The silica nanoparticles were used as support of catalyst, filling material, electronic assembler, thin film material, and sensor material. And, the titania nanoparticles were used as pigment, dielectric substance, sensor and photocatalyst. In this paper, the spherical composite particles of TiO2/SiO2with narrow size distribution and phase pure were synthesized by ultrasonic spray pyrolysis method from TiOSO4 and colloidal silica solution. Using ultrasonic apparatus, this starting solution was vaporized to droplets, and these droplets were induced into tube furnace by carrier gas. The resulting composite powder was characterized by scanning electron microscopy, X-ray diffraction analysis, TG-DTA, in vitro sun protection factor(SPF) and BET surface area analysis.

The spherical particles of CeO2/SiO2 composite powder with narrow-size distribution and pure phase particles were synthesized by ultrasonic spray pyrolysis method from aqueous cerium sulfate solution. The resulting composite powder was characterized by X-ray diffraction, scanning electron microscopy, transmittance electron microscopy, in-vitro sun protect factor, and BET surface area analysis. The concentration of cerium sulfate was tested to vary the particle size from 3.40×10-3 to 1.02×10-2mol/cm3 to study concentration effect of starting material. The average particle size from the 3.40×10-3mol/cm3 concentration was found to be slightly smaller than that from the 1.02×10-2mol/cm3 concentration, because of the relation between the droplet size and the concentration of the starting material solution

표면 개질한 다공성 금속 지지체에 초음파 분무 열분해법을 이용하여 silica막을 합성하고, 고온 기체 선택 투과 분리 특성을 조사하였다. Tetraethyl orthosilicate (TEOS)를 전구체로 하여 지지체 세공을 통한 감압 진공을 하면서 873K에서 표면에 defect 없이 균일한 양질의 silica막이 형성되었다. 투과 온도 523 K에서 silica막의 수th/질소 및 수증기/메탄을 분리 계수가 각각 17 및 16 정도의 우수한 선택 투과 성능을 나타냈다. 다공성 금속 지지체의 불균일한 기공에 silica 분체 및 γ-alumina층을 중간층으로 도입하고, 그 위에 열분해법에 의한 silica를 합성한 결과, Knudsen 확산에 의한 투과 영역의 세공이 완전히 제거되어 높은 수소 및 수증기 선택성을 가지는 복합 막이 형성되었다.

In this study, nano-sized indium oxide powder with the average particle size below 100 nm is fab-ricated from the indium chloride solution by the spray pyrolysis process. The effects of the reaction temperature, the concentration of raw material solution and the inlet speed of solution on the properties of powder were studied. As the reaction temperature increased from 850 to , the average particle size of produced powder increased from 30 to 100 nm, and microstructure became more solid, the particle size distribution was more irregular, the intensity of a XRD peak increased and specific surface area decreased. As the indium concentration of the raw material solution increased from 40 to 350 g/l, the average particle size of the powder gradually increased from 20 to 60 nm, yet the particle size distribution appeared more irregular, the intensity of a XRD peak increased and spe-cific surface area decreased. As the inlet speed of solution increased from 2 to 5 cc/min., the average particle size of the powder decreased and the particle size distribution became more homogeneous. In case of the inlet speed of 10 cc/min, the average particle size was larger and the particle size distribution was much irregular compared with the inlet speed of 5 cc/min. As the inlet speed of solution was 50 cc/min, the average particle size was smaller and microstructure of the powder was less solid compared with the inlet speed of 10 cc/min. The intensity of a XRD peak and the variation of specific area of the powder had the same tendency with the variation of the average par-ticle size.

In this study, nano-sized powder of Ni-ferrite was fabricated by spray pyrolysis process using the Fe-Ni complex waste acid solution generated during the shadow mask processing. The average particle size of the produced powder was below 100 nm. The effects of the reaction temperature, the inlet speed of solution and the air pressure on the properties of powder were studied. As the reaction temperature increased from 80 to 110, the average particle size of the powder increased from 40 nm to 100 nm, the fraction of the Ni-ferrite phase was also on the rise, and the surface area of the powder was greatly reduced. As the inlet speed of solution increased from 2 cc/min. to 10 cc/min., the average particle size of the powder greatly increased, and the fraction of the Ni-ferrite phase was on the rise. As the inlet speed of solution increased to 100 cc/min., the average particle size of the powder decreased slightly and the distribution of the particle size appeared more irregular. Along with the increase of the inlet speed of solution more than 10 cc/min., the fraction of the Ni-ferrite phase was decreased. As the air pressure increased up to 1 , the average particle size of the powder and the fraction of the Ni-ferrite phase was almost constant. In case of 3 air pressure, the average particle size of the powder and the fraction of the Ni-ferrite phase remarkably decreased.