CMP(Chemical Mechanical Polishing) Processes have been used to improve the planarization of the wafers in the semiconductor manufacturing industry. Polishing performance of CMP Process is determined by the chemical reaction of the liquid sol containing abrasive, pressure of the head portion and rotational speed of the polishing pad. However, frictional heat generated during the CMP process causes agglomeration of the particles and the liquidity degradation, resulting in a non-uniform of surface roughness and surface scratch. To overcome this chronic problem, herein, we introduced NaCl salt as an additive into silica sol for elimination the generation of frictional heat. The added NaCl reduced the zata potential of silica sol and increased the contact surface of silica particles onto the sapphire wafer, resulting in increase of the removal rate up to 17 %. Additionally, it seems that the silica particles adsorbed on the polishing pad decreased the contact area between the sapphire water and polishing pad, which suppressed the generation of frictional heat.

In this study, in order to improve the efficiency of n-type monocrystalline solar cells with an Alu cell structure, we investigate the effect of the amount of Al paste in thin n-type monocrystalline wafers with thicknesses of 120 μm, 130 μm, 140 μm. Formation of the Al doped p+ layer and wafer bowing occurred from the formation process of the Al back electrode was analyzed. Changing the amount of Al paste increased the thickness of the Al doped p+ layer, and sheet resistivity decreased; however, wafer bowing increased due to the thermal expansion coefficient between the Al paste and the c-Si wafer. With the application of 5.34 mg/cm2 of Al paste, wafer bowing in a thickness of 140 μm reached a maximum of 2.9 mm and wafer bowing in a thickness of 120 μm reached a maximum of 4 mm. The study’s results suggest that when considering uniformity and thickness of an Al doped p+ layer, sheet resistivity, and wafer bowing, the appropriate amount of Al paste for formation of the Al back electrode is 4.72 mg/cm2 in a wafer with a thickness of 120 μm.

The effect of retained and reversed austenite on the damping capacity in high manganese stainless steel with two phases of martensite and austenite was studied. The two phase structure of martensite and retained austenite was obtained by deformation for various degrees of deformation, and a two phase structure of martensite and reverse austenite was obtained by reverse annealing treatment for various temperatures after 70 % cold rolling. With the increase in the degree of deformation, the retained austenite and damping capacity rapidly decreased, with an increase in the reverse annealing temperature, the reversed austenite and damping capacity rapidly increased. With the volume fraction of the retained and reverse austenite, the damping capacity increased rapidly. At same volume of retained and reversed austenite, the damping capacity of the reversed austenite was higher than the retained austenite. Thus, the damping capacity was affected greatly by the reversed austenite.

This study suggested comprehensive structural characterization methods for the commercial blue light emitting diodes(LEDs). By using the Z-contrast intensity profile of Cs-corrected high-angle annular dark field scanning transmission electron microscope(HAADF-STEM) images from a commercial lateral GaN-based blue light emitting diode, we obtained important structural information on the epilayer structure of the LED, which would have beendifficult to obtain by conventional analysis. This method was simple but very powerful to obtain structural and chemical information on epi-structures in a nanometer-scale resolution. One of the examples was that we could determine whether the barrier in the multi-quantum well(MQW) was GaN or InGaN. Plan-view TEM observations were performed from the commercial blue LED to characterize the threading dislocations(TDs) and the related V-pit defects. Each TD observed in the region with the total LED epilayer structure including the MQW showed V-pit defects for almost of TDs independent of the TD types: edge-, screw-, mixed TDs. The total TD density from the region with the total LED epilayer structure including the MQW was about 3.6 × 108 cm−2 with a relative ratio of Edge- : Screw- :Mixed-TD portion as 80%: 7%: 13%. However, in the mesa etched region without the MQW total TD density was about 2.5 × 108 cm−2 with a relative ratio of Edge- : Screw- :Mixed TD portion of 86%: 5%: 9 %. The higher TD density in the total LED epilayer structure implied new generation of TDs mostly from the MQW region.

(PDDA/SiO2) thin films that consisted of positively charged poly (diallyldimethylammonium chloride) (PDDA) and negatively charged SiO2 nanoparticles were fabricated on a glass substrate by an applying voltage layer-by-layer (LBL) self-assembly method. In this study, the microstructure and optical properties of the (PDDA/SiO2) thin films coated on glass substrate were measured as a function of the applied voltage on the Pt electrodes. When 1.0 V was applied to a Pt electrode in a PDDA and SiO2 solution, the thickness of the (PDDA/SiO2)10 thin film increased from 79 nm to 166 nm. The surface roughness also increased from 15.21 nm to 33.25 nm because the adsorption volume of the oppositely charged PDDA and SiO2 solution increased. Especially, when the voltage was applied to the Pt electrode in the SiO2 solution, the thickness increase of the (PDDA/SiO2) thin film was larger than that obtained when using the PDDA solution. The refractive index of the fabricated (PDDA/SiO2) thin film was ca. n = 1.31~1.32. The transmittance of the glass substrate coated by (PDDA/SiO2)6 thin film with a thickness of 106 nm increased from ca. 91.37 to 95.74% in the visible range.

The effect of titanium dioxide (TiO2) on the properties of color conversion glasses was examined for glasses based on BaO-ZnO-B2O3-SiO2. One glass sample, containing 25 mol% of each component, was used as a reference; the other three glass samples contained 1, 3, and 5 mol% TiO2, respectively. The four color conversion glass samples were prepared by sintering a mixture of glass frits and a YAG:Ce+ phosphor. The characteristics of the color conversion glass samples, such as luminous efficacy, luminance, CIE (Commission International de I'Eclairage) chromaticity, CCT (Correlated Color Temperature), and CRI (Color Rendering Index) were analyzed according to the PL spectrum. The refractive index of the glass samples was found to increase with the titanium dioxide content. In conclusion, luminous efficacy of color conversion glasses increased as the content of TiO2 was raised in the glass matrix.

In this study, we fabricated a novel micro porous hybrid scaffold of biphasic calcium phosphate (BCP) and a polylectrolyte complex (PEC) of chitosan (CS) and hyaluronic acid (HA). The fabrication process included loading of CS-HA PEC in a bare BCP scaffold followed by lypophilization. SEM observation and porosimetry revealed that the scaffold was full of micro and macro pores with total porosity of more than 60 % and pore size in the range of 20~200μm. The composite scaffold was mechanically stronger than the bare BCP scaffold and was significantly stronger than the CS-HA PEC polymer scaffold. Bone morphogenetic growth factor (BMP-2) was immobilized in CS-HA PEC in order to integrate the osteoinductive potentiality required for osteogenesis. The BCP frame, prepared by sponge replica, worked as a physical barrier that prolonged the BMP-2 release significantly. The preliminary biocompatibility data show improved biological performance of the BMP-2 immobilized hybrid scaffold in the presence of rabbit bone marrow stem cells (rBMSC).

Calcium phosphate minerals are biologically important because of their application in the fields of orthopaedics and dentistry. Herein we have tried to synthesize calcium phosphate minerals from biowaste clam shells. A simple microwave method was used to synthesize a mixture of calcium phosphate minerals such as hydroxyapatite, tri-calcium phosphate, and monetite. The microwave induces vibration of the dipole ions in the reagent. The heating and rearrangement of ions and atoms occurs during the process. The phases obtained in the final powder were ascertained by X-ray diffraction; the morphology of each sample was checked using a scanning electron microscope. We were able to obtain a mixture of calcium phosphate minerals using the microwave method; the calcined powder showed a brick like morphology, which is different from the rod shape morphology of the hydroxyapatite obtained using the hydrothermal process.

We report the chemical vapor deposition growth characteristics of graphene on various catalytic metal substrates such as Ni, Fe, Ag, Au, and Pt. 50-nm-thick metal films were deposited on SiO2/Si substrates using dc magnetron sputtering. Graphene was synthesized on the metal/SiO2/Si substrates with CH4 gas (1 SCCM) diluted in mixed gases of 10% H2 and 90 % Ar (99 SCCM) using inductively-coupled plasma chemical vapor deposition (ICP-CVD). The highest quality of graphene film was achieved on Ni and Fe substrates at 900˚C and 500 W of ICP power. Ni substrate seemed to be the best catalytic material among the tested materials for graphene growth because it required the lowest growth temperature (600˚C) as well as showing a low ICP power of 200W. Graphene films were successfully grown on Ag, Au, and Pt substrates as well. Graphene was formed on Pt substrate within 2 sec, while graphene film was achieved on Ni substrate over a period of 5 min of growth. These results can be understood as showing the direct CVD growth of graphene with a highly efficient catalytic reaction on the Pt surface.

Anti-reflection coating films have used to increase the transmittance of displays and enhance the efficiency of solar cells. Hydrophobic anti-reflection coating films were fabricated on a glass substrate by sol-gel method. To fabricate an anti-reflection film with a high transmittance, poly ethylene glycol (PEG) was added to tetraethyl orthosilicate (TEOS) solution. The content of PEG was changed from 1 to 4 wt% in order to control the morphology, thickness, and refractive index of the SiO2 thin films. The reflectance and transmittance of both sides of the coated thin film fabricated with PEG 4 wt% solution were 0.3% and 99.4% at 500 nm wavelength. The refractive index and thickness of the thin film were n = 1.29 and d = 105 nm. Fluoro alkyl silane (FAS) was used for hydrophobic treatment on the surface of the anti-reflection thin film. The contact angle was increased from 13.2˚ to 113.7˚ after hydrophobic treatment.

Physical and chemical changes in a polished wafer and in 2.5μm & 4μm epitaxially grown Si layer wafers (Epilayer wafer) after surface treatment were investigated. We characterized the influence of surface treatment on wafer properties such as surface roughness and the chemical composition and bonds. After each surface treatment, the physical change of the wafer surface was evaluated by atomic force microscopy to confirm the surface morphology and roughness. In addition, chemical changes in the wafer surface were studied by X-ray photoemission spectroscopy measurement. Changes in the chemical composition were confirmed before and after the surface treatment. By combined analysis of the physical and chemical changes, we found that diluted hydrofluoric acid treatment is more effective than buffered oxide etching for SiO2 removal in both polished and Epi-Layer wafers; however, the etch rate and the surface roughness in the given treatment are different among the polished 2.5μm and 4μm Epi-layer wafers in spite of the identical bulk structural properties of these wafers. This study therefore suggests that independent surface treatment optimization is required for each wafer type, 2.5μm and 4μm, due to the meaningful differences in the initial surface chemical and physical properties.

To increase the mechanical property of zirconia, we have investigated the phase change and the resulting hardness of zirconia ceramics by hydroxyapatite (HA) powder bed sintering. It was observed using X-ray diffraction that the cubic zirconia phase, which has a higher hardness value than that of the tetragonal phase, was obtained at the surface of 3 mol% Y2O3 doped tetragonal zirconia polycrystal (3Y-TZP) ceramics during the sintering process; in our experimental conditions, the phase change at the surface increased as the sintering time increased. We believe that the observed crystalline phase change originated from the decomposition of HA and the diffusion of CaO, as follows. CaO, which was derived from the decomposition of HA at high temperature (1400˚C), diffused into the surface of 3Y-TZP and acted as a stabilizer. As a result, the Vickers hardness value of the treated specimens was higher than that of the non-treated specimen due to the formation of the cubic phase on the surface of 3Y-TZP.

It is known that bones get damaged by accidents and aging. Since the discovery of Bioglass, various kinds of ceramics have been also found to bond to living bone; some of these ceramics are already being clinically used as bone-repairing materials. In the present study, antibacterial calcium silicate gel (Ag-30CaO·70SiO2 gel) was prepared by sol-gel method in order to control the microstructure, which is related to the dissolution rate and induction period of apatite formation in body environment. In addition, biological Ag-30CaO·70SiO2 is tested. This was done to impart antimicrobial activity to the 30CaO·70SiO2. Ag ion was added during sol-gel synthesis to replace the H2O added during the making of the 30CaO·70SiO2 gel, which has silver solutions of various concentration. After the sol-gel process, 1N-HNO3 solution was used to wash the gel when synthesizing the gel, in order to maintain the porous structure and remove PEG, water soluble polymers. Then, the apatite forming ability of the sol-gel derived CaO-SiO2 gels was investigated using simulated body fluid (SBF), which had almost the same ion concentration as that of human blood plasma. The gels were analyzed by FT-IR spectroscopy, SEM observation, XRD, and fluorescent microscopy. The apatite was successfully created even after washing the gel; apatite is present in an amorphous state, and was found to affect the concentration of the Ag ion in cells in MC3T3 live & dead assay results. From these results, it is suggested that a good material that can be used to repair defects of nature bone is Ag-30CaO·70SiO2 gel.

Diameter-controlled tin oxide nanofibers have been successfully prepared using electrospinning and a subsequent calcination process; their diameters, morphologies, and crystal structures have been characterized. The diameters of the as-spun nanofibers can be decreased by lowering the concentration of a polymer and a tin precursor in the electrospinning solution because of the decrease in the solution viscosity. The crystal structure of the nanofibers calcined at various temperatures from 200˚C to 800˚C has been proved to be the tetragonal rutile of tin oxide; crystallinity is improved by increasing the temperature. However, nanofibers with lower concentrations of tin precursor do not maintain their fibrous structures after calcination at high temperatures. In this study, the effect of the relationship between the precursor concentration and the calcination temperature on the diameter and the morphology of the tin oxide nanofiber has been systematically investigated and discussed.

Eu2+/Dy3+-doped Sr2MgSi2O7 powders were synthesized using a solid-state reaction method with flux (NH4Cl). Thebroad photoluminescence (PL) excitation spectra of Sr2MgSi2O7:Eu2+ were assigned to the 4f7-4f65d transition of the Eu2+ ions,showing strong intensities in the range of 375 to 425nm. A single emission band was observed at 470nm, which was the resultof two overlapping subbands at 468 and 507nm owing to Eu(I) and Eu(II) sites. The strongest emission intensity ofSr2MgSi2O7:Eu2+ was obtained at the Eu concentration of 3mol%. This concentration quenching mechanism was attributableto dipole-dipole interaction. The Ba2+ substitution for Sr2+ caused a blue-shift of the emission band; this behavior was discussedby considering the differences in ionic size and covalence between Ba2+ and Sr2+. The effects of the Eu/Dy ratios on thephosphorescence of Sr2MgSi2O7:Eu2+/Dy3+ were investigated by measuring the decay time; the longest afterglow was obtainedfor 0.01Eu2+/0.03Dy3+.

The purpose of this study was to investigate the microstructures and mechanical properties of zirconia toughened alumina (ZTA) ceramics prepared from two kinds of 3Y-TZP powders. ZTA composites were prepared by adding two kinds of 3Y-TZP powders, 3YEH (BET = 7m2/g) and 3YEM (BET = 16m2/g), to α-alumina in the range of 5-25 wt%. It was found that the microstructure photographs of the ZTA composites showed that the average grain size of alumina decreased as the content of zirconia increased. In our present study, specimens containing 3YEM zirconia exhibited smaller grain sizes compared to those of 3YEH zirconia. The Vickers hardness of the ZTA composites that were sintered at 1600˚C for 2 hrs was found to smoothly decrease with increasing zirconia content because of the low Young modulus in zirconia. The Vickers hardness of the ZTA containing 3YEH zirconia was greater than that of the 3YEM zirconia. In substance, the fracture toughness (K1c) of the ZTA composites increased as the content of zirconia increased. The fracture toughness (K1c) of ZTA containing 3YEM zirconia was greater than that of 3YEH zirconia.

GaN is most commonly used to make LED elements. But, due to differences of the thermal expansion coefficient and lattice mismatch with sapphire, dislocations have occurred at about 109~1010/cm2. Generally, a low temperature GaN buffer layer is used between the GaN layer and the sapphire substrate in order to reduce the dislocation density and improve the characteristics of the thin film, and thus to increase the efficiency of the LED. Further, patterned sapphire substrate (PSS) are applied to improve the light extraction efficiency. In this experiment, using an AlN buffer layer on PSS in place of the GaN buffer layer that is used mainly to improve the properties of the GaN film, light extraction efficiency and overall properties of the thin film are improved at the same time. The AlN buffer layer was deposited by using a sputter and the AlN buffer layer thickness was determined to be 25 nm through XRD analysis after growing the GaN film at 1070˚C on the AlN buffer CPSS (C-plane Patterned Sapphire Substrate, AlN buffer 25 nm, 100 nm, 200 nm, 300 nm). The GaN film layer formed by applying a 2 step epitaxial lateral overgrowth (ELOG) process, and by changing temperatures (1020~1070˚C) and pressures (85~300 Torr). To confirm the surface morphology, we used SEM, AFM, and optical microscopy. To analyze the properties (dislocation density and crystallinity) of a thin film, we used HR-XRD and Cathodoluminescence.

Landfills are nettlesome sources of malodorous gases as well as methane that has the second largest radiative forcing of long residence-greenhouse gases, followed carbon dioxide. Because methane and malodorous gases are simultaneously emitted in landfills, investigation of whether or not methane and malodorous gases affect each other’s degradation is important. Amines such as monomethylamine(MMA), dimethylamine(DMA) and trimethylamine(TMA) are representative malodorous gases from landfills. In this study, the effect of amines on the bio-oxidation of methane was evaluated using a methane-oxidizing consortium where the dominant bacteria were Methylocystis spp. Amines inhibited the methane oxidation by the consortium, and the inhibition effect increased in the order of TMA > DMA > MMA. Methane oxidation rates in the consortium decreased with increasing amine/methane ratio(mol/mol). These results can be used to design and optimize the biological processes for simultaneous removal of methane and malodorous gases.

Residential thermal conditions are important because people spend the majority of their time in the home environment. Indoor temperature and relative humidity(RH) were measured continuously over 1 year in 14 residences in Seoul, Korea. The relationship between residential indoor and outdoor conditions were determined by four meteorological parameters-temperature, apparent temperature(AT), RH, and absolute humidity(AH). Outdoor and indoor temperature, AT and AH were closely correlated, but RH was not. While indoor temperatures, AT, and AH were significantly higher than the corresponding outdoor levels, indoor RH was significantly lower than outdoor RH. Regression models between indoor and outdoor temperature detected a heating threshold at 15.0oC of outdoor temperature. The indoor thermal conditions were significantly different by the two residence types. Indoor temperatures in apartments were lower in summer and higher in winter than those in detached houses. However, indoor RHs in apartments were lower than in detached houses. During tropical nights, the daily temperature range was higher in residences with air-conditioning than in naturally ventilated residences.

This research determined the threshold value of 10 specified offensive odor substances based on the 3 point comparison sensory method. The panelist's thresholds were calculated by taking the arithmetic, geometric mean, and 50th percentile. Three methods of calculating the odor thresholds from the same data are compared. For 10 odor substances, the panelist's thresholds revealed a logarithmically normal distribution. The 50th percentile was the best method among the three methods of calculating the odor threshold from the 270 thresholds of 18 panels. As a result, the threshold values of individual odor substances, including i-valeric acid, n-valeric acid, n-butyric acid, and butyl acetate ranged between 0.0001~0.006 ppm, while the values of methyl ethyl ketone and toluene were relatively higher than that of other substances at 0.7107 ppm and 1.2139 ppm, respectively. The threshold values of the 10 specified odor substances were compared in Korea and overseas, which showed that the characteristics of sensory response varied by substance and nation.