클러스터형의 다중 공정용 장치에 부착키 위해 제작된 콘택 산화막 식각용 공정모듈에 대한 적정 식각 공정조건을 확립하기 위해, Taguchi 방법을 활용하여 공정최적화 실험을 수행하였다. Taguchi 실험은 2회에 걸쳐 시행되었는데, 제1차 실험은 장비변수에 대한 식각공정변수의 개괄적 거동을 타진하기 위함이었고, 제2차 실험은 상세 공정조건 확립을 위해서였다. 실험 및 분석 결과 CHF3/CF4 가스유량은 72/8sccm, 공정압력은 50 mTorr, RF 전력은 500 Watts, 자계강도는 90 Gauss일때 최적 공정 성능을 발휘함을 알 수 있다.

ZMR공정에서 발생하기 쉬운 폴리실리콘의 엉김현상(agglomeration), 슬림, 그리고 실리콘기판이 국부적으로 녹는 현상 등을 방지하기 위한 방법과 재결정화된 박막의 질을 향상시키기 위하여 폴리실리콘과 보호 산화막(capping oxide)두계를 변화시킨 실험 결과를 서술한다. 폴리실리콘의 엉김현상은 폴리실리콘과 보호 산화막 그리고 폴리실리콘과 매몰 산화막(buried oxide)의 계면에서의 wetting각과 관계되는데, 엉김현상을 방지하기 위해서는 암모니아 가스 분위기에서 1100˚C, 3시간 동안 열처리하여 폴리실리콘과 보호 산화막 그리고 폴리실리콘과 매몰 산화막의 계면에 질소를 주입시키면 된다. 실리콘 기판의 뒷면이 국부적으로 녹아 SOI구조가 파괴되는 현상과 슬립은 실리콘 기판의 뒷면을 모래타격(sandblast)하여 약 20μm의 거칠기를 가지도록 했을때 방지할 수 있었다. 재결정화된 폴리실리콘의 두께가 두꺼워짐에 따라 재결정화된 박막에서 subboundary의 간격은 넓어지고, 재결정화된 실리콘 두께의 균일성은 보호 산화막이 두꺼울수록 향상된다. 폴리실리콘의 두께를 1μm로 하였을때 subboundary의 간격은 약 70-120μm정도였고 폴리실리콘의 두께가 1μm이고 보호산화막의 두께가 2.5μm일때, 재결정화 후 실리콘의 두게 균일도는 약 ±200Å정도였다.

Biological nitrogen removal is generally accomplished by aerobic nitrification coupled with anoxic denitrification. Many commercial wastewater treatment plants (WWTPs) use external carbon source, such as methanol, to support heterotrophic denitrification process. Using organic wastes as an alternative to commercial carbon sources could thus be beneficial by saving the expense as well as reducing the environmental footprint. Here we report a full-scale (treating 2300 m3 wastewater/d) WWTP that previously utilized a butanediol-based organic waste as the sole external carbon source, which diversified the carbon sources by using a second organic waste generated from food waste recycling. Process parameters were extensively monitored for seven months at all biological unit processes, the aerobic and anoxic tanks, as well as the recirculation flow. Bacterial community structures were analyzed at anoxic tank using next-generation sequencing. The WWTP showed a stable nitrogen-removing performance over the seven months period. The estimated COD/N utilization ratio for food waste-recycling wastewater (FRW) was near 30. The bacterial populations significantly shifted during the operation. Lactobacillaceae and Prevotellaceae were the major bacterial families in the FRW, whereas the denitrification tank was populated by many families including Saprospiraceae, Nannocystaceae, Chitinophagaceae, Eubacteriaceae, and Rhodocyclaceae. Detailed discussion of the results will be presented at the conference.

This study aimed to evaluate changes in the TN and TP removal efficiencies, depending on whether or not a settling process is applied, in a sequencing batch reactor (SBR) process with a membrane bioreactor (MBR). Nutrient removal was considered in terms of developing an advanced water treatment system for ships in accordance with water quality standards set forth by 227(64). For these purposes, the TN and TP concentrations in the inflow and outflow water were measured to calculate the TN and TP removal efficiencies, depending on whether or not a settling process was used. Water discharged from a bathroom, which was constructed for the experiment, was used as the raw water. The experiment that included a settling process was conducted twice, and the operating conditions were: aeration for 90 min, settling for 30 min, agitation for 15 min, and settling for 15 min for one experiment; and aeration for 150 min, settling for 45 min, agitation for 15 min, and settling for 15 min in the other. Operating conditions for the experiment that did not include a settling process were: aeration for 180 min and agitation for 60 min. The concentration of the mixed liquor suspended solids (MLSS) in the reactor was 3,500 mg/L, while the aeration rate was 121 L/min and the water production rate was 1.5 L/min. For the two experiments where a settling process was applied, the average TN removal efficiencies were 44.39% and 41.05%, and the average TP removal efficiencies were 47.85% and 46.04%. For the experiment in which a settling process was not applied, the average TN removal efficiency was 65.51%, and the average TP removal efficiency was 52.51%. Although the final nutrient levels did not satisfy the water quality standards of MEPC 227(64), the TN and TP removal efficiencies were higher when a settling process was not applied.

In order to measure the rheological behavior of precast concrete with high volume of recycled fine aggregate, the replacement of natural fine aggregate by recycled one was carried out in dry-mix process. As results of that, it was found that as the replacement increases, strength and performance of concrete become decreased but may be recoverable by proper selection and dosage of constituents.

Organics matters including algae are the major contaminants of Nak-dong river and it`s concentration is more increasing now. The use of coagulants has been incresed for the effective treatment of drinking water, and aluminum coagulants have been the most widely used in raw water treatment. However, when inorganic metal coagulant is excessively used for long period, it would result in secondary problems, such as increasing sludge production, enhancing the cost of water treatment process, and increasing concentration of residual metal, especially aluminum. Therefore, recently, in order to reduce the use of metal coagulant and enhance the coagulation effectiveness, several alternative coagulants, such as polymeric inorganic coagulants and organic polymers, have been used in water treatment plants. The objectives of this research were (1) to determine optimum dosage concentration and compare the coagulation efficiency at various pH ranges with alum alone, alum+cationic polymer, and alum+anionic polymer, (2) to evaluate the amount of alum reduced by using organic polymer, (3) to maximize removal efficiency of organic matter and minimize the concentration of residual aluminum.