목적: 본 연구는 실명을 유발하는 3대 주요 안질환의 연도별 유병률 추이를 관찰하고, 이들 질환의 인지율과 치 료율 비교와 관련 요인을 분석하고자 하였다. 방법: 질병관리청 국민건강영양조사 제8기(2019~2021년도) 조사에 참여한 대상자 중 만 40세 이상인 성인들을 대상으로 녹내장, 황반변성, 당뇨병성 망막병증의 유병률, 인지율과 치료율을 연도별로 비교하고 일반적 특성을 분 석하였다. 결과: 3대 주요 안질환의 연도별 추이를 보면 녹내장의 유병률은 매년 일정한 추이를 보이지만 당뇨망막병증의 유병률은 당뇨병 유병율과 함께 해마다 증가하고 있다. 연도별 인지율과 치료율은 다른 질환에 비해 녹내장이 높은 편이었으며, 황반변성의 인지율이 상당히 낮게 나타났다. 녹내장과 황반변성은 나이가 주요한 변수였으며, 황반변 성은 교육수준이 높아질수록 인지율과 치료율이 유의하게 높아지는 것으로 나타났다. 한편 당뇨병성 망막증의 경 우, 알코올 섭취는 인지율과 치료율을 감소시키는 것으로 나타났다. 결론: 본 연구를 통해 3대 주요 안질환의 인지율과 치료율에 대한 차이를 비교할 수 있었으며, 치료율에 미치는 다양한 요인 또한 확인할 수 있었다.

In this study, the effect of Distribution efficiency through the fishery production base distribution center (FPC) on the production site board facility was studied. FPC is a new distribution system for Korean fishery products that has been promoted in earnest since 2012, and in this study, the effect before and after the introduction of FPC was analyzed using the DID (Difference in Difference) model for the effect of FPC in the fishery industry. The results of analysis shows that in the case of Wando Geumil FPC, the volume and unit price of consignment sales decreased during the analysis period, which was statistically significant. In the case of Sokcho FPC, the volume of consignment sales decreased during the analysis period, which was statistically insignificant. But the unit price of consignment sales rose during the analysis period, which was statistically significant. In the case of Gyeongju FPC, the volume of consignment sales increased during the analysis period, which was statistically significant at the 90% confidence level. But the unit price of consignment sales fell during the analysis period, which was statistically significant.

This study explores the impact of metal doping on the surface structure of spent nuclear fuels (SNFs), particularly uranium dioxide (UO2). SNFs undergo significant microstructural changes during irradiation, affecting their physical and chemical properties. Certain elements, including actinides and lanthanides, can integrate into the UO2 lattice, leading to non-stoichiometry based on their oxidation state and environmental conditions. These modifications are closely linked to phenomena like corrosion and oxidation of UO2, making it essential to thoroughly characterize SNFs influenced by specific element doping for disposal or interim storage decisions. The research employs X-ray diffraction (XRD), scanning electron microscopy (SEM), and Raman spectroscopy to investigate the surface structure of UO2 samples doped with elements such as Nd3+, Gd3+, Zr4+, Th4+, and ε-particles (Mo, Ru, Pd). To manufacture these samples, UO2 powders are mixed and pelletized with the respective dopant oxide powders. The resulting pellet samples are sintered under specific conditions. The XRD analysis reveals that the lattice parameters of (U,Nd)O2, (U,Gd)O2, (U,Zr)O2, and (U,Th)O2 linearly vary with increasing doping levels, suggesting the formation of solid solutions. SEM images show that the grain size decreases with higher doping levels in (U,Gd)O2, (U,Nd)O2, and (U,Zr)O2, while the change is less pronounced in (U,Th)O2. Raman spectroscopy uncovers that U0.9Gd0.1O2-x and U0.9Nd0.1O2-x exhibit defect structures related to oxygen vacancies, induced by trivalent elements replacing U4+, distorting the UO2 lattice. In contrast, U0.9Zr0.1O2 shows no oxygen vacancy-related defects but features a distinct peak, likely indicating the formation of a ZrO8-type complex within the UO2 lattice. ε-Particle doped uranium dioxide shows minimal deviations in surface properties compared to pure UO2. This structural characterization of metal-doped and ε-particle-doped UO2 enhances our understanding of spent nuclear fuel behavior, with implications for the characterization of radioactive materials. This research provides valuable insights into how specific element doping affects the properties of SNFs, which is crucial for managing and disposing of these materials safely.

Most of the C-14 produced is in the organic form, generated as methane (14CH4), methanol (14CH3OH), formaldehyde (14CH2O), and formic acid (14CO2H2). When analyzing C-14, it is transformed into the form of 14CO2, and its concentration is determined using LSC. Typical examples include the wet oxidation method, the combustion or Pyrolysis. The wet oxidation method uses strong acids and involves repeated operations, which generates large amounts of acid waste and secondary radioactive waste. The combustion method uses high temperatures, which requires an oxygen device. Pyrolysis also requires high temperature in a vacuum and catalysts. Catalysts are expensive because they are platinum-based. To compensate for these shortcomings, a C-14 analysis method using UV irradiation was developed. In this study, 100 mL of distilled water mixed with formic acid (CO2H2), potassium persulfate (K2S2O8), and silver nitrate (AgNO3) was irradiated with a 320-390 nm UV lamp to conduct a CO2 production reaction experiment. The UV range was measured using a photometer (UV Power puck II). The beaker was made of quartz in 150 mL size with three inlets : a temperature measurement, a sample inlet, and a collection tube connector. We changed the UV lamp used from a 450 W halogen lamp to a 100 W LED, which has a lower temperature and is safer. As a result of the experiment, CO2 bubbles were generated in the collection tube, due to the UV irradiation react, which uses oxidizer and catalysts. The maximum temperature of the solution irradiated with the LED UV lamp was less than 56°C. It confirmed the rate of bubble generation changed depending on the lamp distance, the amount of sample, oxidizer, and catalyst. In an experiment to confirm the reaction caused by heat, it was found that although a reaction occurred due to heat, the reaction was significantly lower than when using a UV lamp. The reproducibility experiment was conducted three times in total under the same conditions. It showed the same pattern. In the future, we plan to select mock samples, collect 14CO2 in Carbo- Sorb, and analyze them using LSC. The results of this research will be used as a technology to recover C-14 more safely and efficiently and will also be used to expand its application to the treatment of other wastes such as waste liquid and waste resin through simulated samples.

Bis (2-ethylhexyl)phosphoric acid (HDEHP) is a renowned extractant, favored for its affinity to selectively remove uranium via its P=O groups. We previously synthesized HDEHP-functionalized mesoporous silica microspheres for solid-phase uranium adsorption. Herein, we investigated the kinetic and isothermal behavior of uranyl ion adsorption in mesoporous silica microspheres functionalized with phosphate groups. Adsorption experiments were conducted by equilibrating 20 mg of silica samples with 50 mL of uranium solutions, with concentrations ranging from 10 to 100 mgU L−1 for isotherms and 100 mgU L−1 for kinetics. Three distinct samples were prepared with varying HDEHP to TEOS molar ratios (x = 0.16 and 0.24) and underwent hydrothermal treatment at different temperatures, resulting in distinct textural properties. Contact times spanned from 1 to 120 hours. For x = 0.16 samples, it took around 50 and 11 hours to reach equilibrium for the hydrothermally treated samples at 343 K and 373 K, respectively. Adsorbed quantities were similar (99 and 101 mg g-1, respectively), indicating consistent functional group content. This suggests that the key factor influencing uranium adsorption kinetics is pore size of the silica. The sample treated at 373 K, with a larger pore size (22.7 nm) compared to 343 K (11.5 nm), experienced less steric hindrance, allowing uranium species to diffuse more easily through the mesopores. The data confirmed the excellent fit of pseudo-second-order kinetic model (R2 > 0.999) and closely matched the experimental value, suggesting that chemisorption governs the rate-controlling step. To gain further insights into uranium adsorption behavior, we conducted an adsorption isotherm analysis at various initial concentrations under a constant pH of 4. Both the Langmuir and Freundlich isotherm models were applied, with the Langmuir model providing a superior fit. The relatively high R2 value indicated its effectiveness in describing the adsorption process, suggesting homogenous sorbate adsorption on an energetically uniform adsorbent surface via a monolayer adsorption and constant adsorption site density, without any interaction between adsorbates on adjacent sites. Remarkably, differences in surface area did not significantly impact uranium removal efficiency. This observation strongly suggests that the adsorption capacity is primarily governed by the loading amount of HDEHP and the inner-sphere complexation with the phosphoryl group (O=P). Our silica composite exhibited an impressive adsorption capacity of 133 mg g-1, surpassing the results reported in the majority of other silica literature.

Bisphenol-A, also known as BPA, is commonly used as a building block for epoxy and polycarbonate plastics. However, it has been recently identified as a major source of water pollution due to its release into the water from plastic products. BPA-based resins can also contaminate the water with high concentrations of BPA, which can enter the water bodies through production units and wastewater discharge. Photocatalysis, particularly the photo-Fenton process, is an effective method for wastewater treatment and degrading pollutants. Titanium dioxide (TiO2) is usually chosen based on its high photocatalytic properties and high performance. However, its wide band gap energy is a major issue for the photocatalytic process. This means that the catalyst can only exhibit high photocatalytic performance under UV-light irradiation and usually requires an acidic pH, which limits its use. In order to address the aforementioned issues, a visible-light photoactive photo-Fenton reaction has been successfully developed to degrade bisphenol A at natural pH using H2O2. The process was highly efficient, achieving complete degradation of phenol in just three hours of visible light irradiation with Cu-MOF. This environmentally friendly Fenton process has the advantage of occurring at natural pH levels with the presence of H2O2, providing a new perspective for efficient degradation. The photocatalyst was characterized using single X-ray diffraction (SC-XRD), powder X-ray diffraction (PXRD), Fourier Transform Infrared Spectroscopy (FTIR), and UV–vis diffuse reflectance spectroscopy (DRS).

The density of molten salts is the most important property in the development of molten salt reactor (MSR). The density value measured through the experiment is also very valuable as a gold standard for the validation of the prediction models based on molecular dynamics or other computational methods. To the best of our knowledge, the experimental density data of the ternary NaCl-MgCl2- UCl3 salt system as a MSR candidate fuel salt have never been reported previously. In this study, density measurement experiment of high-temperature molten salt of NaCl-MgCl2 and NaCl-MgCl2- UCl3 was conducted using a previously-developed density measurement system based on the maximum bubble pressure (MPB) method. As a result of the experiment, the density value of 62NaCl- 18MgCl2-20UCl3 molten salt at 873 K was 2.62 g/cm3. A density prediction value of 2.65 g/cm3 at 873 K was derived from the obtained results based on the rule of additivity of molar volume method. The predictred density of 62NaCl-18MgCl2-20UCl3 was consistent with the experimental value within 1%. The density measuring system used in this study is promising for the validation of other multicomponent molten salt systems.

Viscosity of molten salts is an essential property for the thermal hydraulic design and evaluation of molten salt reactor (MSR). Therefore, viscosity data is one of the fundamental physical property data required for safe process operation and countermeasures to severe accidents. In this study, based on our experience of developing a viscosity measurement system for high-temperature LiCl-KCl molten salt system, the viscosity of NaCl-MgCl2 and NaCl-MgCl2-UCl3 molten salts, which are considered promising salts in MSR, was measured. In order to investigate the physical properties of uranium in high-temperature NaCl-MgCl2 molten salt, a viscometer system for high-temperature viscosity measurement was specially designed. As a result of the measurement, the viscosity of the 58NaCl- 42MgCl2 molten salt was 2.73 cP at 838 K, 2.15 cP at 889 K, and 1.68 cP at 940 K. And the viscosity of 73NaCl-21MgCl2-6UCl3 molten salt was 3.79 cP at 877 K, 3.58 cP at 897 K, and 1.63 cP at 941 K. The repeatability of the measurement showed a precision of less than 3%. Although sufficientlyverified starting materials were not used, viscosity data were reported for the first time for NaCl- MgCl2-UCl3 molten salts.

Confirmation of the thermal behavior of spent fuel is one of the important points in the management of high-level radioactive waste. This is because various fission products exist in spent nuclear fuel, and a management plan according to their behavior is required. Among the fission products, epsilon particles exist in the form of metal deposits and have a great influence on their physical and chemical properties. However, observing the thermal behavior of epsilon particles is important for understanding spent fuel behavior in thermally environment, but it is difficult to maintain a consistent thermal environment. In this work, we report the thermal behaviors study of uranium oxide with epsilon particle using in situ high temperature X-ray diffraction. We measured the variation of temperature on the size of crystalline, which is a cell parameter in the reaction process. And then, the change of lattice parameters is calculated by Rietveld refinement.

Solubility and species distributions of radionuclides in domestic groundwater conditions are required for the safety assessment of deep underground disposal system of spent nuclear fuel (SNF). Minor actinides including Am contribute significant extents to the long-term radiotoxicity of SNF. In this study, the solubility of Am was evaluated in synthetic groundwater (Syn-DB3), which were simulated for the groundwater of the DB3 site in the KAERI Underground Research Tunnel (KURT). Geochemical modeling was performed based on the ThermoChimie_11a (2022) thermochemical database from Andra to estimate the solubility and species distributions of Am in the Syn-DB3 condition. Dissolved Am concentrations in the Syn-DB3 were experimentally measured under oversaturation conditions. Am(III) stock solution in perchlorate media was sequentially diluted in Syn-DB3 to prepare 8 μM Am(III) in Syn-DB3. The pH of the solutions was adjusted to be in the range of 6.4–10.5. A portion of the samples was transferred to quartz cells for UV-Vis absorption and time-resolved laser fluorescence spectroscopy studies and the rest were stored in centrifuge tubes. The absorption spectra of the samples were monitored over 70 days and the results suggest that Am colloidal particles were formed initially in all the samples and precipitated rapidly within two days. Over the experimental period of 236 days, small volume (10 μL) of the samples in the centrifuge tubes were periodically withdrawn after centrifugation (18000 rpm, 1 hr) for the liquid scintillation counting to measure the concentrations of Am dissolved in Syn-DB3. In the end of the experiments, pH of the samples was checked again and the final dissolved Am concentrations were determined after ultrafiltration (10 kDa) to exclude the contribution of colloidal particles. In the pH range of 8-9, which is relevant to the KURT-DB3 groundwater condition, the measured dissolved Am(III) concentrations were converged to around 10-8 M. These values are higher than the solubility of AmCO3OH:0.5H2O(s), but lower than that of AmCO3OH(am). There was no indication of transformation of the amorphous phase to the crystalline phase in our observation time window.

Molten salts have gained significant attention as a potential medium for heat transfer or energy storage and as liquid nuclear fuel, owing to their superior thermal properties. Various fluoride- and chloride-based salts are being explored as potential liquid fuels for several types of molten salt reactors (MSRs). Among these, chloride-based salts have recently received attention in MSR development due to their high solubility in actinides, which has the potential to increase fuel burnup and reduce nuclear water production. Accurate knowledge of the thermal physical properties of molten salts, such as density, viscosity, thermal conductivity, and heat capacity, is critical for the design, licensing, and operation of MSRs. Various experimental techniques have been used to determine the thermal properties of molten salts, and more recently, computational methods such as molecular dynamics simulations have also been utilized to predict these properties. However, information on the thermal physical properties of salts containing actinides is still limited and unreliable. In this study, we analyzed the available thermal physical property database of chloride salts to develop accurate models and simulations that can predict the behavior of molten salts under various operating conditions. Furthermore, we conducted experiments to improve our understanding of the behavior of molten salts. The results of this study are expected to contribute to the development of safer and more efficient MSRs.

Disposal of radioactive waste requires radiological characterization. Carbon-14 (C-14) is a volatile radionuclide with a long half-life, and it is one of the important radionuclides in a radioactive waste management. For the accurate liquid scintillation counter (LSC) analysis of a pure beta-emitting C-14, it should be separated from other beta emitters after extracted from the radioactive wastes since the LSC spectrum signals from C-14 overlaps with those from other beta-emitting nuclides in the extracted solutions. There have been three representative separation methods for the analysis of volatile C-14 such as acid digestion, wet oxidation, and pyrolysis. Each method has its own pros and cons. For example, the acid digestion method is easily accessible, but it involves the use of strong acids and generates large amount of secondary wastes. Moreover, it requires additional time-consuming purification steps and the skillful operators. In this study, more efficient and environment-friendly C-14 analysis method was suggested by adopting the photochemical reactions via in-situ decomposition using UV light source. As an initial step for the demonstration of the feasibility of the proposed method, instead of using radioactive C-14 standards, non-radioactive inorganic and organic standards were investigated to evaluate the recovery of carbon as a preliminary study. These standards were oxidized with chemical oxidants such as H2O2 or K2S2O8 under UV irradiations, and the generated CO2 was collected in Carbo-Sorb E solution. Recovery yield of carbon was measured based on the gravimetric method. As an advanced oxidation process, our photocatalytic oxidation will be promising as a time-saving method with less secondary wastes for the quantitative C-14 analysis in low-level radioactive wastes.

In this study, we evaluated the performance of phosphate-functionalized silica in adsorbing uranium and provided insights into optimizing the initial conditions of the uranium solution (concentration and pH), which are often overlooked in uranium adsorption studies. While most studies take into account the effect of pH on both the surface charge of the adsorbents and the dissolved speciation of uranium in solution, they often overlook the formation of solid phases such as β-UO2(OH)2 (cr) and UO3· 2H2O(cr), leading to an overestimation of the adsorption capacity. To address this issue, we considered the speciation of U(VI) calculated using thermodynamic data. Our findings suggest that it is reasonable to evaluate the adsorption performance at pH 4 and concentration below 1.35 mM. The formation of β-UO2(OH)2 (cr) starts at 23 μM (pH 5) and 1 μM (pH 6) and increases sharply with increasing concentration. To avoid interference from the formation of solid phases, experiments should be conducted at lower concentrations, which in turn require very small msorbent/Vsolution ratios. However, controlling small amounts of sorbent can be challenging, and increasing the volume of the solution can generate significant amounts of radioactive waste. We also used UV-vis spectra analysis to investigate the formation of solid phases. We found that a 100 mg L-1 uranium solution resulted in the formation of colloidal particles in the solid phase after 2.5 hours at pH 6, while at pH 4, no significant changes in absorbance were observed over 120 hours, indicating a stable ion phase. Based on these conditions, we obtained an excellent adsorption capacity of 110 mg g-1.

The removal of aqueous pollutants, including dye molecules from wastewater remains one of the pressing problems in the world. Because of chemical stability and conjugated structure, dye molecules cannot be easy decomposed by heat with oxidizing reagents such as H2O2 and light. The most common representative of widespread organic pollutant is methylene blue (MB) with molecular formula C16H18ClN3S, which is important colorant and used in various chemical and biological production industries and causes serious environment problems. Porous materials, including MOFs (metal-organic frameworks) have been applied for efficient MB photocatalytic degradation. However, one of the main barriers to using most MOFs to break down aromatic organics is wide band gap energy, which means that the catalyst can exhibit high photocatalytic performance only under UVlight irradiation. Moreover, most MOFs usually show the poor water stability of frameworks, which tend to dissolve in water with total destruction. In this work we report about two new copper based MOFs with high photocatalytic properties for efficient MB degradation from wastewater under UV-light and natural sunlight. Time, required for 100% MB degradation, equals 7 minutes under UV (source 4 W 254 nm VL-4.LC UV-lamp) and 60 minutes under natural sunlight irradiation in the presence of H2O2. Crystal structure information is provided using single crystal X-ray diffraction data. The composition and comparative characteristics of MOFs are given using powder X-ray diffraction, UV–visible diffuse reflectance spectroscopy, UVvisible spectroscopy and Fourier-transform infrared spectroscopy.

Hydrogen-bonded organic frameworks (HOFs) are a new type of porous crystalline material that are constructed by intermolecular hydrogen bonding of organic building blocks to form twodimensional (2D) and three-dimensional (3D) crystalline networks. High-quality HOF single crystals are easily grown for direct superstructure analysis using single crystal X-ray diffraction, which is essential for revealing the relationship between structure and properties. The unique advantages of HOF, such as high crystallinity, porosity and fast regeneration, have allowed it to be used in a variety of applications including catalysis and gas separation. Squaric acid (SQA) is a non-carboxylic, organic acid with proton donor and acceptor ability which is known to take on a variety of coordination modes with metal ions. Pyrazine is a six-membered aromatic heterocycle bearing two nitrogen atoms, which has sp2 hybridized C atoms with C-H hydrogen bonds. This work describes the synthesis and structural characteristics of HOF based on squaric acid and pyrazine. Based on single crystal X-ray diffraction data, this MOF crystallizes in the triclinic P-1 space group. Each asymmetric unit is composed of H2SQ and pyrazine. All squaric acid molecules share one H atom with the N atom of pyrazine molecules. The layer distance between nearby O atoms from squaric acid in different layers equals 5.29 Å. Also, our HOF showed high adsorption capacity the during experiments. The composition and comparative characteristics of HOF are given using SCXRD, PXRD, SEM and UV-vis.

Viscosity is a fundamental physical property that is important in any system in which fluid movement occurs. In addition, most of the elements exist as ions in molten state in high-temperature molten salt, and electrical conductivity in such molten state is closely related to viscosity as a transport property. Molten salt reactor (MSR) and pyroprocess are representative processes dealing with high-temperature molten salts, actinide elements, and other radioactive materials. In MSR and pyroprocesses, the viscosity data must be provided as one of the fundamental physical property data required for safe process operations and countermeasures to severe accidents. In order to measure the viscosity of highly corrosive molten salt at high temperatures, we have built a in-house developed molten salt viscosity measurement system based on the Brookfield rotationary viscometer. We also developed a special correction technique to improve the accuracy of the viscosity measurement. In this study, the viscosity was measured at 500°C for NaCl-MgCl2 molten salt, which is selected as the base salt material of MSR system under development in Korea Atomic Energy Research Institute (KAERI), using our viscosity measurement system installed in a oxygen- and moisture-free Ar-atmosphere glovebox. Our viscosity measurement system was calibrated using a LiCl-KCl eutectic mixture with well-known viscosity value, and viscosity values obtained using our own correction methodology were compared with those of other conventional correction methods. In our further study, we plan to measure the NaCl-MgCl2-UCl3 system at various compositions and temperatures.

Anderson-type polyoxometalate (POM) with general formula of [Hy(XO6)M6O18]n- (y=0-6, n=2-8, M=addenda atom, X=heteroatom) represents one of the basic topological structures among POM-type family. Anderson-type POMs have a planar arrangement and two terminal oxygen atoms attached to each addenda metal atom unlike other type. Thus, the Anderson-type POMs have high reactivity and various coordination modes. The various multifunctional organic-inorganic hybrid materials can be synthesized using the Anderson-type POMs as an inorganic building block. Another important feature of the Anderson-type POMs is the incorporation of the heteroatoms with various sizes and oxidation states, which can lead to tune chemical properties. No Anderson-type POMs with early transition metal ions in the heteroatom site have been reported previously. Recently, we reported the synthesis of titanium-containing Anderson-type POM, Na2K6Ti0.92W6.08O24∙12H2O (Ti-POM), which consists of pure inorganic framework built from a central Ti atom surrounded by six WO6 inorganic scaffold. Herein, in-depth studies were conducted to find optimal synthesis conditions such as composition and pH. The success of synthesis was confirmed with Powder X-ray Diffraction that the Ti-POM has a rhombohedral structure with space group of R-3m (No. 166) when the TiOSO4·xH2SO4∙yH2O/ Na2WO4∙2H2O molar ratio is in the range of 0.07 to 0.33. But outside of this range, other unwanted phases coexist. In a basic condition (pH=12), a single-phase Ti-POM with good crystallinity can be obtained, while a Keggin-type POM, NaxK10-x(H2W12O42), was formed through the decomposition of Ti-POM at pH lower than 7.

Measurement of the physical properties of high-temperature molten salts is important for the efficient design and operation of molten salt reactors (MSR) in which the reactor coolant and nuclear fuel are in a homogeneous liquid state. Although some crucial physical properties such as viscosity, thermal conductivity, density, etc., have been drawing much attention, relative data, especially for molten chloride salts, are scarce. Thus, it is urgent to prepare the viscosity data as one of the key transport properties in thermal hydraulics analysis. However, it is not an easy task to measure the molten salt viscosity with high accuracy due to end effect, a small gap between the chamber and spindle, thermal expansion of the chamber and spindle at high temperatures in a rotational viscometer. Additionally, molten salt temperatures inside furnace are not uniform due to the large temperature gradient inside the chamber, and therefore the assumption of laminar condition can be violated. In this study, geometric factors, which can be a major interference in the torque measurement, were considered for the accurate determination of the viscosity. We established a high-temperature molten salt viscosity measurement system with Brookfield rotational viscometer. KNO3 molten salt was used as a model substance at a temperature range of 650–773 K. In-house designed spindles and chambers were made of corrosion-resistant alumina. Thermal expansion has a significant influence on the size and shape of the chamber and spindle. The effect of thermal expansion on the conventional correction method was examined with temperature variation and distribution. Gap size variation was also investigated in order to improve the accuracy.