Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NOx), and two odor gases, ammonia (NH3) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and hybridized SnO2-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

Wireless sensors are more favorable in measuring structural response compared to conventional sensors in terms of them being easier to use with no issues with cables and them being considerably cheaper. Previous tests have been conducted to analyze the performance of MEMS (Micro Electro Mechanical Systems) sensor in sinusoidal excitation tests. This paper analyzes the performance of in-built MEMS sensors in devices by comparing with an ICP sensor as the reference. Earthquake input amplitude excitation in shaking table tests was done. Results show that MEMS sensors are more accurate in measuring higher input amplitude measurements which range from 100gal to 250gal than at lower input amplitudes which range from 10gal to 50gal. This confirms the results obtained in previous sinusoidal tests. It was also seen that natural frequency results have lower error values which range from 0% to 3.92% in comparison to the response spectra results. This also confirms that in-built MEMS sensors in mobile devices are good at estimating natural frequency of structures. In addition, it was also seen that earthquake input amplitudes with more frequency contents (Gyeongju) had considerably higher error values than Pohang excitation tests which has less frequency contents.

Recently, measuring instruments for SHM of structures has been developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to the absence of triboelectric noise and elimination of the requirement of a cumbersome cable. However, the low-cost wireless MEMS sensor has high noise density and transmits the signal wirelessly, so data transmission delay occurs during measurement. Therefore, the footbridges that was previously measured by a mobile phone in 2014 was remeasured using G-Link-200, iPad and iPhone to compare their performance.

Wireless sensors are more favorable in measuring structural response compared to conventional sensors. This is because they are easier to use with no issues with cables and are considerably cheaper. There are several applications that can be used in recording and analyzing data from MEMS sensor installed on an iPhone. The Vibration App is one of the applications used and there has not been adequate research conducted in analyzing the performance of this App. This paper analyzed the performance of the Vibration App by comparing it with the performance of an ICP sensor. Results show that natural frequency results are more accurate (error less than 5%) in comparison to the amplitude results. This means that built- in MEMS sensor in smartphones are good at estimating natural frequency of structures. In addition, it was seen that the results became more accurate at higher frequencies (5.0Hz and 10.0Hz).

Recently, measuring instruments for SHM of structures has been developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to the absence of triboelectric noise and elimination of the requirement of a cumbersome cable. However, in extreme environments, the sensor may be less sensitive to temperature changes and to the distance between the sensor and data logger. This may compromise on the performance of the sensor and instrumentation. Therefore, in this paper, free vibration experiments were conducted using wireless MEMS sensors at an actual site. Measurement was assessed in time and frequency domain by changing the temperature variation at(- 8℃, - 12℃ and - 16℃) and the communication distance (20m, 40m, 60m, 80m).

Recently, measuring instruments for SHM of structures had being developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to its absence of triboelectric noise and elimination of the requirement for cumbersome cable. However, the research on the tall buildings with relatively small vibration levels is insufficient. Therefore, in this paper, we used the wireless MEMS sensor and iPad to compare and analyze the vibration measurements of three tall buildings and two towers.

Wireless MEMS sensors have common features such as wireless communication, data measurement, embedded processing, battery-based self-power, and low cost, and increased measurement effectiveness. Wireless MEMS sensors enable efficient SHM without interfering with location because there is no requirement for triboelectric noise and cumbersome cables. However, there is little research on the communication distance with sensors and data. For instance, existing researches have limited communication distance experiments in civil engineering bridges. It is also necessary to investigate the characteristics of dynamic behavior and the communication distance of architectural structures with different wireless transmission/reception environments. Therefore, in a building structure with walls and slabs instead of open spaces, MEMS sensors and data loggers were used as distance experiments where communication disturbance between the vertical slab and the horizontal wall could actually be communicated.

Recently, measuring instruments for SHM of structures had being developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to its absence of triboelectric noise and elimination of the requirement for cumbersome cable. Preliminary studies on the continuous vibration measurement of high-rise buildings using MEMS sensors have been carried out. However, the research on the low-rise buildings with relatively small vibration levels is insufficient. Therefore, in this paper, we used the wireless MEMS sensor to compare and analyze the vibration measurements of three low-rise buildings.

With increasing number construction of high-rise building which has about 40 to 60 floors there have been many kinds of problem which related with usage from vibration. To predict response acceleration, it is important to assess correct natural frequency. However, due to the noise of MEMS sensor, it is difficult to measure dynamic characteristic such as natural frequency when measuring ambient vibration using MEMS sensor within cell phone. Therefore, a comparative analysis on vibration measuring applications was performed after measuring ambient vibration of 2 skyscrappers which have height between 133.5~244.3m that are located in Seoul and Observation tower using I-jishin APP with noise reduction function of MEMS sensor in order to verify the effectiveness of low noise type vibration measurement APP.

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about 5mm×4mm and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at 70˚C for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

경사계 센서는 여러분야에서 널리 적용되고 있는 센서 중의 하나이다. 특히 건축분야에서는 초고층 건물의 수직도와 수평도를 계측하고 모니터링하는데 적용되어 왔다. 최근 미소전기기계 시스템(MEMS: Micro Electro-Mechanical System)기술의 발달로 인해 많은 센서들이 개발되었다. 본 논문에서 논하고자 하는 MEMS형 경사계는 MEMS형 가속도계를 기반으로 한다. 정지한 상태에서 가속도계로 계측되는 정적 가속도와 중력가속도 사이의 관계를 이용하면 센서에 발생하는 경사를 계측할 수 있기 때문이다. 이러한 원리 때문에 좀 더 정확하고 이점을 갖는 경사계가 개발되었다. 보 실험을 통하여서 레이저 변위계와의 차이를 검증하였다. 실험결과 무선 MEMS형 경사계 센서 시스템은 높은 정확도, 안정성, 장기모니터링에 대한 경제성을 갖는 유용한 시스템임을 확인할 수 있었다. 결론적으로 무선 MEMS형 경사계 센서 시스템은 건축분야에서 그리고 다른 여러 산업분야에서 정확하고 편리한 모니터링 시스템으로 적용될 수 있을 것으로 판단된다.

In this study, a micro gas sensor for NOx was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about 2mm×2mm. Indium oxide as a sensing material for the NOx gas was synthesized by a sol-gel process. The particle size of synthesized In2O3 was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance (Rs=Rgas/Rair), occurred at 300˚C with a value of 8.0 at 1 ppm NO2 gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the NO2 gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

본 논문에서는 소형 선박용 관성측정장치(Inertial Measurement Unit, IMU) 개발에 적합한 MEMS(Micro-Electro Mechanical System) 기반의 관성 센서 평가와 선정에 관하여 기술했다. 먼저, 오일러 공식에 기초한 관성 센서의 오차 모델과 잡음 모델을 정의하고, 앨런 분산(Allan Variance) 기법과 몬테카르로(Monte Carlo) 시뮬레이션 기법을 도입하여 관성 센서를 평가하였다. ADIS16405, SAR10Z, SAR100Grade100, LIS344ALH, ADXL103 등 다섯 가지 관성 센서에 대한 평가결과, ADIS16405의 자이로와 가속도계를 조합한 경우 오차가 가장 작게 나타났는데, 600 초 경과시 속도 오차의 표준편차가 약 160 m/s, 위치 오차의 표준편차가 약 35 km로 나타났다. 평가를 통해 ADIS16405 관성 센서가 IMU 구축에 최적임을 알았고, 이러한 오차 감소 방법에 대해서 참고문헌을 조사하여 검토하였다.