The purpose of this study is to investigate the coloration characteristics by identifying the factor affecting redcoloration of copper red glaze in traditional Korean ceramics. This study analyzed the characteristics of the reduction-firedcopper red glaze by using XRD, Raman spectroscopy, EDX and UV-vis spectroscopy. As a result of XRD analysis, the glazecompletely melted and amorphous glass appeared overall, and the characteristic peak of metal Cu was shown together. Inaddition, as a result of Raman analysis, the characteristic bands of CuO and Cu2O were shown together. The distribution ofcomponent elements was observed by EDX. As a result, copper(Cu) were distributed throughout the glaze. Thus, it was shownthat copper red glaze appeared the best red coloration because metal Cu, CuO and Cu2O evenly existed throughout glaze inparticle colloidal state. The chroma value of the copper red glaze was CIE L* 30.07, a* 13.65, b* 3.72. Wine-Red Solutionwas shown by Dark Graish Red coloration.

A two-pass differential speed rolling(DSR) was applied to a deoxidized low-phosphorous copper alloy sheet in order to form a homogeneous microstructure. Copper alloy with a thickness of 3 mm was rolled to 75 % reduction by two-pass rolling at 150˚C without lubrication at a differential speed ratio of 2.0:1. In order to introduce uniform shear strain into the copper alloy sheet, the second rolling was performed after turning the sample by 180˚ on the transverse direction axis. Conventional rolling(CR), in which the rotating speeds of the upper roll and lower roll are identical to each other, was also performed by two-pass rolling under a total rolling reduction of 75 %, for comparison. The shear strain introduced by the conventional rolling showed positive values at positions of the upper roll side and negative values at positions of the lower roll side. However, samples processed by the DSR showed zero or positive values at all positions. 100//ND texture was primarily developed near the surface and center of thickness for the CR, while 110//ND texture was primarily developed for the DSR. The difference in misorientation distribution of grain boundary between the upper roll side surface and center regions was very small in the CR, while it was large in the DSR. The grain size was smallest in the upper roll side region for both the CR and the DSR. The hardness showed homogeneous distribution in the thickness direction in both CR and DSR. The average hardness was larger in CR than in DSR.

The influence of Cu and Ni on the ductile-brittle transition behavior of metastable austenitic Fe-18Cr-10Mn-N alloys with N contents below 0.5 wt.% was investigated in terms of austenite stability and microstructure. All the metastable austenitic Fe-18Cr-10Mn-N alloys exhibited a ductile-brittle transition behavior by unusual low-temperature brittle fracture, irrespective of Cu and/or Ni addition, and deformation-induced martensitic transformation occasionally occurred during Charpy impact testing at lower temperatures due to reduced austenite stability resulting from insufficient N content. The formation of deformation-induced martensite substantially increased the ductile-brittle transition temperature(DBTT) by deteriorating low-temperature toughness because the martensite was more brittle than the parent austenite phase beyond the energy absorbed during transformation, and its volume fraction was too small. On the other hand, the Cu addition to the metastable austenitic Fe-18Cr-10Mn-N alloy increased DBTT because the presence of δ-ferrite had a negative effect on low-temperature toughness. However, the combined addition of Cu and Ni to the metastable austenitic Fe-18Cr-10Mn-N alloy decreased DBTT, compared to the sole addtion of Ni or Cu. This could be explained by the fact that the combined addition of Cu and Ni largely enhanced austenite stability, and suppressed the formation of deformation-induced martensite and δ-ferrite in conjunction with the beneficial effect of Cu which may increase stacking fault energy, so that it allows cross-slip to occur and thus reduces the planarity of the deformation mechanism.

In order to produce size-controllable Ag nanoparticles and a nanomesh-patterned Si substrate, we introduce a rapid thermal annealing(RTA) method and a metal assisted chemical etching(MCE) process. Ag nanoparticles were self-organized from a thin Ag film on a Si substrate through the RTA process. The mean diameter of the nanoparticles was modulated by changing the thickness of the Ag film. Furthermore, we controlled the surface energy of the Si substrate by changing the Ar or H2 ambient gas during the RTA process, and the modified surface energy was evaluated through water contact angle test. A smaller mean diameter of Ag nanoparticles was obtained under H2 gas at RTA, compared to that under Ar, from the same thickness of Ag thin film. This result was observed by SEM and summarized by statistical analysis. The mechanism of this result was determined by the surface energy change caused by the chemical reaction between the Si substrate and H2. The change of the surface energy affected on uniformity in the MCE process using Ag nanoparticles as catalyst. The nanoparticles formed under ambient Ar, having high surface energy, randomly moved in the lateral direction on the substrate even though the etching solution consisting of 10 % HF and 0.12 % H2O2 was cooled down to -20˚C to minimize thermal energy, which could act as the driving force of movement. On the other hand, the nanoparticles thermally treated under ambient H2 had low surface energy as the surface of the Si substrate reacted with H2. That's why the Ag nanoparticles could keep their pattern and vertically etch the Si substrate during MCE.

In order to clarify the effect of C/Ti atom ratios(χ) on the deformation behavior of TiCχ at high temperature, singlecrystals having a wide range of χ, from 0.56 to 0.96, were deformed by compression test in a temperature range of 1183~2273Kand in a strain rate range of 1.9×10−4~5.9×10−3s−1. Before testing, TiCχ single crystals were grown by the FZ method ina He atmosphere of 0.3MPa. The concentrations of combined carbon were determined by chemical analysis and the latticeparameters by the X-ray powder diffraction technique. It was found that the high temperature deformation behavior observedis the χ-less dependent type, including the work softening phenomenon, the critical resolved shear stress, the transitiontemperature where the deformation mechanism changes, the stress exponent of strain rate and activation energy for deformation.The shape of stress-strain curves of TiC0.96, TiC0.85 and TiC0.56 is seen to be less dependent on χ, the work hardening rate afterthe softening is slightly higher in TiC0.96 than in TiC0.85 and TiC0.56. As χ decreases the work softening becomes less evidentand the transition temperature where the work softening disappears, shifts to a lower temperature. The τc decreasesmonotonously with decreasing χ in a range of χ from 0.86 to 0.96. The transition temperature where the deformationmechanism changes shifts to a lower temperature as χ decreases. The activation energy for deformation in the low temperatureregion also decreased monotonously as χ decreased. The deformation in this temperature region is thought to be governed bythe Peierls mechanism.

Flexible polyurethane/clay porous nanocomposite foams were synthesized using natural and organically modified montmorillonite clays such as bentonite, closite 10A and closite 30B. The content of nanoclays was varied from 1 to 5 wt% of polyol. Dispersion of clay in Polyurethane(PU) matrix was investigated by X-ray diffraction(Cu-Kα rays of wavelength 1.54Å) using an X-ray diffractometer. Also, we determined that the thermal resistance of PU foam increased with added clay, compared to that of pure PU foam. The cell size and the fraction of open cells of the precursor foam were controlled by the addition of clay to the polyurethane foam. Modified clays were found to be more efficient cell openers than the unmodified clay. In addition, the tensile strength and elongation of the polyurethane/clay porous nanocomposites were examined. Increasing clay content increased the mechanical properties of the composites, such as tensile strength, and elongation at break. However, increasing the content over 5 wt% deteriorated the properties of the composites. We found that the nanofillers(bentonite, closite 10A and closite 30B) improved the thermal stability of the nanocomposite foam. The nanocomposite foam containing 3 wt% of closite 30B exhibited the best tensile strength and thermal stability.

We investigated the nanostructural, chemical and optical properties of nc-Si:H films according to deposition conditions. Plasma enhanced chemical vapor deposition(PECVD) techniques were used to produce nc-Si:H thin films. The hydrogen dilution ratio in the precursors, [SiH4/H2], was fixed at 0.03; the substrate temperature was varied from room temperature to 600˚C. By raising the substrates temperature up to 400˚C, the nanocrystalite size was increased from ~2 to ~7 nm and the Si crystal volume fraction was varied from ~9 to ~45% to reach their maximum values. In high-resolution transmission electron microscopy(HRTEM) images, Si nanocrystallites were observed and the crystallite size appeared to correspond to the crystal size values obtained by X-ray diffraction(XRD) and Raman Spectroscopy. The intensity of high-resolution electron energy loss spectroscopy(EELS) peaks at ~99.9 eV(Si L2,3 edge) was sensitively varied depending on the formation of Si nanocrystallites in the films. With increasing substrate temperatures, from room temperature to 600˚C, the optical band gap of the nc-Si:H films was decreased from 2.4 to 1.9 eV, and the relative fraction of Si-H bonds in the films was increased from 19.9 to 32.9%. The variation in the nanostructural as well as chemical features of the films with substrate temperature appears to be well related to the results of the differential scanning calorimeter measurements, in which heat-absorption started at a substrate temperature of 180˚C and the maximum peak was observed at ~370˚C.

To improve coating ability and the life of the coating, Ti based composite materials with hydroxyapatite(HA) should be developed. The raw materials of Ti-26wt%, Nb-1wt%, and Si with 10wt% HA were mixed for 24 h by a mixing machine and milled for 1 h to 6 h by planetary mechanical ball milling. Ti-26%Nb-1%Si-(10%HA) composites, composed of nontoxic elements, were fabricated successfully by spark plasma sintering(SPS) at 1000˚C under 70MPa. The relative density of the sintered Ti-Nb-Si-HA composites using the 24 h mixed powder, and the 6 h milled powder, was 91% and 97 %, respectively. The effects of HA contents and milling time on microstructure and mechanical properties were investigated by SEM and hardness tester, respectively. The Vickers hardness of the composites increased with increasing milling time and higher HA content. The Young's modulus of the sintered Ti-26%Nb-1%Si-10%HA composite using the 6 h-milled powder was 55.6 GPa, as obtained by compression test. Corrosion resistance of the Ti-26wt%Nb-1wt%Si composite was increased by milling and by the addition of 10wt%HA. Wear resistance was improved with increasing milling time. Biocompatibility of the Ti-Nb-Si alloys was improved by the addition of HA.

On March 10, 2011, Chairman Wu Bangguo of the standing committee of China's National People's Congress announced that a socialist law system with Chinese characteristics has formed, but the legal system can be constructed through legislation to form? What meanings are vocabularies that describe the characteristics of the legal system of socialism with Chinese characteristics? And what is the evaluation criterion of this system? To answer these questions, in this paper, we combine the key laws in the key point and the legal disputes between scholars in the forming process of the legal system of socialism with Chinese characteristics, trying to sketch a picture of pure and fresh and full of historical composition and theoretical framework.Core idea of this article think, first, the constitution i plays a fundamental role in the formation of the legal system of socialism with Chinese characteristics. Whether the constitution itself is good or bad determines the content and value of the system, also determines the path and the historical track of the formation of the system. China's National People's Congress (NPC) as the main architect of this system, whose behavior is restricted by the constitution. Second, although all previous changes to the Chinese constitution, which are the result of the development of social politics economy and culture in China, but deepened people’s understand to the law in China, led to scientific discussion of the legal system, and thus indirectly affect the content of the legal system of socialism with Chinese characteristics. Furthermore, we think that the formation of the legal system of socialism with Chinese characteristics in fact is the result of benign operation of constitutionalism under the guidance of the constitution in China.First of all, the legal system was proposed based on the needs of the legislation, and analyzed the social cause to the concept. Second, Chinese scholars on the legal system of tong said, which is to point to by a country's current legal norms, formed by the combination according to different classification of legal department of a systematic organic connection of the unified whole. Through the analysis, we think it boils down to law system, in essence is a normative system. It lasted for the basic ideas of analytical positivism jurisprudence, its biggest function is to guide legislators classify legislation, by looking for omissions, additions, so can effective legislation in a short period of time. At the same time, it also facilitates law student learning, and provides direction for their future work in the legal fields. In thought, law system highlights the national centralism construction view, emphasized the national rationality, maintenance of the constitution established the people's congress system, set up the center of the National People's Congress and its standing committee at all levels. The constructivism too believes that the role of human reason. Again, through the use of historical material, analyses the formation of the legal system of socialism with Chinese characteristics has undergone a preliminary formation, the basic form, and then to the final forming process. While the theory of socialist legal system with Chinese characteristics has experienced a "socialist legal system", "legal system of socialist market economy", "the legal system of socialism with Chinese characteristics" between transformation of space and time. Between the key combed the Chinese officials and scholars discussing the standard about legal system formed, because this is a major theoretical issues in construction of legal system. After analyzing various views, point that the constitution is in the core position in the formation of the legal system of socialism with Chinese characteristics, if considering t the constitution should be brought into the formation of legal system, and care to the codification of China tradition, criterion of formation can be summed up in four: (1) whether the full implementation of the provisions of the constitution as the legislation; (2) the basic law of law department has codified ; (3) respect for human rights; (4) the unity of legal system. Although the legislation is a difficult task, but compared to law enforcement of the legal system, it is relatively easy. When legislation is not largely enacted, legal interpretation, especially the judicial function becomes increasingly obvious. These are all challenges for China in the future.

Chinese and foreign scholars have consensus that Voluntary principle is a fundamental principle of mediation in the civil procedure. Although the value of the voluntary principle is cherished by all persons, but the domestic theoretical studies ignore one very important question: As one state changed from natural state to civil society, the original natural rights people enjoyed will be limited, the voluntary principle in mediation is institutionalized, it will be subject to some restrictions too. Ignoring this problem will lead to some mistakes, and thus wrongly critique some legislative and judicial phenomenon. With the help of comparative method, contrasting the state of voluntary principle before it being institutionalized and the state of voluntary principle after it being institutionalized will help avoid such mistakes.

First, a purified sludge was calcined at various temperatures viz. 800, 900, 1000, 1100 and 1200˚C per hour. Subsequently 100 wt% of ware from Geryong mountain was mixed with 5~25 wt% of a purified sludge. Then the ware was treated at 1250˚C in an electric kiln to test a bending strength. The physicochemical property of the prepared ware was characterized by XRD, Raman and SEM analysis. Among the different percentage, 25 wt% of a ware in a purified sludge calcined at 1000˚C showed 689 kg/cm2 strength. Also the purified sludge calcined at 1000˚C was adequate physical properties than the other composites. Further to enhance the physical strength, 3 wt% TiO2 (a mineralizer) was added into the ware and the strength was increased up to 731 kg/cm2. The composites exhibit absorption and porosity rates of 0.17% and 0.39% respectively.

Porous Ti-systems with unidirectionally aligned channels were synthesized by freeze-drying and a heat treatment process. TiH2 powder and camphene were used as the source materials of Ti and sublimable vehicles, respectively. Camphene slurries with TiH2 content of 10 and 15 vol% were prepared by milling at 50˚C with a small amount of oligomeric polyester dispersant. Freezing of the slurry was done in a Teflon cylinder attached to a copper bottom plate cooled at -25˚C while unidirectionally controlling the growth direction of the camphene. Pores were generated subsequently by sublimation of the camphene during drying in air for 48 h. The green body was heat-treated at 1100˚C for 1 h in a nitrogen and air atmosphere. XRD analysis revealed that the samples composed of TiN and TiO2 phase were dependent on the heat-treatment atmosphere. The sintered samples showed large pores of about 120 mm which were aligned parallel to the camphene growth direction. The internal wall of the large pores had relatively small pores with a dendritic structure due to the growth of camphene dendrite depending on the degree of nucleation and powder rearrangement in the slurry. These results suggest that a porous body with an appropriate microstructure can be successfully fabricated by freeze-drying and a controlled sintering process of a camphene/TiH2 slurry.

In this study, BaTiO3 thin films were grown by RF-magnetron sputtering, and the effects of the thin film thickness on the structural characteristics of BaTiO3 thin films were systematically investigated. Instead of the oxide substrates generally used for the growth of BaTiO3 thin films, p-Si substrates which are widely used in the current semiconductor processing, were used in this study in order to pursue high efficiency in device integration processing. For the crystallization of the grown thin films, annealing was carried out in air, and the annealing temperature was varied from 700˚C. The changed thickness was within 200 nm~1200 nm. The XRD results showed that the best crystal quality was obtained for ample thicknesses 700 nm~1200 nm. The SEM analysis revealed that Si/BaTiO3 are good quality interface characteristics within 300 nm when observed thickness. And surface roughness observed of BaTiO3 thin films from AFM measurement are good quality surface characteristics within 300 nm. Depth-profiling analysis through GDS (glow discharge spectrometer) showed that the stoichiometric composition could be maintained. The results obtained in this study clearly revealed BaTiO3 thin films grown on a p-Si substrate such as thin film thickness. The optimum thickness was 300 nm, the thin film was found to have the characteristics of thin film with good electrical properties.

The structural phase transformations of 0.7Pb(Mg1/3Nb2/3)O3-0.3PbTiO3 (PMN-0.3PT) were studied using high resolution x-ray diffraction (HRXRD) as a function of temperature and electric field. A phase transformational sequence of cubic (C)→tetragonal (T)→rhombohedral (R) phase was observed in zero-field-cooled conditions; and a C→T→monoclinic (Mc)→ monoclinic (MA) phase was observed in the field-cooled conditions. The transformation of T to MA phase was realized through an intermediate Mc phase. The results also represent conclusive and direct evidence of a Mc to MA phase transformation in field-cooled conditions. Beginning from the zero-field-cooled condition, a R→MA→Mc→T phase transformational sequence was found with an increasing electric field at a fixed temperature. Upon removal of the field, the MA phase was stable at room temperature. With increasing the field, the transformation temperature from T to Mc and from Mc to MA phase decreased, and the phase stability ranges of both T and Mc phases increased. Upon removal of the field, the phase transformation from R to MA phase was irreversible, but from MA to Mc was reversible, which means that MA is the dominant phase under the electric field. In the M phase region, the results confirmed that lattice parameters and tilt angles were weakly temperature dependent over the range of investigated temperatures.

일반적인 국제법의 관점에서, 어느 국가도 외국투자를 유치하도록 강요 받을 수 없다. 영토내에서 주권을 행사하는 국가는 그들의 경제를 외국인투자자들에게 폐쇄할지 또는 개방할지에 관하여 자유롭게 결정할 권리를 가진다. 이에는 외국인투자자를 받아들여 사업을 수행함에 있어서 일정한 방법과 절차를 결정할 권리도 포함된다. 투자조약을 체결한 국가는 외국인투자를 받아들여 투자사업을 허용하여야 할 의무를 부담하며 이는 국내외 경제상황이 변할지라도 계속적으로 구속적 효력을 가진다는 것을 주지하여야 한다과거 오랜 기간 기업들이 국제적 경제영역에서 활동하고 있지만, 국제법은 기업들의 국제투자를 감독하고 보호하는 문제에 있어서 통일적인 해답을 제시하지는 못하고 있다. 국제투자를 보호하기 위한 여러 노력들이 이루어지고 있지만, 아직 국제투자를 보호하기 위한 국제법적 기반은 부족하다. 외국인투자자와 투자유치국간 투자를 시작하기 전 투자와 관련된 이행요건을 금지하거나, 보호대상이 되는 투자의 개념을 확고히 하고, 분쟁발생시 적용하는 준거법을 결정함에 있어서 국제법일반, 양자간 투자협정, 투자유치국의 국내법 등을 적용한다. 그러나 국제투자분쟁에 있어서 중요한 준거법규정을 비롯하여 외국인 투자자 및 투자를 보호하기 위한 안정적인 국제법 규정 또는 분쟁해결 체제는 아직 확실히 마련되지 않았다. 따라서 외국인 투자자 및 투자를 보호하기 위한 법적 구조는 다음의 규정을 포함하여야 한다. 첫째, 투자자와 국가간 분쟁이 발생하는 경우 ICSID와 같은 국제분쟁해결기구에 분쟁을 판단하도록 하여야 한다. 둘째, 준거법 결정과 관련하여, 투자유치국의 조치로 인하여 피해를 받은 외국인투자자에게 완전한 가치를 보상하도록 하는 국제적 기준을 제공하여야 한다. 셋째, 외국인투자자의 이익에 대한 완전한 가치를 평가 또는 결정에 있어서 무형자산, 지적재산권 등을 포함한 모든 자산의 가치를 포함하여야 한다. 이러한 노력으로 외국인투자는 계속 촉진될 것이다.

The relationship the between electrical properties and surface roughness (Ra) of a wet-etched silicon wafer were studied. Ra was measured by an alpha-step process and atomic force microscopy (AFM) while varying the measuring range 10×10, 40×40, and 1000×1000μm. The resistivity was measured by assessing the surface resistance using a four-point probe method. The relationship between the resistivity and Ra was explained in terms of the surface roughness. The minimum error value between the experimental and theoretical resistivities was 4.23% when the Ra was in a range of 10×10μm according to AFM measurement. The maximum error value was 14.09% when the Ra was in a range of 40×40μm according to AFM measurement. Thus, the resistivity could be estimated when the Ra was in a narrow range.

The electrical properties and surface morphology changes of a silicon wafer as a function of the HF concentration as the wafer is etched were studied. The HF concentrations were 28, 30, 32, 34, and 36 wt%. The surface morphology changes of the silicon wafer were measured by an SEM (80˚ tilted at ×200) and the resistivity was measured by assessing the surface resistance using a four-point probe method. The etching rate increased as the HF concentration increased. The maximum etching rate 27.31 μm/min was achieved at an HF concentration of 36 wt%. A concave wave formed on the wafer after the wet etching process. The size of the wave was largest and the resistivity reached 7.54 ohm·cm at an 30 wt% of HF concentration. At an HF concentration of 30 wt%, therefore, a silicon wafer should have good joining strength with a metal backing as well as good electrical properties.

GdBa2Cu3O7-y(Gd123) powders were synthesized by the solid-state reaction method using Gd2O3 (99.9% purity), BaCO3 (99.75%) and CuO (99.9%) powders. The synthesized Gd123 powder and the Gd123 powder with Gd2O3 addition (Gd1.5Ba2Cu3O7-y(Gd1.5)) were used as raw powders for the fabrication of Gd123 bulk superconductors. The Gd123 and Gd1.5 bulk superconductors were fabricated by sintering or a top-seeded melt growth (TSMG) process. The superconducting transition temperature (Tc,onset) of the sintered Gd123 was 93 K and the transition width was as large as 20 K. The Tc,onset of the TSMG processed Gd123 was 82 K and the transition width was also as large as 12 K. The critical current density (Jc) at 77 K and 0 T of the sintered Gd123 and TSMG processed Gd123 were as low as a few hundreds A/cm2. The addition of 0.25 mole Gd2O3 and 1 wt.% CeO2 to Gd123 enhanced the Tc, Jc and magnetic flux density (H) of the TSMG processed Gd123 sample owing to the formation of the superconducting phase with high flux pinning capability. The Tc of the TSMG processed Gd1.5 was 92 K and the transition width was 1 K. The Jcs at 77 K (0 T and 2 T) were 3.2×104 A/cm2 and 2.5×104 A/cm2, respectively. The H at 77 K of the TSMG-processed Gd1.5 was 1.96 kG, which is 54% of the applied magnetic field (3.45 kG).

The effect of a sputter deposition sequence of Cu, Zn, and Sn metal layers on the properties of Cu2ZnSnS4 (CZTS) was systematically studied for solar cell applications. The set of Cu/Sn/Zn/Cu multi metal films was deposited on a Mo/SiO2/Si wafer using dc sputtering. CZTS films were prepared through a sulfurization process of the Cu/Sn/Zn/Cu metal layers at 500˚C in a H2S gas environment. H2S (0.1%) gas of 200 standard cubic centimeters per minute was supplied in the cold-wall sulfurization reactor. The metal film prepared by one-cycle deposition of Cu(360 nm)/Sn(400 nm)/Zn(400 nm)/Cu(440 nm) had a relatively rough surface due to a well-developed columnar structure growth. A dense and smooth metal surface was achieved for two- or three-cycle deposition of Cu/Sn/Zn/Cu, in which each metal layer thickness was decreased to 200 nm. Moreover, the three-cycle deposition sample showed the best CZTS kesterite structures after 5 hr sulfurization treatment. The two- and three-cycle Cu/Sn/Zn/Cu samples showed high-efficient photoluminescence (PL) spectra after a 3 hr sulfurization treatment, wheres the one-cycle sample yielded poor PL efficiency. The PL spectra of the three-cycle sample showed a broad peak in the range of 700-1000 nm, peaked at 870 nm (1.425 eV). This result is in good agreement with the reported bandgap energy of CZTS.

In this study, a micro gas sensor for NOx was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about 2mm×2mm. Indium oxide as a sensing material for the NOx gas was synthesized by a sol-gel process. The particle size of synthesized In2O3 was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance (Rs=Rgas/Rair), occurred at 300˚C with a value of 8.0 at 1 ppm NO2 gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the NO2 gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.