively). Second, for filters with the same geometry (4-channel) increasing the sintering temperature reduced porosity from 64.52% to 40.33%, while the pressure-drop increased from 0.13 bar to 0.22 bar and filtration-efficiency improved from 2.53 LRV to 3.51 LRV. These findings demonstrate that filter geometry and sintering temperature are key factors governing the trade-off between air permeability, pressure-drop, and filtration efficiency. This work provides insights and data for optimizing MEAM-based high-performance metal powder filter design.

The hydrogen embrittlement could lead to big damages in bolt/nut, fittings, especially, high pressure valve and high leak-proof valve and so on. Thus, special alloy, for instance, such as Monel and Inconel, is recently used to suppress the problems of hydrogen embrittlement in semiconductor facilities, FCEV(fuel cell electric vehicle) and hydrogen gas stations. The purpose of this study is to investigate the characteristics according to ratio change between drawing and extrusion of Monel material within elastic limit through numerical analysis. As the results, the possibility of plastic deformation in case of drawing was greater than that of extrusion. Consequently, the safety factor related to plastic deformation shows the results depending on the ratio change of force between drawing and extrusion.

The microstructural and mechanical properties of Al-Si alloyed powder, prepared by gas atomization fallowed by hot extrusion, were studied by optical and scanning electron microscopies, hardness and wear testing. The gas atomized Al-Si alloy powder exhibited uniformly dispersed Si particles with particle size ranging from 5 to . The hot extruded Al-Si alloy shows the average Si particle size of less than . After heat-treatment, the average particle size was increased from 2 to . Also, mechanical properties of extruded Al-Si alloy powder were analyzed before and after heat-treatment. As expected from the microstructural analysis, the heat-treated samples resulted in a decrease in the hardness and wear resistance due to Si particle growth. The friction coefficient of heat-treated Al-Si alloyed powder showed higher value tough all sliding speed. This behavior would be due to abrasive wear mechanism. As sliding speed increases, friction coefficient and depth and width of wear track increase. No significant changes occurred in the wear track shape with increased sliding speed.