서브마이크론 설계규칙을 갖는 소자의 이층 배선 공정에서 다챔버 장비를 이용한 금속 층간절연막의 공극없는 평탄화를 위하여 PECVD와 O3 ThCVD산화막의 증착시 층덮힘성을 연구하였다. 산화막의 두께가 증가됨에 따라 변화되는 순간단차비의 개념을 도입하여 공극형성의 개시점을 예측할 수 있는 관계식을 모델링하였고, 금속배선간격의 초기 단차비가 다양한 패턴에서 산화막의 두께에 따른 순간 단차비의 변화를 조사하였다. 모델링 검정결과 5˚이하의 re-entrant각을 갖는 TEOS에 의한 PECVO 산화막의 순간단차비가 모델링에 잘 일치하였다. 공극없는 평탄화는 제1층의 PECVD 산화막의 순간 단차비를 0.8이하로 유지하거나 Ar sputter식각을 통하여 산화막의 모서리에 경사를 준후 층덮힘성이 우수한 O3 ThCVD산화막을 증착함으로써 가능하였다. O3 ThCVD산화막의 etchback이 non etchback공정에 비하여 via접쪽저항체인에서 높은 수율을 보였으며, via접촉저항은 0.1~0.3Ω/μm2로 나타났다.

dlm mutants controlling disease lesion mimic leaf trait may be useful in basic research of disease hypersensitive response and programmed cell death in soybean. The study on genetic relationship between dlm trait and other morphological C trait, position of dlm allele on classical linkage group, and a molecular marker linked to dlm allele was little reported. Two populations [T173 (ffDlmDlm) x T363 (FFdlmdlm), T363 (dlmdlmY9Y9) x T135 (DlmDlmy9y9)] were made to find independent assortment or linkage between dlm locus and f locus or between dlm locus and y9 locus. The segregation ratios of 3 : 1 were observed in the F2 population and the Chi-square values suggested that the disease lesion mimic leaf, fasciation stem, and chlorophyll-deficient leaf traits were controlled by a single recessive gene. Segregation ratios of 78 Dlm_F_: 19 Dlm_ff: 17 dlmdlmF_ : 3 dlmdlmff based on F2 phenotype showed that dlm allele was inherited independently with the f allele controlling fasciation stem trait in soybean. Also, segregation ratios of from 149 Dlm_Y9_: 41 Dlm_y9y9: 38 dlmdlmY9_ : 5 dlmdlmy9y9 based on F2 phenotype confirmed that dlm allele was inherited independently with the y9 allele controlling chlorophyll- deficient leaf trait in soybean. From these results, dlm allele would not be located on linkage group 11 (molecular linkage group: D1b+W) and linkage group 14 (molecular linkage group: E) in soybean. This results will helpful to attempt to position the Dlm locus on the soybean molecular linkage map.

dlm allele controlling disease lesion mimic trait is useful in basic research aimed at better understanding disease hypersensitive response and programmed cell death in soybean. Inheritance between dlm trait and any morphological trait, position of dlm allele on classical linkage group, molecular marker linked to dlm allele were not reported. Two populations [T255 (lf2lf2DlmDlm) x T363 (Lf2Lf2dlmdlm), T363 (dlmdlmp1p1) x T43 (DlmDlmP1P1)] were made to find independent assortment or linkage between dlm locus and lf2 or between dlm locus and P1 locus. The segregation ratios of 3 : 1 were observed in the F2 population and the Chi-square values strongly suggested that the disease lesion mimic and seven-leaflet trait was controlled by a single recessive gene. Glabrousness trait was controlled by a single dominant gene. Segregation ratios of 48 Lf2_Dlm_: 30 Lf2_dlmdlm: 21 lf2f2Dlm_ : 8 lf2lf2dlmdlm based on F2 phenotype showed that dlm allele was inherited independently with the lf2 allele controlling seven-leaflet trait in soybean. However, more F2 plants will be needed to confirm this result. Also, segregation ratios of 137 P1_Dlm_: 46 P1_dlmdlm: 49 p1p1Dlm_ : 16 p1p1dlmdlm from F2 phenotype confirmed strongly that dlm allele was inherited independently with the P1 allele controlling glabrous trait in soybean. This results indicate that dlm allele will not located in soybean classical linkage group 2 (molecular linkage group K) and soybean classical linkage group 16. This observation will helpful to attempt to position the Dlm locus on the soybean molecular linkage map.