Al2O3-SiC ceramic composites are produced using pressureless sintering, and their plasma resistance, electrical resistance, and mechanical properties are evaluated to confirm their applicability as electrostatic-discharge-safe components for semiconductor devices. Through the addition of Mg and Y nitrate sintering aids, it is confirmed that even if SiC content exceeded 10%, complete densification is possible by pressureless sintering. By the uniform distribution of SiC, the total grain growth is suppressed to about 1 μm; thus an Al2O3-SiC sintered body with a high strength over 600 MPa is obtained. The optimum amount of SiC to satisfy all the desired properties of electrostatic-discharge-safe ceramic components is obtained by finding the correlation between the plasma resistance and the electrical resistivity as a function of SiC amount.

Rapid industrial development has led to a serious problem of pollution in the industrial sector. With the increasing social need for environmental protection, research on air pollution prevention equipment for reducing pollutants in industrial processes is actively being undertaken. The deterioration of existent, installed facilities, their increased emission rates, and the strengthening of the effluent quality standards make complying with permissible emission standards difficult. In fact, installing new electric precipitators or complementing existent facilities is inevitable. The expansion and complementation of the installed electrical precipitators have led to improvements in dust collection efficiency, shorter working times, and lower costs. Because of its easy installation and simple manufacturing process, the production method with the discharge electrode of an electric precipitator is widely used. The following conclusions were reached by classifying discharge electrodes into four types based on the production method and mutually comparing them by their dust collection efficiency. None of the four types used in this study were damaged by impact. However, we were able to confirm some strain from the compression sites of both type A and type B. Both type B and type C are expected to have greater dust collection efficiencies than the other models due to their large vibration transmissibility. Moreover, the high vibrational energy is expected to cause rapping damage during its operation. Particularly, in the case of type B, some of the strain was found at the end of the compression site. The coupling schemes of both type C and type D are out of vibration transmissibility. On the other hand, the ability to maintain straightness and solidity of the side is regarded as outstanding and stable. Type D has outstanding on-site workability, considering the presence of locking, structural stability, and work conditions. From these experiments, we determined that type C is the most ideal connection method of discharge electrode, considering its construction period of renovation. Type C is inferior to type D with regard to on-site workability. However, type C has outstanding dedusting transmission with regard to the straightness, solidity maintenance, and vibration of shearing stress.

A modern electric system located at a certain distance from the discharge may respond with unexpected sensitivity, when an electrostatic discharge (ESD) phenomenon occurs heteronomously between metallic objects. For analyzing the transient electromagnetic fields caused by ESD, two resistance formulas - Toepler and Rompe-Weizel -are introduced. The experimental result given by Wilson-Ma are used to compare which of these resistance formulas is proper.