We fabricated YBCO film using a TFA-MOD method. In order to enhance the reaction kinetics and to control the formation of the second phases, and powders were used as precursors (the so called "211 process"). The films were calcined at and then fired at in a 12.1% humidified atmosphere. We found that the microstructure varied significantly with the firing temperature. The textures of all of the films were similar and mainly biaxial. For the film fired at , the critical current was obtained to be 39 A/cm-width (corresponding critical current density is 2.0 MA/).