Gas identification techniques using pattern recognition methods were developed from four micro-electronic gas sensors for noxious gas mixture analysis. The target gases for the air quality monitoring inside vehicles were two exhaust gases, carbon monoxide (CO) and nitrogen oxides (NOx), and two odor gases, ammonia (NH3) and formaldehyde (HCHO). Four MEMS gas sensors with sensing materials of Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and hybridized SnO2-ZnO material for HCHO were fabricated. In six binary mixed gas systems with oxidizing and reducing gases, the gas sensing behaviors and the sensor responses of these methods were examined for the discrimination of gas species. The gas sensitivity data was extracted and their patterns were determined using principal component analysis (PCA) techniques. The PCA plot results showed good separation among the mixed gas systems, suggesting that the gas mixture tests for noxious gases and their mixtures could be well classified and discriminated changes.

중·저층 구조물의 구조물 건전도 모니터링을 위해 아두이노 기반 가속도 센서를 적용하기 앞서 아두이노 기반의 저가형 가속도 센서의 진동 계측 성능을 확인하고, 그 한계를 명확히 하고자 한다. 가진 장치에 상용 가속도 센서와 저가형 가속도 센서를 설치 하고 다양한 Case의 Sin파를 가진하여 그 응답을 계측하였다. 응답 결과는 상용 가속도 센서를 기준으로 저가형 센서의 계측 정확성을 비교하였다. 가진 진동수 추정에 있어서 대부분의 Case에서 유사한 결과를 나타내었으나 Magnitude 추정 결과에 있어서 가진 진폭이 낮은 1Hz/100mm이하의 경우 Magnitude 추정값이 부정확하게 나타났다. 이후 모든 Case에서는 저가형 가속도 센서와 상용 가속도 센서의 Magnitude 추정 결과가 유사하게 나타났다. 이러한 실험 결과를 바탕으로 아두이노 기반 저가형 가속도센서는 대체적으로 동적 계측의 유효성이 있다고 판단된다.

Wireless sensors are more favorable in measuring structural response compared to conventional sensors in terms of them being easier to use with no issues with cables and them being considerably cheaper. Previous tests have been conducted to analyze the performance of MEMS (Micro Electro Mechanical Systems) sensor in sinusoidal excitation tests. This paper analyzes the performance of in-built MEMS sensors in devices by comparing with an ICP sensor as the reference. Earthquake input amplitude excitation in shaking table tests was done. Results show that MEMS sensors are more accurate in measuring higher input amplitude measurements which range from 100gal to 250gal than at lower input amplitudes which range from 10gal to 50gal. This confirms the results obtained in previous sinusoidal tests. It was also seen that natural frequency results have lower error values which range from 0% to 3.92% in comparison to the response spectra results. This also confirms that in-built MEMS sensors in mobile devices are good at estimating natural frequency of structures. In addition, it was also seen that earthquake input amplitudes with more frequency contents (Gyeongju) had considerably higher error values than Pohang excitation tests which has less frequency contents.

Recently, measuring instruments for SHM of structures has been developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to the absence of triboelectric noise and elimination of the requirement of a cumbersome cable. However, the low-cost wireless MEMS sensor has high noise density and transmits the signal wirelessly, so data transmission delay occurs during measurement. Therefore, the footbridges that was previously measured by a mobile phone in 2014 was remeasured using G-Link-200, iPad and iPhone to compare their performance.

Wireless sensors are more favorable in measuring structural response compared to conventional sensors. This is because they are easier to use with no issues with cables and are considerably cheaper. There are several applications that can be used in recording and analyzing data from MEMS sensor installed on an iPhone. The Vibration App is one of the applications used and there has not been adequate research conducted in analyzing the performance of this App. This paper analyzed the performance of the Vibration App by comparing it with the performance of an ICP sensor. Results show that natural frequency results are more accurate (error less than 5%) in comparison to the amplitude results. This means that built- in MEMS sensor in smartphones are good at estimating natural frequency of structures. In addition, it was seen that the results became more accurate at higher frequencies (5.0Hz and 10.0Hz).

Recently, measuring instruments for SHM of structures has been developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to the absence of triboelectric noise and elimination of the requirement of a cumbersome cable. However, in extreme environments, the sensor may be less sensitive to temperature changes and to the distance between the sensor and data logger. This may compromise on the performance of the sensor and instrumentation. Therefore, in this paper, free vibration experiments were conducted using wireless MEMS sensors at an actual site. Measurement was assessed in time and frequency domain by changing the temperature variation at(- 8℃, - 12℃ and - 16℃) and the communication distance (20m, 40m, 60m, 80m).

Recently, measuring instruments for SHM of structures had being developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to its absence of triboelectric noise and elimination of the requirement for cumbersome cable. However, the research on the tall buildings with relatively small vibration levels is insufficient. Therefore, in this paper, we used the wireless MEMS sensor and iPad to compare and analyze the vibration measurements of three tall buildings and two towers.

Wireless MEMS sensors have common features such as wireless communication, data measurement, embedded processing, battery-based self-power, and low cost, and increased measurement effectiveness. Wireless MEMS sensors enable efficient SHM without interfering with location because there is no requirement for triboelectric noise and cumbersome cables. However, there is little research on the communication distance with sensors and data. For instance, existing researches have limited communication distance experiments in civil engineering bridges. It is also necessary to investigate the characteristics of dynamic behavior and the communication distance of architectural structures with different wireless transmission/reception environments. Therefore, in a building structure with walls and slabs instead of open spaces, MEMS sensors and data loggers were used as distance experiments where communication disturbance between the vertical slab and the horizontal wall could actually be communicated.

Recently, measuring instruments for SHM of structures had being developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to its absence of triboelectric noise and elimination of the requirement for cumbersome cable. Preliminary studies on the continuous vibration measurement of high-rise buildings using MEMS sensors have been carried out. However, the research on the low-rise buildings with relatively small vibration levels is insufficient. Therefore, in this paper, we used the wireless MEMS sensor to compare and analyze the vibration measurements of three low-rise buildings.

With increasing number construction of high-rise building which has about 40 to 60 floors there have been many kinds of problem which related with usage from vibration. To predict response acceleration, it is important to assess correct natural frequency. However, due to the noise of MEMS sensor, it is difficult to measure dynamic characteristic such as natural frequency when measuring ambient vibration using MEMS sensor within cell phone. Therefore, a comparative analysis on vibration measuring applications was performed after measuring ambient vibration of 2 skyscrappers which have height between 133.5~244.3m that are located in Seoul and Observation tower using I-jishin APP with noise reduction function of MEMS sensor in order to verify the effectiveness of low noise type vibration measurement APP.

This research is to investigate the flow characteristics of micropump with two different types of diffuser outlet in micropump (straight and round). Four different outlet diameters(1mm, 1.5mm, 2mm at straight type of diffuser outlet and single outlet diameter(1mm) at round type are utilized for the flow analysis of the diffuser in micropump. Velocity and pressure distributions of fluid over the flow domain are numerically calculated for the shape optimum design of diffuser in micropump with uniform inlet velocity and pressure. According to the calculations of local maximum pressure at diffuser outlet, straight type of diffuser with larger diameter of diffuser outlet is of highest flow energy performance of the flow channel shapes in the present micropump.

고 종횡비 MEMS 구조물의 습식 공정에서 세정 이후 건조 과정에서 발생하는 문제점들을 극복하기 위하여 초임계 이산화탄소를 이용한 고 종횡비의 MEMS 구조물의 건조방법에 대하여 조사하였다. 실험에 사용된 MEMS 구조물 습식 제조방법의 세정은 HF/water에서 식각된 cantilever beam을 isopropyl alcohol (IPA)로 치환하여 진행되었다. 초임계 이산화탄소에 의한 IPA의 제거율은 VOC 분석법을 통하여 다양한 조건에서 측정 되었고, 건조된 cantilever beam은 SEM을 이용하여 관찰하였다. 자연 건조를 통한 방법으로는 종횡비 1:15의 cantilever beam까지 stiction 없이 제조할 수 있었으나, 초임계 이산화탄소를 이용한 MEMS 구조물의 건조는 기존의 건조방법 보다 고 종횡비를 가지는 1:75의 cantilever beam까지 stiction 없이 제작할 수 있었다.

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about 5mm×4mm and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at 70˚C for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

본 연구는 빠른 운항 속도와 짧은 운용 시간을 요구하는 임무에 활용될 저가 소형 자율 무인잠수정에 고가 대형 관성 측정 장치를 대신하여 사용할 수 있는 저가 소형 자세 측정 장치 개발 및 성능 검증을 수행하였다. 저가 소형 자세 측정 장치 개발을 위해서 MEMS 기술을 적용한 gyro, accelerometer 및 magnetometer 채택하여 MEMS 기반 하드웨어를 제작하였으며, 좌표 변환 공식과 칼만필터를 적용하여 자세 계산 알고리즘을 구현하였다. 또한 개발된 MEMS 기반 자세 측정 장치에 대한 기본 성능 검증을 위한 지자기센서 검증 시험, 정적 자세 시험, 차량 시험, 운동 모사 장치 시험을 수행하였으며, 각각 시험 결과를 제시하였다. 지자기센서 검증 시험 결과 외부 자기장 보정을 통하면 개발된 MEMS 기반 자세 측정 장치의 측정 결과가 외부 자기장에 강인함을 확인하였으며, 정적자세 시험 및 차량 시험을 통하여 자세 변화가 크지 않는 환경에서 자세 측정 오차가 0.5°/hr 임을 확인하였다. 운동 모사 장치 시험을 통하여 5분 내외 자세 변화가 큰 운동 중에도 자세 측정 오차가 발산하지 않고 1°/hr 이내임을 확인하였다. 상기 시험 결과로부터 개발된 MEMS 기반 자세 측정 장치가 목표 성능인 1°/hr이내 roll, pitch, yaw 오차를 보여주고 있음 확인하였으며, 이로부터 20분 내외 운용시간 동안 정확한 자세 정보 제공 가능성을 확인할 수 있었다.