Tungsten (W) thin film was deposited at 400 oC using pulsed chemical vapor deposition (pulsed CVD); film was then evaluated as a nucleation layer for W-plug deposition at the contact, with an ultrahigh aspect ratio of about 14~15 (top opening diameter: 240~250 nm, bottom diameter: 98~100 nm) for dynamic random access memory. The deposition stage of pulsed CVD has four steps resulting in one deposition cycle: (1) Reaction of WF6 with SiH4. (2) Inert gas purge. (3) SiH4 exposure without WF6 supply. (4) Inert gas purge while conventional CVD consists of the continuous reaction of WF6 and SiH4. The pulsed CVD-W film showed better conformality at contacts compared to that of conventional CVD-W nucleation layer. It was found that resistivities of films deposited by pulsed CVD were closely related with the phases formed and with the microstructure, as characterized by the grain size. A lower contact resistance was obtained by using pulsed CVD-W film as a nucleation layer compared to that of the conventional CVD-W nucleation layer, even though the former has a higher resistivity (~100 μΩ-cm) than that of the latter (~25 μΩ-cm). The plan-view scanning electron microscopy images after focused ion beam milling showed that the lower contact resistance of the pulsed CVD-W based W-plug fill scheme was mainly due to its better plug filling capability.

[ ] oxide layer on the surface of each W(tungsten) nanopowder produced by the electric explosion of wire(EEW) process were formed during the 1vol.% air passivation process. The oxide layer hindered sintering densification of compacts during SPS process. The oxide phase was reduced to the pure W phase during SPS. The W nanopowder's compacts treated by the hydrogen reduction showed high sintered density of 94.5%. after SPS process at .

This is about the effects deoxidization, carbonization and alloying preparation on fine grain W, WC, and grade YG8 powder reduced by "yellow tungsten oxide" and "blue tungsten oxide". The result indicates that yellow tungsten has single composition and blue tungsten oxide has complex composition. With this feature, yellow tungsten oxide got better uniformity and concentration distribution on fine particle size W and WC powder than blue tungsten oxide's. The grade alloy YG8 that made of this W or WC powder has uniform alloy construction, concentrated WC grain distribution and better alloy properties.

We report a carbothermal reduction process for massive synthesis of monolithic WO phase from tungsten oxide in the presence of carbon source. Carbon black powder was used as a carbon source and added to WO by 40 weight percent. Bundles of WO rods were formed over the temperature range of 80 to 90. Pure WO bundles could be separated from the mixture of WO and residual carbon black powder. Field emission character of WO phase was determined using the extracted WO rods. Flat lamp fabricated from the WO rods showed the turn-on field of 9.3 V/