Sulfur hexafluoride has an extremely high global warming potential (GWP) because of strong absorption of infraredradiation and long atmospheric lifetime which cause the global warming effect. This study is to identify the effects ofdestruction and removal efficiency of SF6 by the addition of conditioning agent (oxygen, water vapor and hydrogen) whenusing the high ionization energy. The irradiation intensity of ionization energy was 2mA, 5mA, 10mA and 15mA. TheSF6 was completely removed with H2O and H2 gas injection at 2mA. Main by-products were HF and F2 gases. HF andF2 gas formation was increased with irradiation intensity increasing. Most of the by-products of particle were sulfur andmetal sulfate.