WNx 는 리소그라피 마스크의 흡수체나 VLSI 기술에서 금속연결의 확산방지재로써 주목을 받고 있다. RF마르네트론 스퍼터링법으로 여러 증착변수에서 제조한 WNx 막을 고찰하였다. SiNx 멤브레인 위에 증착된 박막의 결정구조는 질소아르곤 가스유량비(0-30%), 가스압력(10-43mTorr), RF출력(0150W)및 기판과 타겟사이의 거리 6cm에서 증착한 WNx 박막은 비정질이였으며 다른 조건에서는 표면이 거친 다결정질이었다. 비정질 박막은 rms가 3.1Å으로 아주 매끈하여 X-선 마스크용 흡착제로써 적합할 것으로 기대된다.

본 연구에서는 석영을 기판으로 사용하여 텅스텐 실리사이드 게이트를 고온에서 결정화시키고, 이? 발생되는 crack 에 대한 생성원인을 조사하였다. 증착된 텅스텐실리사이드의 실리콘 조성과 실리콘 완층충의 두께가 증가함에 따라 열응력이 감소하는 경향이 관찰되었으며, 과잉의 실리콘 조성을 가진 실리사이드를 열처리한 경우에는 crack에 대한 저항이 증가함을 알 수 있었다. 그러나 실리콘 완충층을 사용한 경우는 두께가 증가함에 따라 열응력이 감소하는 경향이 있으나, crack이 보다 쉽게 발생되는 결과를 얻었다. 이는 실리사이드 반응에 의하여 거칠어진 계면에 응력이 집중되어 crack생성을 쉽게하는 것으로 여겨진다. 결과적으로 석영과 텅스텐실리사이드의 열?창계수차이에 의하여 생성되는 열응력이 crack생성의 주원인으로 작용하고, 실리콘 완층층을 사용한 구조하에서는 계면에서 일어나는 실리사이드반응이 crack생성에 큰 영향을 미치는 것으로 생각된다.

During sintering of very porous green bodies, as obtained by compaction of hard powders - such as tungsten carbide or ceramics - or by injection moulding, important shrinkage occurs. Due to heterogeneous green density field, gravity effects, friction on the support, thermal gradients, etc., this shrinkage is often non-uniform, which' may induce significant shape changes. As the ratio of compact dimension to powder size is very high, the mechanics of continuum is relevant to model such phenomena. Thus numerical techniques, such as the finite element method can be used to simulate the sintering process and predict the final shape of the sintered part. Such type of simulation has much been developed in the last decade firstly for hot isostatic pressing and next for die compaction. Finite element modelling has been recently applied to free sintering. The simulation of sintering should be based on constitutive equations describing the thermo-mechanical behaviour of the material under any state of stress and any temperature which may arise within the sintering body. These equations can be drawn either from experimental data or from micromechanical models. The experiments usually consist in free sintering and sinter-forging tests. Indeed applying more complex loading conditions at high temperature under controlled atmosphere is delicate. Micromechanical models describe the constitutive behaviour of aggregates of spheres from the deformation of two-sphere contact either by viscous flow or grain boundary diffusion. Such models are not able to describe complex microstructure and mechanisms as observed in real materials but they can give some basic information on the formulation of constitutive equations. Practically both experimental and theoretical approaches can be coupled to identify the constitutive equations. Such procedure has been performed for modelling the sintering of compacts obtained by die pressing of a mixture of tungsten carbide and cobalt powders. The constitutive behaviour of this material during sintering has been described by a linear viscous constitutive model, whose functions have been fitted from results of free sintering and sinter-forging experiments. This model has next been introduced in ABAQUS finite element code to simulate the sintering of heterogeneous green compacts of various geometries at constant temperature. Examples of simulations are shown and compared with experiments.

Liquid phase sintering of 90W-6Ni-4Mn alloy has been investigated as functions of sintering atmosphere, heating rate, and reduction temperature. The present work accounts for the thermodynamic oxidatiodreduction reactions of constituent powders of W, Ni and Mn. By discounting these reactions, the previous investigations would obtain only the alloy with large pores and the lowered relative sintered density, by the liquid phase sintering under a dry hydrogen atmosphere. the sintering cycle consisted of a rapid heating to reduction temperatures under high purity nitrogen atmosphere, and holding for 4 hours and sintering at for 1 hour under a dry hydrogen gas. The relative density of the sintered alloy increased with increasing heating rate. As the reduction temperature increased, the relative density increased to the lm theotical density at the duction temture above . The mimsturcatre of sintered alloys has been analysed by a scanning election microscope. The sintered density was compared with those obtained from the other investigators. It was found that the reduction results in the lowered densification of 90W-6Ni-4Mn alloy. This is caused by the fact that reducing reactions of W and Ni oxides contained in W an Ni powders concomitantly leads to oxidizing reaction of Mn powder the oxidized Mn is hardly reduced at sintering temperature and thereby remains large pores in the alloy. It is concluded that the W-Ni-Mn alloy with full density can be obtained by the precise control of atmosphere, heating rate, and sintering temperature.

The mechanism of activated sintering of tungsten powder was discussed in terms of diffusion and segregation of activator atoms at W grain boundaries. Shrinkage behaviours of W-0.2wt.% Ni, W-0.2wt.% Cu or pure W powder compacts during sintering at low temperatures of 900~ were investigated. It was found that the Cu additive inhibits sintering process causing lower densification than pure W compact while remarkable shrinkage occurred in the Ni added W powder. Such contrary effect was explained by comparing self diffusion processes along Ni or Cu segregated W boundaries in which Ni segregants enhance but Cu atoms retard the migration of W atoms at W boundaries.