The surface of silicon dummy wafers is contaminated with metallic impurities owing to the reaction with and adhesion of chemicals during the oxidation process. These metallic impurities negatively affect the device performance, reliability, and yield. To solve this problem, a wafer-cleaning process that removes metallic impurities is essential. RCA (Radio Corporation of America) cleaning is commonly used, but there are problems such as increased surface roughness and formation of metal hydroxides. Herein, we attempt to use a chelating agent (EDTA) to reduce the surface roughness, improve the stability of cleaning solutions, and prevent the re-adsorption of impurities. The bonding between the cleaning solution and metal powder is analyzed by referring to the Pourbaix diagram. The changes in the ionic conductivity, H2O2 decomposition behavior, and degree of dissolution are checked with a conductivity meter, and the changes in the absorbance and particle size before and after the reaction are confirmed by ultraviolet-visible spectroscopy (UV-vis) and dynamic light scattering (DLS) analyses. Thus, the addition of a chelating agent prevents the decomposition of H2O2 and improves the life of the silicon wafer cleaning solution, allowing it to react smoothly with metallic impurities.

We report the effect of Standard Clean-1 (SC-1) cleaning to remove residual Ti layers after silicidation to prevent Al diffusion into Si wafer for Ti Schottky barrier diodes (Ti-SBD). Regardless of SC-1 cleaning, the presence of oxygen atoms is confirmed by Auger electron spectroscopy (AES) depth profile analysis between Al and Ti-silicide layers. Al atoms at the interface of Ti-silicide and Si wafer are detected, when the SC-1 cleaning is not conducted after rapid thermal annealing. On the other hand, Al atoms are not found at the interface of Ti-SBD after executing SC-1 cleaning. Al diffusion into the interface between Ti-silicide and Si wafer may be caused by thermal stress at the Ti-silicide layer. The difference of the thermal expansion coefficients of Ti and Ti-silicide gives rise to thermal stress at the interface during the Al layer deposition and sintering processes. Although a longer sintering time is conducted for Ti-SBD, the Al atoms do not diffuse into the surface of the Si wafer. Therefore, the removal of the Ti layer by the SC-1 cleaning can prevent Al diffusion for Ti-SBD.

Transparent, photocatalytic, and self-cleaning TiO2 thin film is developed by TiO2 sol-gel coating on glass and polycarbonate (PC) substrates. Acetyl acetone (AcAc) suppresses the precipitation of TiO2 by forming a yellowish (complex) transparent sol-gel. XPS analysis confirms the presence of Ti2p and O1s in the thin films on glass and PC substrates. The TiO2- sol is prepared by stabilizing titanium (IV) isopropoxide (TTIP) with diethylamine and methyl alcohol. The addition of AcAcsilane coupling solution to the TiO2-sol instantaneously turns to yellowish color owing to the complexing of titanium with AcAc. The AcAc solution substantially improves the photocatalytic property of the TiO2 coating layer in MB solutions. The coated TiO2 film exhibits super hydrophilicity without and with light irradiation. The TiO2 thin film stabilized by adding 8.7 wt% AcAc shows the highest photo-degradation for methylene blue (MB) solution under UV light irradiation. Also, the optimum photocatalytic activity is obtained for the 8.7 wt% AcAc-stabilized TiO2 coating layer calcined at 450 oC. The thin-films on glass exhibit fast self-cleaning from oleic acid contamination within 45 min of UV-light irradiation. The appropriate curing time at 140 oC improves the anti-fogging and thermal stability of the TiO2 film coated on PC substrate. The watermark-free PC substrate is particularly beneficial to combat fogging problems of transparent substrates.

본 연구에서는 최근, 자연환경의 변화에 따른 생태계 예측과 지속가능한 개발과 보전의 정량적 근거 제시를 위해 전세계적으로 연구중요도와 활용도가 높아지고 있는 생태 조사연구 데이터의 정제와 표준화 및 서비스 방안에 대하여 제시하였다. 1997년부터 매 10년 단위로 전국을 대상으로 수행된 제2차, 제3차 전국자연환경조사 결과와 2014년부터 매 5년 단위로 수행된 제4차 전국자연환경조사 결과를 대상으로 전국자연환경조사 지침을 따라 별도 개발된 입력 오류 검증 프로그램을 통해 1차 정제 후 분야별 전문가의 검수를 거쳤다. 또한, 국내외 데이터 표준 사례들을 분석하여 국내의 자연환경과 생태조사 자료인 생태정보를 표준화하는 방안을 제시하였다. 전국자연환경조사 결과에 대해 (1) 조사자료인 데이터 용어의 표준화, (2) 유사한 유 형의 데이터 테이블 통합 및 (3) 불필요한 속성과 입력오류 를 제거하였고 (4) 현장 조사자 별로 상이한 입력항목의 단 일화, (5) 데이터를 일련번호 코드로 정리하고 (6) 입력항목 별 코드 매핑을 수행하였다. 연구결과, 연구자와 일반인들이 활용하기 쉽도록 전국자연환경조사 데이터를 정제하고 국내 최초의 생태데이터 표준안 마련의 기반을 수립하였다. 또한, 연구결과로 산출된 전국자연환경조사 데이터는 국내의 환경영향평가, 서식지 보전지역 설정, 멸종위기종 분포 예측, 기후변화에 따른 생태계 위험 예측은 물론, 국외 생태정보 연계 등에 손쉽게 공유 및 활용가능하여 다양한 환경정책수립과 관련 연구활성화에 기여할 것으로 기대된다. 본 연구를 통해 정제된 전국자연환경조사 데이터는 국립생태원에서 국내 최초로 개발중인 생태정보포털서 비스 시스템인 에코뱅크 (http://nie-ecobank.kr)를 통해 개 방하여 누구나 온라인상에서 쉽게 접근하고 활용할 수 있도록 하였다.

In this study, air scouring cleaning was selected and applied among 5 small blocks (S1~S5) in domestic S cities to analyze the cleaning effect of particles causing discoloration. In order to identify the cleaning effect, 10 locations were selected as water quality investigation point, such as the stagnant or water mains ends. Removal of solids, variation of particle components, weight and concentration were analyzed. And the level of the cleanness of the surface inside water mains using endoscope was investigated. As a result of analysis, the solids discharged after cleaning were mainly sand and gravel, pieces related to pipe materials, and corrosion products. As a result of analyzing the concentrated particles of the filter before and after cleaning, it was found that the change in discoloration on the filter was large. In addition, as a result of comparing the weight and the concentration of the particles, it was found that the particles causing discoloration were significantly removed after cleaning. From the results of the endoscopy, it was confirmed that most of the precipitated and accumulated dark yellow discoloration matters inside water mains were removed through cleaning. Therefore, it seems that the particles causing discoloration in water decreased after cleaning. Therefore, it is expected that, if properly cleaning was applied, matters that cause discoloration can be removed from the water mains, and customer's complaints can also be reduced through water quality improvement.

본 연구는 (주)퓨어엔비텍에서 제조한 multi-bore 형태의 중공사 막을 이용하여 오염된 원수의 투과 후 오염된 막의 재사용을 위해 화학적 세정효율에 대해 파악하고자 하였으며 이를 위해 제조된 중공사 막의 재료는 내화학성이 좋은 PSf (polysulfone) 소재를 사용하였다. 실험은 소혈청 알부민(BSA)을 이용한 내오염성 평가 및 염기성 용액인 차아염소산나트륨 (NaOCl), 산성 용액인 구연산(citric acid)을 이용해 장기 함침하여 내화학성 평가를 진행하였다. 시간에 따른 수투과도와 인장강도를 측정하여 분리막의 기계적 강도와 성능의 감소에 대한 결과를 관찰하였다. 이후 소혈청 알부민으로 오염된 막의 화학적 용액에 따른 역세척 후 회복효율을 파악하였다. PSf 중공사 막은 뛰어난 내화학성을 가졌으며 화학적세척결과 차아염소 산나트륨의 효율이 높음을 확인하였다.

정삼투 공정(forward osmosis, FO)은 역삼투 공정(reverse osmosis, RO)에 비해 저압으로 운영되므로 오염 제어, 유지 보수, 막 세정 및 잠재적 에너지 저감 측면에서 큰 이점이 있어 다양한 분야에 적용할 수 있는 기술이다. 특히, 정삼투 공정의 막오염층이 비교적 느슨하고 분산된 특성을 가지므로 역삼투 공정과 달리 물리세정만으로도 충분한 막오염 제어가 가능하다. 하지만 기존 연구들의 경우 정삼투 물리세정에 적합한 세정 유속을 적용하지 않아 최적화 운전을 하지 못했다는 한계가 있다. 따라서 이 연구는 경제적인 에너지량으로 높은 효율의 세정을 보일 수 있는 적절한 유속의 정당성 평가를 목적으로 한다. 정삼투 공정 막오염 실험을 8.54 cm/s 순환 유속으로 유지하고 세 가지 세정유속으로 회복률과 SEC(specific energy consumption) 비교 평가하였다. 이 실험의 결과로 2배속 세정이 3배속 세정의 수투과도 회복률 만큼의 높은 효율을 보 이는 동시에, 2배속 세정이 높은 세정효율 및 경제적인 SEC를 보이는 적절한 유속이라는 것을 확인하였다.

This research proposes an optimal flushing operation technique in an effort to prevent secondary water pollutions and accidents in aged pipes, and to improve the cleaning effect of unidirectional flushing. Water flow directions were analyzed using EPANET 2.0, while flushing and air scouring experiments in forward and reverse directions were performed in the field. In 42 experiments, average residual chlorine concentration and turbidity were improved after cleaning compared to before cleaning. It was found that even when the same cleaning method was used, further improvement of cleaning effect was possible by applying air injection and reverse direction cleaning techniques. By means of one-way ANOVA(Analysis of variance), it was also possible to statistically verify the need of actively utilizing air injection and reverse direction cleaning. Based on correlation between turbidity and TSS, the total amount of suspended solids removal was estimated for 874 flushing operations and 194 air scouring operations. The result showed that air scouring used more discharge water than flushing by an average of 4.9 m3 yet with larger amounts of suspended solids removal by an average of 145.9 g. The result of analysis on turbidity values from 887 flushing operations showed low cleaning effect of unidirectional flushing for the pipes with diameters over 300 mm. In addition, the turbidity values measured during cleaning showed an increasing tendency as pipe age increased. The methodology and results of this research are expected to contribute to the efficient maintenance and improvement of water quality in water distribution networks. Follow-up research involving the measurement of water quality at regular time intervals during cleaning would allow a more accurate comparison of discharge water quality characteristics and cleaning effects between different cleaning methods. To this end, it is considered necessary to develop a standardized manual that can be used in the field and to provide relevant trainings.

We analyzed volatile organic compounds (VOCs) of petroleum-based laundry solvents in closed systems by static headspace analysis and investigated the emission characteristics of odorous compounds emitted from organic solvents in the small-scale dry cleaning process. The compounds containing eight to eleven carbon atoms were analyzed to account for 96.92% of the total peak area in a GC-MS chromatogram. It was found that the compounds with ten carbon atoms showed the largest proportion. In the small-scale dry cleaning process (3 kg of laundry and 40 min of drying time), a total of 36 VOCs was quantified, and the odor contribution of these compounds was evaluated. The sum of the odor quotient (SOQ) was analyzed up to 151±163 in the first 12 min of operation. The main odor-causing compounds were acrolein, ethylbenzene, hexane, acetone, and decane, and their odor contributions were 32.28%, 13.47%, 10.52%, 10.20%, and 8.08%, respectively.