The semiconductor and display industries require the development of plasma resistant materials for use in high density plasma etching process equipment. Yttria (Y2O3) is a ceramic material mainly used to ensure good plasma resistance properties, which requires a dense microstructure. In commercial production, a sintering process is applied to reduce the sintering temperature of Y2O3. In this study, the effect of the addition of glass frit to the sintered specimen was examined when manufacturing yttria sintered specimens for semiconductor process equipment parts. The Y2O3 specimen was shaped into a Ø50 mm size and then sintered at 1,600 °C for 1~8 h. The characteristics, X-ray diffraction pattern, densities, contraction rate of the specimen, and swelling of the surface of the Y2O3 specimens were investigated as a function of the sintering time and glass frit addition. The Y2O3 specimen exhibited a density of over 4.9 g/cm3 as the sintering time increased, and the swelling phenomenon characteristics were improved by glass frit, by controlling particle size.

In this study, we investigated the microstructure and piezoelectric properties of 0.96(K0.456Na0.536)Nb0.95Sb0.05-0.04 Bi0.5(Na0.82K0.18)0.5ZrO3 (KNNS-BNKZ) ceramics based on one-step and two-step sintering processes. One-step sintering led to significant abnormal grain (AG) growth at temperatures above 1,085 °C. With increasing sintering temperature, piezoelectric and dielectric properties were enhanced, resulting in a high d33 = 506 pC/N for one-step specimen sintered at 1,100 °C (one-step 1,100 °C specimen). However, for one-step 1,115 °C specimen, a slight decrease in d33 was observed, emphasizing the importance of a high tetragonal (T) phase fraction for superior piezoelectric properties. Achieving a relative density above 84 % for samples sintered by the one-step sintering process was challenging. Conversely, two-step sintering significantly improved the relative density of KNNS-BNKZ ceramics up to 96 %, attributed to the control of AG nucleation in the first step and grain growth rate control in the second step. The quantity of AG nucleation was affected by the duration of the first step, determining the final microstructure. Despite having a lower T phase fraction than that of the one-step 1,100 °C specimen, the two-step specimen exhibited higher piezoelectric coefficients (d33 = 574 pC/N and kp = 0.5) than those of the one-step 1,100 °C specimen due to its higher relative density. Performance evaluation of magnetoelectric composite devices composed of one-step and twostep specimens showed that despite having a higher g33, the magnetoelectric composite with the one-step 1,100 °C specimen exhibited the lowest magnetoelectric voltage coefficient, due to its lowest kp. This study highlights the essential role of phase fraction and relative density in enhancing the performance of piezoelectric materials and devices, showcasing the effectiveness of the two-step sintering process for controlling the microstructure of ceramic materials containing volatile elements.

In this study, a core-shell powder and sintered specimens using a mechanically alloyed (MAed) Ti-Mo powder fabricated through high-energy ball-milling are prepared. Analysis of sintering, microstructure, and mechanical properties confirms the applicability of the powder as a sputtering target material. To optimize the MAed Ti-Mo powder milling process, phase and elemental analyses of the powders are performed according to milling time. The results reveal that 20 h of milling time is the most suitable for the manufacturing process. Subsequently, the MAed Ti-Mo powder and MoO3 powder are milled using a 3-D mixer and heat-treated for hydrogen reduction to manufacture the core-shell powder. The reduced core-shell powder is transformed to sintered specimens through molding and sintering at 1300 and 1400oC. The sintering properties are analyzed through X-ray diffraction and scanning electron microscopy for phase and porosity analyses. Moreover, the microstructure of the powder is investigated through optical microscopy and electron probe microstructure analysis. The Ti-Mo core-shell sintered specimen is found to possess high density, uniform microstructure, and excellent hardness properties. These results indicate that the Ti-Mo core-shell sintered specimen has excellent sintering properties and is suitable as a sputtering target material.

In this study, Ni-Y2O3 powder was prepared by alloying recomposition oxidation sintering (AROS), solution combustion synthesis (SCS), and conventional mechanical alloying (MA). The microstructure and mechanical properties of the alloys were investigated by spark plasma sintering (SPS). Among the Ni-Y2O3 powders synthesized by the three methods, the AROS powder had approximately 5 nm of Y2O3 crystals uniformly distributed within the Ni particles, whereas the SCS powder contained a mixture of Ni and Y2O3 nanoparticles, and the MA powder formed small Y2O3 crystals on the surface of large Ni particles by milling the mixture of Ni and Y2O3. The average grain size of Y2O3 in the sintered alloys was approximately 15 nm, with the AROS sinter having the smallest, followed by the SCS sinter at 18 nm, and the MA sinter at 22 nm. The yield strength (YS) of the SCS- and MA-sintered alloys were 1511 and 1688 MPa, respectively, which are lower than the YS value of 1697 MPa for the AROS-sintered alloys. The AROS alloy exhibited improved strength compared to the alloys fabricated by SCS and conventional MA methods, primarily because of the increased strengthening from the finer Y2O3 particles and Ni grains.

The effects of annealing on the microstructure and mechanical properties of Al–Zn–Mg–Cu–Si alloys fabricated by high-energy ball milling (HEBM) and spark plasma sintering (SPS) were investigated. The HEBM-free sintered alloy primarily contained Mg2Si, Q-AlCuMgSi, and Si phases. Meanwhile, the HEBM-sintered alloy contains Mg-free Si and θ-Al2Cu phases due to the formation of MgO, which causes Mg depletion in the Al matrix. Annealing without and with HEBM at 500oC causes partial dissolution and coarsening of the Q-AlCuMgSi and Mg2Si phases in the alloy and dissolution of the θ-Al2Cu phase in the alloy, respectively. In both alloys, a thermally stable α-AlFeSi phase was formed after long-term heat treatment. The grain size of the sintered alloys with and without HEBM increased from 0.5 to 1.0 μm and from 2.9 to 6.3 μm, respectively. The hardness of the sintered alloy increases after annealing for 1 h but decreases significantly after 24 h of annealing. Extending the annealing time to 168 h improved the hardness of the alloy without HEBM but had little effect on the alloy with HEBM. The relationship between the microstructural factors and the hardness of the sintered and annealed alloys is discussed.

Molybdenum-tungsten (Mo-W) alloy sputtering targets are widely utilized in fields like electronics, nanotechnology, sensors, and as gate electrodes for TFT-LCDs, owing to their superior properties such as hightemperature stability, low thermal expansion coefficient, electrical conductivity, and corrosion resistance. To achieve optimal performance in application, these targets’ purity, relative density, and grain size of these targets must be carefully controlled. We utilized nanopowders, prepared via the Pechini method, to obtain uniform and fine powders, then carried out spark plasma sintering (SPS) to densify these powders. Our studies revealed that the sintered compacts made from these nanopowders exhibited outstanding features, such as a high relative density of more than 99%, consistent grain size of 3.43 μm, and shape, absence of preferred orientation.

YSZ (Y2O3-stabilized zirconia)-based ceramics have excellent mechanical properties, such as high strength and wear resistance. In the application, YSZ is utilized in the bead mill, a fine-grinding process. YSZ-based parts, such as the rotor and pin, can be easily damaged by continuous application with high rpm in the bead mill process. In that case, adding WC particles improves the tribological and mechanical properties. YSZ-30 vol.% WC composite ceramics are manufactured via hot pressing under different pressures (10/30/60 MPa). The hot-pressed composite ceramics measure the physical properties, such as porosity and bulk density values. In addition, the phase formation of these composite ceramics is analyzed and discussed with those of physical properties. For the increased applied pressure of hot pressing, the tetragonality of YSZ and the crystallinity of WC are enhanced. The mechanical properties indicate an improved tendency with the increase in the applied pressure of hot pressing.

The influence of MgO addition on the densification and microstructure of alumina (Al2O3) was studied. Compacted alumina specimens were manufactured using ball-milling and one-directional pressing followed by sintering at temperatures below 1700oC. Relative density, shrinkage, hardness, and microstructure were investigated using analytical tools such as FE-SEM, EDS, and XRD. When the MgO was added up to 5.0 wt% and sintered at 1500oC and 1600oC, the relative density exhibited an average value of 97% or more at both temperatures. The maximum density of 99.2% was with the addition of 0.5 wt% MgO at 1500oC. Meanwhile, the specimens showed significantly lower density values when sintered at 1400oC than at 1500oC and 1600oC owing to the relatively low sintering temperature. The hardness and shrinkage data also showed a similar trend in the change in density, implying that the addition of approximately 0.5 wt% MgO can promote the densification of Al2O3. Studying the microstructure confirmed the uniformity of the sintered alumina. These results can be used as basic compositional data for the development of MgOcontaining alumina as high-dielectric insulators.

The Ag/WC electrical contacts were prepared via powder metallurgy using 60 wt% Ag, 40 wt% WC, and small amounts of Co3O4 with varying WC particle sizes. After the fabrication of the contact materials, microstructure observations confirmed that WC-1 had an average grain size (AGS) of 0.27 μm, and WC-2 had an AGS of 0.35 μm. The Ag matrix in WC-1 formed fine grains, whereas a significantly larger and continuous growth of the Ag matrix was observed in WC-2. This indicates the different flow behaviors of liquid Ag during the sintering process owing to the different WC sizes. The electrical conductivities of WC-1 and WC-2 were 47.8% and 60.4%, respectively, and had a significant influence on the Ag matrix. In particular, WC-2 exhibited extremely high electrical conductivity owing to its large and continuous Ag-grain matrix. The yield strengths of WC-1 and WC-2 after compression tests were 349.9 MPa and 280.7 MPa, respectively. The high yield strength of WC-1 can be attributed to the Hall–Petch effect, whereas the low yield strength of WC-2 can be explained by the high fraction of high-angle boundaries (HAB) between the WC grains. Furthermore, the relationships between the microstructure, electrical/mechanical properties, and deformation mechanisms were evaluated.

Thermoelectric materials and devices are energy-harvesting devices that can effectively recycle waste heat into electricity. Thermoelectric power generation is widely used in factories, engines, and even in human bodies as they continuously generate heat. However, thermoelectric elements exhibit poor performance and low energy efficiency; research is being conducted to find new materials or improve the thermoelectric performance of existing materials, that is, by ensuring a high figure-of-merit (zT) value. For increasing zT, higher σ (electrical conductivity) and S (Seebeck coefficient) and a lower к (thermal conductivity) are required. Here, interface engineering by atomic layer deposition (ALD) is used to increase zT of n-type BiTeSe (BTS) thermoelectric powders. ALD of the BTS powders is performed in a rotary-type ALD reactor, and 40 to 100 ALD cycles of ZnO thin films are conducted at 100oC. The physical and chemical properties and thermoelectric performance of the ALD-coated BTS powders and pellets are characterized. It is revealed that electrical conductivity and thermal conductivity are decoupled, and thus, zT of ALD-coated BTS pellets is increased by more than 60% compared to that of the uncoated BTS pellets. This result can be utilized in a novel method for improving the thermoelectric efficiency in materials processing.

High-temperature and high-pressure post-processing applied to sintered thermoelectric materials can create nanoscale defects, thereby enhancing their thermoelectric performance. Here, we investigate the effect of hot isostatic pressing (HIP) as a post-processing treatment on the thermoelectric properties of p-type Bi0.5Sb1.5Te3.0 compounds sintered via spark plasma sintering. The sample post-processed via HIP maintains its electronic transport properties despite the reduced microstructural texturing. Moreover, lattice thermal conductivity is significantly reduced owing to activated phonon scattering, which can be attributed to the nanoscale defects created during HIP, resulting in an ~18% increase in peak zT value, which reaches ~1.43 at 100oC. This study validates that HIP enhances the thermoelectric performance by controlling the thermal transport without having any detrimental effects on the electronic transport properties of thermoelectric materials.

Li1.3Al0.3Ti1.7(PO4)3(LATP) is considered a promising material for all-solid-state lithium batteries owing to its high moisture stability, wide potential window (~6 V), and relatively high ion conductivity (10-3–10-4 S/cm). Solid electrolytes based on LATP are manufactured via sintering, using LATP powder as the starting material. The properties of the starting materials depend on the synthesis conditions, which affect the microstructure and ionic conductivity of the solid electrolytes. In this study, we synthesize the LATP powder using sol-gel and co-precipitation methods and characterize the physical properties of powder, such as size, shape, and crystallinity. In addition, we have prepared a disc-shaped LATP solid electrolyte using LATP powder as the starting material. In addition, X-ray diffraction, scanning electron microscopy, and electrochemical impedance spectroscopic measurements are conducted to analyze the grain size, microstructures, and ion conduction properties. These results indicate that the synthesis conditions of the powder are a crucial factor in creating microstructures and affecting the conduction properties of lithium ions in solid electrolytes.

In this study, an Al82Ni7Co3Y8 (at%) bulk metallic glass is fabricated using gas-atomized Al82Ni7Co3Y8 metallic glass powder and subsequent spark plasma sintering (SPS). The effect of powder size on the consolidation of bulk metallic glass is considered by dividing it into 5 m or less and 20–45 m. The sintered Al82Ni7Co3Y8 bulk metallic glasses exhibit crystallization behavior and crystallization enthalpy similar to those of the Al82Ni7Co3Y8 powder with 5 m or less and it is confirmed that no crystallization occurred during the sintering process. From these results, we conclude that the Z-position-controlled spark plasma sintering process, using superplastic deformation by viscous flow in the supercooled liquid-phase region of amorphous powder, is an effective process for manufacturing bulk metallic glass.

Recently, research on MAX phase materials has been actively conducted. M of MAX phase is made of early transition metal element, A is A-group (IIIA or IVA) element, and X is Carbon or Nitrogen. It has the chemical formula of MnAXn-1, and is called the 211, 312, and 413 groups according to the indices(n=1,2,3). MXene material is characterized by having a layered structure of 2D structure like graphene by etching the element corresponding to A-gruop in the MAX phase. So far, MXene materials have been reported to be applied in various fields. In particular, research is being actively conducted as anode material for Li secondary batteries, electromagnetic wave shielding material, and hydrogen storage alloy material. In the pulse energization active sintering method, the surface of the powder particles is cleaned and activated more easily than the conventional electrical sintering process and material transfers at both the macro and micro level, so that a high-quality sintered body can be obtained at low temperature and fast time. In this study, the MAX phase was synthesized in a short time by using a pulse current active sintering apparatus, and the MXene material was prepared from the synthesized MAX phase and the structure was analyzed.

We investigate the austenite stability in nanocrystalline Fe-7%Mn-X%Mo (X = 0, 1, and 2) alloys fabricated by spark plasma sintering. Mo is known as a ferrite stabilizing element, whereas Mn is an austenite stabilizing element, and many studies have focused on the effect of Mn addition on austenite stability. Herein, the volume fraction of austenite in nanocrystalline Fe-7%Mn alloys with different Mo contents is measured using X-ray diffraction. Using a disk compressive test, austenite in Fe–Mn–Mo alloys is confirmed to transform into strain-induced martensite during plastic deformation by a disk d. The variation in austenite stability in response to the addition of Mo is quantitatively evaluated by comparing the k-parameters of the kinetic equation for the strain-induced martensite transformation.

본 연구에서는 용제를 전혀 사용하지않고 UV경화가 가능한 나노 실버 페이스트를 개발하였다. 무용제(solvent-free) 타입으로 개발한 나노 실버 페이스트의 점도 및 점탄성 측정하였다. 그리고 스크린인쇄로 패턴을 인쇄한 후에 UV 경화로 전극도막을 형성시켰다. 형성된 전극도막의 전도성, 연필경도, 접착력에 대해서 평가하였다. 또한 전극 도막 을 광 소결하여 전도성을 평가하였다. 마지막으로 전극도막의 경화특성은 TGA 및 FT-IR로 평가하였다. 이러한 결 과를 정리하면 UV경화만 시켰을 경우에는 전도성, 접착력, 경화특성에 대해서는 Paste(3)이 가장 우수하였다. 그러 나 광소결 후에는 Paste(1)이 가장 우수한 전도성을 얻을수있었다. 그 이유는 10nm 실버 파우더를 사용한 것이 소 결 특성이 가장 우수했기 때문이라고 판단된다.

3Y-TZP ceramics obtained by doping 3 mol.% of Y2O3 to ZrO2 to stabilize the phase transition are widely used in the engineering ceramic industry due to their excellent mechanical properties such as high strength, fracture toughness, and wear resistance. An additional increase in mechanical properties is possible by manufacturing a composite in which a high-hardness material such as oxide or carbide is added to the 3Y-TZP matrix. In this study, composite powder was prepared by dispersing a designated percentage of WC in the 3Y-TZP matrix, and the results were compared after manufacturing the composite using the different processes of spark plasma sintering and HP. The difference between the densification behavior and porosity with the process mechanism was investigated. The correlation between the process conditions and phase formation was examined based on the crystalline phase formation behavior. Changes to the microstructure according to the process conditions were compared using field-emission scanning electron microscopy. The toughness-strengthening mechanism of the composite with densification and phase formation was also investigated.

Changes in the mechanical properties and microstructure of an IN 939 W alloy according to the sintering heating rate were evaluated. IN 939 W alloy samples were fabricated by spark plasma sintering. The phase fraction, number density, and mean radius of the IN 939W alloy were calculated using a thermodynamic calculation. A universal testing machine and micro-Vickers hardness tester were employed to confirm the mechanical properties of the IN 939W alloy. X-ray diffraction, optical microscopy, field-emission scanning electron microscopy, Cs-corrected-field emission transmission electron microscopy, and energy dispersive X-ray spectrometry were used to evaluate the microstructure of the alloy. The rapid sintering heating rate resulted in a slightly dispersed γ' phase and chromium oxide. It also suppressed the precipitation of the η phase. These helped to reinforce the mechanical properties.

This study demonstrates the effect of the compaction pressure on the microstructure and properties of pressureless-sintered W bodies. W powders are synthesized by ultrasonic spray pyrolysis and hydrogen reduction using ammonium metatungstate hydrate as a precursor. Microstructural investigation reveals that a spherical powder in the form of agglomerated nanosized W particles is successfully synthesized. The W powder synthesized by ultrasonic spray pyrolysis exhibits a relative density of approximately 94% regardless of the compaction pressure, whereas the commercial powder exhibits a relative density of 64% under the same sintering conditions. This change in the relative density of the sintered compact can be explained by the difference in the sizes of the raw powder and the densities of the compacted green body. The grain size increases as the compaction pressure increases, and the sintered compact uniaxially pressed to 50 MPa and then isostatically pressed to 300 MPa exhibits a size of 0.71 m. The Vickers hardness of the sintered W exhibits a high value of 4.7 GPa, mainly due to grain refinement.

An alternative fabrication method for carburizing steel using spark plasma sintering (SPS) is investigated. The sintered carburized sample, which exhibits surface modification effects such as carburizing, sintered Fe, and sintered Fe–0.8 wt.%C alloys, is fabricated using SPS. X-ray diffraction and micro Vickers tests are employed to confirm the phase and properties. Finite element analysis is performed to evaluate the change in hardness and analyze the carbon content and residual stress of the carburized sample. The change in the hardness of the carburized sample has the same tendency to predict hardness. The difference in hardness between the carburized sample and the predicted value is also discussed. The carburized sample exhibits a compressive residual stress at the surface. These results indicate that the carburized sample experiences a surface modification effect without carburization. Field emission scanning electron microscopy is employed to verify the change in phase. A novel fabrication method for altering the carburization is successfully proposed. We expect this fabrication method to solve the problems associated with carburization.