High-frequency soft magnetic Ni, Fe, and Co-based thin films have been developed, typically as nanocrystals and amorphous alloys. These Ni, Fe, and Co-based thin films exhibit remarkably good frequency dependence up to high frequencies of several tens of MHz. These properties arise from the moderate magnetic anisotropy and fairly high electrical resistivity that result from the microstructural characteristics of the nanocrystalline and amorphous states. In this paper, Al-Co/AlN-Co and Al-N/AlN-Co multilayer films were deposited using two-facing-target type sputtering (TFTS). Their microstructures, magnetic and electrical properties were studied with the expectation that inserting Al-Co or Al-N as an interlayer could effectively reduce the coercive force and produce films with relatively high resistivity. A new approach is presented for the fabrication of Al-Co (Al-N)/AlN-Co multilayer films, prepared with the TFTS system. The deposited films were isothermally annealed at different temperatures and investigated for microstructure, magnetic properties and resistivity. The TFTS method used in this experiment is suitable for fabricating Al-Co(Al-N)/AlN-Co multilayer films with different layer thickness ratio (LTR). The annealing conditions, thickness of the multilayer film, and LTR can control the physical properties as well as the microstructure of the manufactured film. Magnetization and resistance increased and coercivity decreased as LTR decreased. The thin film with LTR = 0.175 exhibited high resistivity values of 2,500 μΩ-cm, magnetization of 360 emu/cm3, and coercivity of 5 Oe. Results suggests that thin films with such good resistivity and magnetization would be useful as high-density recording materials.

We have investigated the properties of thin film transistors(TFT) fabricated using zinc tin oxide(ZTO) thin films deposited via on-axis sputtering and FTS methods. ZTO thin films deposited by FTS showed lower root-mean-square(RMS) roughness and more uniformity than those deposited via on-axis sputtering. We observed enhanced electrical properties of ZTO TFT deposited via FTS. The ZTO films were deposited at room temperature via on-axis sputtering and FTS. The as-deposited ZTO films were annealed at 400 oC. The TFT using the ZTO films deposited via FTS process exhibited a high mobility of 12.91 cm2/V.s, a low swing of 0.80 V/decade, Vth of 5.78 V, and a high Ion/off ratio of 2.52 × 106.

대향타겟트형 스파터기에서 BaO-l2Fe 복합타겟트를 사용하고 50% O2+Ar 스파터가스를 사용한 반응성 프라즈마를 스펙트로스포프법으로 검진하였다. 프라즈마의 스펙트럼은 Ba, Ba+, Fe, FeO, Fe+, Ar, Ar+, O, O+의 피크로 이루어져 있었으며 타겟트로 부터 멀어짐에 따라 이온의 상대강도는 중성원소의 그것에 비하여 더 감소하였다.