Four types of metal oxide semiconductor gas sensor arrays were used to observe the aroma and spoilage odor emitted during the ripening process of plum & banana fruits. All gas sensors showed a high correlation (R=0.82~0.90) with the olfactory. The TGS 2603 sensor showed a high correlation of 0.90 between the odor generated and sensory perception of smell in the process of ripening and decaying fruits. In addition, it showed a very high correlation of 0.91 with the decay rate of the plum sample, and the significance probability through one-way ANOVA was also less than 0.05, which confirmed it as an optimal gas sensor (TGS 2603). Principal component analysis was performed using all the data. The cumulative variability was 99.54%, which could be explained only by two principal components, and the first principal component was 95.11%, which was related to the freshness of the fruit. It was analyzed as fresh fruit in the negative(-) direction and decayed fruit in the positive(+) direction.

Monitoring autocorrelated processes is prevalent in recent manufacturing environments. As a proactive control for manufacturing processes is emphasized especially in the semiconductor industry, it is natural to monitor real-time status of equipment throug

Recently, one-dimensional semiconducting nanomaterials have attracted considerable interest for their potential as building blocks for fabricating various nanodevices. Among these semiconducting nanomaterials,, SnO2 nanostructures including nanowires, nanorods, nanobelts, and nanotubes were successfully synthesized and their electrochemical properties were evaluated. Although SnO2 nanowires and nanobelts exhibit fascinating gas sensing characteristics, there are still significant difficulties in using them for device applications. The crucial problem is the alignment of the nanowires. Each nanowire should be attached on each die using arduous e-beam or photolithography, which is quite an undesirable process in terms of mass production in the current semiconductor industry. In this study, a simple process for making sensitive SnO2 nanowire-based gas sensors by using a standard semiconducting fabrication process was studied. The nanowires were aligned in-situ during nanowire synthesis by thermal CVD process and a nanowire network structure between the electrodes was obtained. The SnO2 nanowire network was floated upon the Si substrate by separating an Au catalyst between the electrodes. As the electric current is transported along the networks of the nanowires, not along the surface layer on the substrate, the gas sensitivities could be maximized in this networked and floated structure. By varying the nanowire density and the distance between the electrodes, several types of nanowire network were fabricated. The NO2 gas sensitivity was 30~200 when the NO2 concentration was 5~20ppm. The response time was ca. 30~110 sec.

This study was carried out to estimate the usefulness of metal oxide semiconductor(MOS) sensor as an odor measuring instrument. In this study, sensor output for 12 legal malodorous compounds was measured by two kinds of the marketed MOS sensor and was investigated the correlation coefficient between sensor output and odor indicators as like odor concentration, air dilution ratio. As a results, it was estimated that MOS sensor has a high use possibility as odor measuring device for the single compound analysis, as the correlation coefficient between sensor outputs and odor concentration, R2 appeared to 0.9 or more high.

The trimethylamine-sensing characteristics of ZnO based thin film semiconductors and the sensitivity enhancement by squttering conditions have been investigated to develop a new type sensor for detecting fish freshness. The sensor fabricated with a 300nm of ZnO thin film with 4 wt% Al sub(2) O sub(3) and 1 wt% TiO sub(2) exhibited the highest sensitivity of 155 at 300℃ of working temperature and to the 240 ppm TMA gas. Deposition of ZnO thin film using a RF magnetron sputter was carried out at a pressure of 10 super(-2) Torr in pure oxygen gas with an RF power of 100W. The sensor exhibited a large response to the actual gases produced by a mackerel at an early stage of decomposition.

본 연구에서는 선형가속기의 소조사면에 보다 정확한 선량계측이 가능하고, 빔 분포 영상화가 가능 계측시스템 개발을 위해 반도체화합물을 이용한 검출 센서를 제작하여 성능평가를 하였다. 센서 제작은 대면적 필름 형성을 위해 입자침전법을 이용하였다. 고에너지 X선에 대한 검출 특성은 암전류, 출력전류, 상승시간, 하강시간, 응답지연 측정을 통해 조사되었다. 측정 결과, TiO2가 혼합된 HgI2 센서가 PbI2, PbO, HgI2 보다 우수한 특성을 보였다. 선형가속기를 이용하여 선형성, 재현성 및 정확성 평가를 수행하였으며, 결과적으로 실제 임상에 적용되고 있는 선량 검출기와 감응 특성을 비교 시 재현성, 선형성 및 정확성 등에서 매우 우수한 특성을 나타내는 것을 확인할 수 있었다.

기존의 기계적인 센서들보다 높은 민감도와 선형성을 가지는 반도체 압력 센서들은 크기가 작고 일괄공정에 의해 제작될 수 있는 반도체 공정 기술로 제작되므로 다양한 산업에서 적용되고 있다. 하지만 열과 반복적인 외부 하중은 센서의 수명에 치명적인 영향을 미치고 있고, 특히 외부에서 가해지는 열은 센서를 구성하는 구조물보다 신호를 전달하는 금속 배선의 피로 수명에 지대한 영향을 미치고 있으므로 이에 대한 영향성을 분석할 수 있는 프로세스를 확립하고, 이후 다양한 재료의 반복적인 열하중에 대한 피로 수명을 Manson & Coffin식에 따라서 평가하였다. 금속 배선의 밑단에서 피로수명이 가장 낮고, 굽힘하중은 피로 수명보다는 응력분포에 큰 영향을 미치고 있다.

황섬유의 최저손실 파장영역인 1.55μm에서 고출력으로 안정하게 농작하는 광센서용 광원인 반도체 레이저를 제작하기 위하여 이론적인 해석을 수행한 후 제작하였다. 활성영역과 SCH층의 재료는 Ln1-xGaxAsyP1-y를 사용하였다. 광센서용 광원으로 사용되기 위해서는 넓은 스펙트럼 폭을 가지며, 가간섭 길이가 짧은 특성을 가지는 조건을 만족해야 한다. 따라서, 반도체 레이저에서 레이징을 억제시켜 줌으로써 넓은 스펙트럼 폭을 가지도록 설계를 하였고, 광섬유와 결합효율을 높일 수 있도록 tapered 형태의 스트라입 구조를 채택하여 마스크 패턴을 형성하였다. 또한, 레이징을 억제하기 위하여 후면에 윈도우 영역을 두었고, 측방향으로 경사각을 두어 반사도를 낮추도록 설계 및 제작하였다. 7도와 15도의 측면 경사각을 가지는 구조와 굽은 스트라입 구조를 가지는 소자를 제작하여 특성을 측정한 결과, 광센서용 광원으로서 적용이 가능한 광출력 특성과 넓은 스펙트럼 폭을 가졌다.